Your browser doesn't support javascript.
loading
Mostrar: 20 | 50 | 100
Resultados 1 - 20 de 26
Filtrar
1.
Opt Express ; 32(11): 19779-19791, 2024 May 20.
Artículo en Inglés | MEDLINE | ID: mdl-38859104

RESUMEN

Derived from infrared pyroelectric detection, typical terahertz (THz) pyroelectric detectors have low sensitivity at low-frequency THz bands. Based on the high-efficiency absorption of the metamaterial perfect absorber (MPA), a novel split ring hole metamaterial-enhanced pyroelectric detector is proposed to achieve efficient multi-narrowband THz detection. Using high frequency simulation software (HFSS), the dimensional parameters including ring radius, ring width, connection beam width, array period, and thickness, are optimized to enhance efficient multi-narrowband absorption. The as-optimized metamaterial-enhanced detectors are fabricated via micro-nano manufacturing technology. The voltage responsiveness and noise equivalent power of the metamaterial-enhanced detector are tested by THz focused optical path and compared with those of the typical pyroelectric detector and the simulated MPA absorptivity. The results indicate that the metamaterial-enhanced detector has a multi-narrowband detection capability at 0.245 THz, 0.295 THz, and 0.38 THz, which is close to the simulated MPA absorptivity. Compared to the typical pyroelectric detector, the split ring hole metamaterial-enhanced detector can simultaneously achieve thermal absorption, thermal conduction, and pyroelectricity in the same MPA structure, providing faster response speed above 100 Hz chopper frequency and two times higher detection sensitivity at multi-narrowband THz frequencies. This research can be used for THz sensing, absorption filtering, biological macromolecule detection, and other applications.

2.
Nanotechnology ; 34(1)2022 Oct 19.
Artículo en Inglés | MEDLINE | ID: mdl-36191554

RESUMEN

In this study, reduced graphene oxide (rGO) were subject to ultrasonic treatment to acquire varied morphologies, and the enzymatic glucose sensors were constructed by coating the rGO onto indium tin oxide electrodes and physically linking glucose oxidase to the rGO coatings. The effects of the surface morphologies of the rGO coatings on the interfacial characteristics and the electro-catalytic capacity of the enzymatic glucose sensors were systematically investigated. It turns out that, the rGO coating with a rough surface is more hydrophilic, and exhibits uniform glucose oxidase adsorption and higher electron migration rate at the solid/liquid interface between the analytical liquid and the working electrode. As a result, the corresponding glucose sensor shows excellent electro-catalytic capacity towards glucose with a broader linear range of 0-10.0 mM, a higher sensitivity of 38.9µA·mM-1·cm-2, and a lower detection limit of 0.1µM (signal-to-noise ratio of 3). Additionally, the as-prepared glucose sensor exhibits excellent accuracy for detecting actual blood samples as well as superior resistance to interference from other substances (such as L-phenylalanine, urea, ascorbic acid, uric acid, NaCl, and KCl). These results establish the theoretical and experimental foundation for the application of rGO coating in the field of biosensors.


Asunto(s)
Técnicas Biosensibles , Grafito , Glucosa Oxidasa , Ácido Úrico , Cloruro de Sodio , Técnicas Biosensibles/métodos , Electrodos , Glucosa , Ácido Ascórbico , Urea , Fenilalanina , Técnicas Electroquímicas/métodos
3.
Langmuir ; 37(26): 7890-7906, 2021 07 06.
Artículo en Inglés | MEDLINE | ID: mdl-34152754

RESUMEN

Six CuO/ZnO nanorod (CuO/ZnONR)-based microfluidic reactors were constructed for different UV irradiation durations, with which an aqueous methylene blue (MB) solution was photodegraded at varied volume flow rate Q. Via numerical and experimental routes, the effects of the Q on the kinetic adsorption rate constant Ka and the initial rate constant KA of the CuO/ZnONR-based microfluidic reactors were discussed. Moreover, a reverse contacting angle (CA) trend of CuO/ZnONRs to the reaction constant K curve of corresponding CuO/ZnONR-based microfluidic reactor suggested that the CA of CuO/ZnONRs was another key influencing factor that affected greatly the photodegradation performance of the microfluidic reactors. The Q of the aqueous MB solution and the UV irradiation duration for the photodeposition of CuO/ZnONRs were optimized to be 125 µL/min and 1.0 h, the K of the CuO/ZnONR-based microfluidic reactors reached 4.84 min-1, and the related ΔKA/K was less than 6%. Similarly, these methods and results can be employed not only to enhance the mass transport and adsorption of specific species within other nanostructured matrix material-coated microchannels but also to enlarge the actual contacting surface areas between these microchannels and the related solution, which further improve the performance of other nanostructured catalyst-based microfluidic reactors, rGO microfluidic voltage generation, and a GOx/AuNW enzymatic glucose microfluidic sensor.


