High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure.

ABSTRACT

In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO3, LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k2eff) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO2/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave (λ/4) Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system.