Bioresorbable Multilayer Organic-Inorganic Films for Bioelectronic Systems.

Bioresorbable electronic devices as temporary biomedical implants represent an emerging class of technology relevant to a range of patient conditions currently addressed with technologies that require surgical explantation after a desired period of use. Obtaining reliable performance and favorable degradation behavior demands materials that can serve as biofluid barriers in encapsulating structures that avoid premature degradation of active electronic components. Here, this work presents a materials design that addresses this need, with properties in water impermeability, mechanical flexibility, and processability that are superior to alternatives. The approach uses multilayer assemblies of alternating films of polyanhydride and silicon oxynitride formed by spin-coating and plasma-enhanced chemical vapor deposition , respectively. Experimental and theoretical studies investigate the effects of material composition and multilayer structure on water barrier performance, water distribution, and degradation behavior. Demonstrations with inductor-capacitor circuits, wireless power transfer systems, and wireless optoelectronic devices illustrate the performance of this materials system as a bioresorbable encapsulating structure.

Ultrathin, Transferred Layers of Silicon Oxynitrides as Tunable Biofluid Barriers for Bioresorbable Electronic Systems.

Bio/ecoresorbable electronic systems create unique opportunities in implantable medical devices that serve a need over a finite time period and then disappear naturally to eliminate the need for extraction surgeries. A critical challenge in the development of this type of technology is in materials that can serve as thin, stable barriers to surrounding ground water or biofluids, yet ultimately dissolve completely to benign end products. This paper describes a class of inorganic material (silicon oxynitride, SiON) that can be formed in thin films by plasma-enhanced chemical vapor deposition for this purpose. In vitro studies suggest that SiON and its dissolution products are biocompatible, indicating the potential for its use in implantable devices. A facile process to fabricate flexible, wafer-scale multilayer films bypasses limitations associated with the mechanical fragility of inorganic thin films. Systematic computational, analytical, and experimental studies highlight the essential materials aspects. Demonstrations in wireless light-emitting diodes both in vitro and in vivo illustrate the practical use of these materials strategies. The ability to select degradation rates and water permeability through fine tuning of chemical compositions and thicknesses provides the opportunity to obtain a range of functional lifetimes to meet different application requirements.

Ultrathin, Transferred Layers of Metal Silicide as Faradaic Electrical Interfaces and Biofluid Barriers for Flexible Bioelectronic Implants.

Actively multiplexed, flexible electronic devices represent the most sophisticated forms of technology for high-speed, high-resolution spatiotemporal mapping of electrophysiological activity on the surfaces of the brain, heart, and other organ systems. Materials that simultaneously serve as long-lived, defect-free biofluid barriers and sensitive measurement interfaces are essential for chronically stable, high-performance operation. Recent work demonstrates that conductively coupled electrical interfaces of this type can be achieved based on the use of highly doped monocrystalline silicon electrical " via" structures embedded in insulating nanomembranes of thermally grown silica. A limitation of this approach is that dissolution of the silicon in biofluids limits the system lifetimes to 1-2 years, projected based on accelerated testing. Here, we introduce a construct that extends this time scale by more than a factor of 20 through the replacement of doped silicon with a metal silicide alloy (TiSi2). Systematic investigations and reactive diffusion modeling reveal the details associated with the materials science and biofluid stability of this TiSi2/SiO2 interface. An integration scheme that exploits ultrathin, electronic microcomponents manipulated by the techniques of transfer printing yields high-performance active systems with excellent characteristics. The results form the foundations for flexible, biocompatible electronic implants with chronic stability and Faradaic biointerfaces, suitable for a broad range of applications in biomedical research and human healthcare.