1.
Rev Sci Instrum
; 84(1): 015007, 2013 Jan.
Artículo
en Inglés
| MEDLINE
| ID: mdl-23387687
RESUMEN
We present a technique based on ultrafast acoustics which permits us to measure the electrical dependence of the elastic properties of a thin piezoelectric layer. Ultrafast acoustics offers a unique way of measuring elastic properties of thin-layer in a non-destructive way using ultrashort optical pulses. We apply this technique to a thin layer to which a dc voltage is simultaneously applied. Both the film thickness and the sound velocity are affected. The two effects can be separated by use of a semi-transparent top electrode. A demonstration is made on a thin aluminum nitride (AlN). From that the d(33) piezoelectric coefficient and the stiffness variation induced by the bias in AlN are measured.