Asunto(s)
Óxido de Zinc , Bencenosulfonatos , Cobre , Microfluídica , Fotólisis , Humectabilidad
4.
J Nanosci Nanotechnol ; 19(9): 5608-5618, 2019 09 01.
Artículo en Inglés | MEDLINE | ID: mdl-30961715

RESUMEN

ZnO nanorods (ZnONRs) were hydrothermally synthesized on stainless-steel wire (SSW) sieves of various mesh sizes at different Zn2+ concentrations of the growth solution, and then treated with stearic acid (SA) for a specific duration. Using these SSW sieve-supported ZnONRs, a mixture of de-ionized (DI) water and diesel oil was separated. It was found that the SA treatment dramatically diminished the quantity of surface hydroxyl groups attached to the top and upper portions of the ZnONRs, and thus significantly enhanced the hydrophobicity of the ZnONR-coated SSW sieves. The synthesis parameters remarkably affected the surface morphology and wettability of the ZnONRs on the SSWs, which in combination with the mesh size of the SSW sieve, influenced the contact angles (CA) of the ZnONR-coated SSW sieves and the separation efficiency for DI water and diesel oil. In each batch, the ZnONR-coated SSW sieves with mesh sizes of 300, 200, and 100 produced at Zn2+ concentrations of 125, 100, and 25 mM of the growth solution had the most desirable surface morphology, and were the most hydrophobic and oleophilic; further, they gave the optimal separation efficiencies of 93%, 95%, and 90% respectively. Thus, the ZnONR-coated SSW sieve with a mesh size of 200 prepared at Zn2+ concentration of 100 mM of the growth solution can be employed as an effective separator of water and diesel oil.

5.
Sensors (Basel) ; 18(4)2018 Mar 23.
Artículo en Inglés | MEDLINE | ID: mdl-29570680

RESUMEN

An In2O3/ITO thin film thermocouple was prepared via screen printing. Glass additives were added to improve the sintering process and to increase the density of the In2O3/ITO films. The surface and cross-sectional images indicate that both the grain size and densification of the ITO and In2O3 films increased with the increase in annealing time. The thermoelectric voltage of the In2O3/ITO thermocouple was 53.5 mV at 1270 °C at the hot junction. The average Seebeck coefficient of the thermocouple was calculated as 44.5 µV/°C. The drift rate of the In2O3/ITO thermocouple was 5.44 °C/h at a measuring time of 10 h at 1270 °C.

6.
Sensors (Basel) ; 17(10)2017 Sep 27.
Artículo en Inglés | MEDLINE | ID: mdl-28953217

RESUMEN

In this paper, the performance of a zinc oxide (ZnO) nanorod-based enzymatic glucose sensor was enhanced with silver (Ag)-doped ZnO (ZnO-Ag) nanorods. The effect of the doped Ag on the surface morphologies, wettability, and electron transfer capability of the ZnO-Ag nanorods, as well as the catalytic character of glucose oxidase (GOx) and the performance of the glucose sensor was investigated. The results indicate that the doped Ag slightly weakens the surface roughness and hydrophilicity of the ZnO-Ag nanorods, but remarkably increases their electron transfer ability and enhances the catalytic character of GOx. Consequently, the combined effects of the above influencing factors lead to a notable improvement of the performance of the glucose sensor, that is, the sensitivity increases and the detection limit decreases. The optimal amount of the doped Ag is determined to be 2 mM, and the corresponding glucose sensor exhibits a sensitivity of 3.85 µA/(mM·cm²), detection limit of 1.5 µM, linear range of 1.5 × 10-3-6.5 mM, and Michaelis-Menten constant of 3.87 mM. Moreover, the glucose sensor shows excellent selectivity to urea, ascorbic acid, and uric acid, in addition to displaying good storage stability. These results demonstrate that ZnO-Ag nanorods are promising matrix materials for the construction of other enzymatic biosensors.


