1.
Appl Opt
; 57(14): 3687-3692, 2018 May 10.
Artículo
en Inglés
| MEDLINE
| ID: mdl-29791328
RESUMEN
We report on the coupling of whispering gallery modes in a 500-µm-radius silicon microsphere to a femtosecond-laser-inscribed glass optical waveguide. The shallow glass waveguide with a large mode field diameter in the near-infrared is written at a depth of 25 µm below the glass surface, resulting in a high excitation impact parameter of 525 µm for the microsphere. The excited whispering gallery modes of the silicon microsphere have quality factors of approximately 105 in the 90° elastic scattering and 0° transmission. Integration of such spherical silicon microresonators on femtosecond-laser-inscribed glass waveguides is promising for photonic communication, computation, and sensing applications.