Increasing the transmission efficiency of transcranial ultrasound using a dual-mode conversion technique based on Lamb waves.

Transcranial focused ultrasound (FUS) is a noninvasive treatment for brain tumors and neuromodulation. Based on normal incidence, conventional FUS techniques use a focused or an array of ultrasonic transducers to overcome the attenuation and absorption of ultrasound in the skull; however, this remains the main limitation of using FUS. A dual-mode conversion technique based on Lamb waves is proposed to achieve high transmission efficiency. This concept was validated using the finite element analysis (FEA) and experiments based on changes in the incident angle. Aluminum, plexiglass, and a human skull were used as materials with different attenuations. The transmission loss was calculated for each material, and the results were compared with the reflectance function of the Lamb waves. Oblique incidence based on dual-mode conversion exhibited a better transmission efficiency than that of a normal incidence for all of the specimens. The total transmission losses for the materials were 13.7, 15.46, and 3.91 dB less than those associated with the normal incidence. A wedge transducer was designed and fabricated to implement the proposed method. The results demonstrated the potential applicability of the dual-mode conversion technique for the human skull.

Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates.

We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch-catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at -6 dB were measured by hydrophone.

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization.

Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit-center frequency, bandwidth, depth of field, and crosstalk-that could be optimized to design robust, flexible PMUT arrays.

High-spatial-resolution transcranial focused ultrasound neuromodulation using frequency-modulated pattern interference radiation force.

Stimulating the brain in a precise location is crucial in ultrasound neuromodulation. However, improving the resolution proves a challenge owing to the characteristics of transcranial focused ultrasound. In this paper, we present a new neuromodulation system that overcomes the existing limitations based on an acoustic radiation force with a frequency-modulated waveform and standing waves. By using the frequency-modulated pattern interference radiation force (FM-PIRF), the axial spatial resolution can be reduced to a single wavelength level and the target location can be controlled in axial direction electronically. A linear frequency-modulated chirp waveform used in the experiment was designed based on the simulation results. The displacement of the polydimethylsiloxane (PDMS) cantilever was measured at intervals of 0.1 mm to visualize the distribution of radiation force. These results and methods experimentally show that FM-PIRF has improved spatial resolution and capability of electrical movement.

Through-Silicon via Device Non-Destructive Defect Evaluation Using Ultra-High-Resolution Acoustic Microscopy System.

In this study, an ultra-high-resolution acoustic microscopy system capable of non-destructively evaluating defects that may occur in thin film structures was fabricated. It is an integrated system of the control module, activation module, and data acquisition system, in which an integrated control software for controlling each module was developed. The control module includes the mechanical, control, and ultrasonic parts. The activation module was composed of the pulser/receiver, and the data acquisition system included an A/D board. In addition, the integrated control software performs system operation and material measurement and includes an analysis program to analyze the obtained A-Scan signals in various ways. A through-silicon via (TSV) device, which is a semiconductor structure, was prepared to verify the performance of the developed system. The TSV device was analyzed using an ultra-high-resolution acoustic microscope. When the C-Scan images were analyzed, void defects with a size of 20 µm were detected at a depth of approximately 32.5 µm. A similar result could be confirmed when the cross section was measured using focused ion beam (FIB) microscopy.

Acoustic radiation force for analyzing the mechanical stress in ultrasound neuromodulation.

Objective. Although recent studies have shown that mechanical stress plays an important role in ultrasound neuromodulation, the magnitude and distribution of the mechanical stress generated in tissues by focused ultrasound transducers have not been adequately examined. Various acoustic radiation force (ARF) equations used in previous studies have been evaluated based on the tissue displacement results and are suitable for estimating the displacement. However, it is unclear whether mechanical stress can be accurately determined. This study evaluates the mechanical stress predicted by various AFR equations and suggests the optimal equation for estimating the mechanical stress in the brain tissue.Approach. In this paper, brain tissue responses are compared through numerical finite element simulations by applying the three most used ARF equations-Reynolds stress force ((RSF)), momentum flux density tensor force, and attenuation force. Three ARF fields obtained from the same pressure field were applied to the linear elastic model to calculate the displacement, mechanical stress, and mean pressure generated inside the tissue. Both the simple pressure field using a single transducer and the complex standing wave pressure field using two transducers were simulated.Main results. For the case using a single transducer, all three ARFs showed similar displacement. However, when comparing the mechanical stress results, only the results using the RSF showed a strong stress tensor at the focal point. For the case of using two transducers, the displacement and stress tensor field of the pattern related to the standing wave were calculated only from the results using the RSF.Significance. The model using RSF equation allows accurate analysis on stress tensor inside the tissue for ultrasound neuromodulation.

Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation.

A theoretical simulation study of the dispersion characteristic of the surface acoustic wave (Rayleigh wave) was conducted by modeling the adhesion interlayer with stiffness coefficients to evaluate the bonding properties of nano-scale thin film structures. For experimental validation, a set of thin film specimens were fabricated-637 nm, 628 nm, 637 nm, 600 nm, and 600 nm thick titanium (Ti) films were deposited on silicon (Si) (100) substrate using a DC Magnetron sputtering process with DC power from 28.8 W, 57.6 W, 86.4 W, 115.2 W, and 144 W. The thicknesses of the Ti films were measured using a scanning electron microscope (SEM). Surface acoustic wave velocity for each of the manufactured thin film specimens was measured by using a V(z) curve technique of a Scanning Acoustic Microscope. The measured velocity, transducer frequency, and thickness of the film were applied to dispersion characteristic simulation for a given stiffness coefficient to calculate adhesion strength of each specimen. To verify the simulation result, the adhesion force of each specimen was measured using a nano-scratch test and then compared with the calculated values from the dispersion characteristic simulation. The value of adhesion strength from the dispersion characteristic simulation and the value of adhesion force of the nano-scratch test were found to have a similar tendency according to the process variable of the thin film. The results demonstrated that the adhesion strength of a thin film could be evaluated quantitatively by calculating the dispersion characteristics with the adhesion interlayer stiffness model.

Patterned Interference Radiation Force for Transcranial Neuromodulation.

Compared with the conventional method of transcranial focused ultrasound stimulation using a single transducer or a focused beam, the compression and tensile forces are generated from the high-pressure gradient of a standing wave that can generate increased stimulation. We experimentally verified a neuromodulation system using patterned interference radiation force (PIRF) and propose a method for obtaining the magnitude of the radiation force, which is considered the main factor influencing ultrasound neuromodulation. The radiation forces generated using a single focused transducer and a standing wave created via two focused transducers were compared using simulations. Radiation force was calculated based on the relationship between the acoustic pressure, radiation force and time-averaged second-order pressure obtained using an acoustic streaming simulation. The presence of the radiation force was verified by measuring the time-averaged second-order pressure generated due to the radiation force, by using a glass tube.

Development of a High-Resolution Acoustic Sensor Based on ZnO Film Deposited by the RF Magnetron Sputtering Method.

In the study, an acoustic sensor for a high-resolution acoustic microscope was fabricated using zinc oxide (ZnO) piezoelectric ceramics. The c-cut sapphire was processed into a lens shape to deposit a ZnO film using radio frequency (RF) magnetron sputtering, and an upper and a lower electrode were deposited using E-beam evaporation. The electrode was a Au thin film, and a Ti thin film was used as an adhesion layer. The surface microstructure of the ZnO film was observed using a scanning electron microscope (SEM), the thickness of the film was measured using a focused ion beam (FIB) for piezoelectric ceramics deposited on the sapphire wafer, and the thickness of ZnO was measured to be 4.87 µm. As a result of analyzing the crystal growth plane using X-ray diffraction (XRD) analysis, it was confirmed that the piezoelectric characteristics were grown to the (0002) plane. The sensor fabricated in this study had a center frequency of 352 MHz. The bandwidth indicates the range of upper (375 MHz) and lower (328 MHz) frequencies at the -6 dB level of the center frequency. As a result of image analysis using the resolution chart, the resolution was about 1 µm.