Asunto(s)
Técnicas Biosensibles/métodos , Técnicas de Química Analítica/métodos , Glucosa/análisis , Nanotubos/química , Plata/química , Óxido de Zinc/química , Técnicas de Química Analítica/instrumentación , Glucosa Oxidasa/metabolismo
7.
Sensors (Basel) ; 17(4)2017 Apr 14.
Artículo en Inglés | MEDLINE | ID: mdl-28420088

RESUMEN

A thermal stress range analysis of tungsten-rhenium thin film thermocouples based on ceramic substrates is presented to analyze the falling off and breakage problems caused by the mismatch of the thermal stresses in thin film thermocouples (TFTCs) and substrate, and nano-indentation experiments are done to measure and calculate the film stress to compare with the simulation results. Optimal design and fabrication of tungsten-rhenium TFTCs based on ceramic substrates is reported. Static high temperature tests are carried out, which show the optimization design can effectively reduce the damage caused by the thermal stress mismatch.

8.
J Nanosci Nanotechnol ; 15(5): 3796-801, 2015 May.
Artículo en Inglés | MEDLINE | ID: mdl-26505007

RESUMEN

The Ag-coated ZnO films were deposited on glass substrates using magnetron sputtering technique. Atomic Force Microscopy was employed to characterize the surface and the profile roughness of Ag-coated ZnO films. X-ray diffraction and X-ray photoelectron were used respectively to analyze the crystalline and chemical state of survey samples. The influence of capping Ag on the photoluminescence intensities of ZnO films has been investigated. The photoluminescence spectra were found to change as the deposited Ag varied with different deposition times and annealing temperatures. Relationships between the fabrication, characterization and performance of Ag-coated ZnO films are established. The results indicate that the diffusion of Ag into ZnO films and the upward bending of the energy band near the interface of ZnO/Ag led to the decrease of ultraviolet intensities of Ag-coated ZnO films. Due to the density of surface states on the bending of energy band, it is crucial to control the surface morphology of metal/ZnO for the enhancement of light emission.


Asunto(s)
Nanopartículas/química , Plata/química , Óxido de Zinc/química , Difusión , Vidrio/química , Calor , Microscopía de Fuerza Atómica , Espectroscopía de Fotoelectrones , Propiedades de Superficie , Difracción de Rayos X
9.
Opt Express ; 22(10): 11436-45, 2014 May 19.
Artículo en Inglés | MEDLINE | ID: mdl-24921265

RESUMEN

A hybrid structure of reduced graphene oxide (rGO) sheets/ZnO nanorods was prepared and its photoluminescence intensity ratio between the UV and defect emission was enhanced up to 14 times. By controlling the reduction degree of rGO on the surface of ZnO nanorods, the UV emission was tuned with the introduction of localized surface plasmons resonance of rGO sheets. The suppression of the defect emission was ascribed to the charge transfer and decreased with the distance between the rGO and ZnO nanorods.

10.
J Nanosci Nanotechnol ; 14(6): 4251-6, 2014 Jun.
Artículo en Inglés | MEDLINE | ID: mdl-24738379

RESUMEN

Effects of the synthesizing parameters on the surface roughness and the contact angles of ZnO nanowire films were studied in this paper. ZnO nanowire films were synthesized with the hydrothermal method on glass substrates, and the synthesizing parameters include the concentrations of the growth solution and the seed layer solution, the growth time span as well as the temperature. Atomic force microscopy and scanning electron microscopy were employed respectively to characterize the surface and the profile roughness of ZnO nanowire films. The measurement results by atomic force microscopy were in agreement with that by scanning electron microscopy, hence the former was used for the investigation of aforementioned effects. Relationships between the synthesizing parameters, the surface roughness and the contact angles of ZnO nanowire films were established, revealing that the synthesizing parameters affected significantly not only the surface roughness but also the contact angles of ZnO nanowire films. The results can be used for batch fabrication of ZnO nanowire-based structures and these structures-based sensors in a wide variety of applications.


