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Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer.
Nakamura, Nathan; Szypryt, Paul; Dagel, Amber L; Alpert, Bradley K; Bennett, Douglas A; Doriese, William Bertrand; Durkin, Malcolm; Fowler, Joseph W; Fox, Dylan T; Gard, Johnathon D; Goodner, Ryan N; Harris, James Zachariah; Hilton, Gene C; Jimenez, Edward S; Kernen, Burke L; Larson, Kurt W; Levine, Zachary H; McArthur, Daniel; Morgan, Kelsey M; O'Neil, Galen C; Ortiz, Nathan J; Pappas, Christine G; Reintsema, Carl D; Schmidt, Daniel R; Schultz, Peter A; Thompson, Kyle R; Ullom, Joel N; Vale, Leila; Vaughan, Courtenay T; Walker, Christopher; Weber, Joel C; Wheeler, Jason W; Swetz, Daniel S.
Afiliação
  • Nakamura N; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Szypryt P; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Dagel AL; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Alpert BK; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Bennett DA; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • Doriese WB; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Durkin M; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Fowler JW; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Fox DT; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Gard JD; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Goodner RN; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Harris JZ; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Hilton GC; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • Jimenez ES; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Kernen BL; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Larson KW; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • Levine ZH; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • McArthur D; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Morgan KM; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • O'Neil GC; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • Ortiz NJ; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • Pappas CG; National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
  • Reintsema CD; Sandia National Laboratories, Albuquerque, NM 87123, USA.
  • Schmidt DR; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Schultz PA; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Thompson KR; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Ullom JN; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Vale L; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Vaughan CT; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Walker C; Department of Physics, University of Colorado, Boulder, CO 80309, USA.
  • Weber JC; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Wheeler JW; National Institute of Standards and Technology, Boulder, CO 80305, USA.
  • Swetz DS; Sandia National Laboratories, Albuquerque, NM 87123, USA.
Sensors (Basel) ; 24(9)2024 Apr 30.
Article em En | MEDLINE | ID: mdl-38732996
ABSTRACT
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed.
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2024 Tipo de documento: Article
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2024 Tipo de documento: Article