RESUMEN
Catalysts play a key role in the growth of carbon nanotubes. The microwave plasma-assisted chemical vapor deposition (MPACVD) method is now commonly used for directional and conformal growth of carbon nanotubes (CNTs) on substrates. In this work, we report on the effect of H(2) plasma pre-treatment on the diameter and density of iron catalyst nanoparticles for different iron layer thicknesses in order to grow isolated bundles of CNTs. Atomic force microscopy shows first that as plasma power density increases, iron nanoparticle diameters decrease, which is due to the increasing of gas dissociation giving more ion bombardment energy, and second that the diameter of nanoparticles decreases with the catalyst thickness. The growth of CNT was carried out under different CH(4) concentrations for different iron film thicknesses. Transmission electron microscopy and Raman spectroscopy show that the synthesized CNT were of good quality and had an outer diameter between 5 and 10 nm.