Enhancing SEM positioning precision with a LEGO®-based sample fitting system.

Zecca, Piero Antonio; Brambilla, Andrea; Reguzzoni, Marcella; Protasoni, Marina; Raspanti, Mario

Zecca, Piero Antonio; Brambilla, Andrea; Reguzzoni, Marcella; Protasoni, Marina; Raspanti, Mario.

Afiliação

Zecca PA; Department of Medicine and Technological Innovation, University of Insubria, Varese, Italy.
Brambilla A; Department of Medicine and Technological Innovation, University of Insubria, Varese, Italy.
Reguzzoni M; Department of Medicine and Technological Innovation, University of Insubria, Varese, Italy.
Protasoni M; Department of Medicine and Technological Innovation, University of Insubria, Varese, Italy.
Raspanti M; Department of Medicine and Technological Innovation, University of Insubria, Varese, Italy.

Microsc Res Tech ; 87(4): 747-752, 2024 Apr.

Article em En | MEDLINE | ID: mdl-38037815

Palavras-chave

feature registration process; mechanical tolerance evaluation; positioning system; sample repositioning precision; scanning electron microscopy (SEM)

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2024 Tipo de documento: Article

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2024 Tipo de documento: Article