Revealing the 3-dimensional shape of atom probe tips by atomic force microscopy.

Fleischmann, Claudia; Paredis, Kristof; Melkonyan, Davit; Vandervorst, Wilfried

Fleischmann, Claudia; Paredis, Kristof; Melkonyan, Davit; Vandervorst, Wilfried.

Afiliação

Fleischmann C; IMEC, Kapeldreef 75, Heverlee 3001, Belgium. Electronic address: fleischm@imec.be.
Paredis K; IMEC, Kapeldreef 75, Heverlee 3001, Belgium.
Melkonyan D; IMEC, Kapeldreef 75, Heverlee 3001, Belgium; Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, Leuven 3001, Belgium.
Vandervorst W; IMEC, Kapeldreef 75, Heverlee 3001, Belgium; Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, Leuven 3001, Belgium.

Ultramicroscopy ; 194: 221-226, 2018 11.

Article em En | MEDLINE | ID: mdl-30216823

Palavras-chave

AFM; APT; Atomic force microscopy; Non-hemispherical emitter shape; Reconstruction artefacts; TEM; Tip convolution; Tip radius; Tip shape evolution

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Ultramicroscopy Ano de publicação: 2018 Tipo de documento: Article País de publicação: Holanda

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