Asunto(s)
Cristalización/métodos , Membranas Artificiales , Nanoestructuras/química , Nanoestructuras/ultraestructura , Nanocables/química , Óxido de Zinc/química , Ensayo de Materiales , Conformación Molecular , Tamaño de la Partícula , Propiedades de Superficie
11.
Biosens Bioelectron ; 255: 116090, 2024 Jul 01.
Artículo en Inglés | MEDLINE | ID: mdl-38569250

RESUMEN

Cardiovascular diseases (CVDs), especially chronic heart failure, threaten many patients' lives worldwide. Because of its slow course and complex causes, its clinical screening, diagnosis, and prognosis are essential challenges. Clinical biomarkers and biosensor technologies can rapidly screen and diagnose. Multiple types of biomarkers are employed for screening purposes, precise diagnosis, and treatment follow-up. This article provides an up-to-date overview of the biomarkers associated with the six main heart failure etiology pathways. Plasma natriuretic peptides (BNP and NT-proBNP) and cardiac troponins (cTnT, cTnl) are still analyzed as gold-standard markers for heart failure. Other complementary biomarkers include growth differentiation factor 15 (GDF-15), circulating Galactose Lectin 3 (Gal-3), soluble interleukin (sST2), C-reactive protein (CRP), and tumor necrosis factor-alpha (TNF-α). For these biomarkers, the electrochemical biosensors have exhibited sufficient sensitivity, detection limit, and specificity. This review systematically summarizes the latest molecular biomarkers and sensors for heart failure, which will provide comprehensive and cutting-edge authoritative scientific information for biomedical and electronic-sensing researchers in the field of heart failure, as well as patients. In addition, our proposed future outlook may provide new research ideas for researchers.


Asunto(s)
Técnicas Biosensibles , Insuficiencia Cardíaca , Humanos , Biomarcadores , Pronóstico , Péptido Natriurético Encefálico , Insuficiencia Cardíaca/diagnóstico , Proteína C-Reactiva/metabolismo , Fragmentos de Péptidos
12.
Colloids Surf B Biointerfaces ; 234: 113742, 2024 Feb.
Artículo en Inglés | MEDLINE | ID: mdl-38271855

RESUMEN

Because of the excellent performance in photochemistry, WO3 is increasingly applied in the field of biology and medicine. However, little is known about the mechanism of WO3 cytotoxicity. In this work, WO3 nanosheets with oxygen vacancy are synthesized by solvothermal method, then characterized and added to culture medium of human umbilical vein endothelial cells (HUVECs) with different concentrations. We characterized and analyzed the morphology of nano-WO3 by transmission electron microscopy and calculated the specific data of oxygen vacancy by XPS. It is the first time the effect of WO3-x on cells that WO3-x can cause oxidative stress in HUVEC cells, resulting in DNA damage and thus promoting apoptosis. Transcriptome sequencing is performed on cells treated with low and high concentrations of WO3-x, and a series of key signals affecting cell proliferation and apoptosis are detected in differentially expressed genes, which indicates the research direction of nanotoxicity. The expression levels of key genes are also verified by quantitative PCR after cell treatment with different concentrations of WO3-x. This work fills the gap between the biocompatibility of nano WO3-x materials and molecular cytology and paves the way for investigating the mechanism and risks of oxygen vacancy in cancer therapy.


Asunto(s)
Óxidos , Oxígeno , Humanos , Células Endoteliales de la Vena Umbilical Humana , Óxidos/química , Tungsteno/toxicidad , Tungsteno/química
13.
Biosens Bioelectron ; 258: 116291, 2024 Aug 15.
Artículo en Inglés | MEDLINE | ID: mdl-38735080

RESUMEN

Depression is one of the most common mental disorders and is mainly characterized by low mood or lack of interest and pleasure. It can be accompanied by varying degrees of cognitive and behavioral changes and may lead to suicide risk in severe cases. Due to the subjectivity of diagnostic methods and the complexity of patients' conditions, the diagnosis of major depressive disorder (MDD) has always been a difficult problem in psychiatry. With the discovery of more diagnostic biomarkers associated with MDD in recent years, especially emerging non-coding RNAs (ncRNAs), it is possible to quantify the condition of patients with mental illness based on biomarker levels. Point-of-care biosensors have emerged due to their advantages of convenient sampling, rapid detection, miniaturization, and portability. After summarizing the pathogenesis of MDD, representative biomarkers, including proteins, hormones, and RNAs, are discussed. Furthermore, we analyzed recent advances in biosensors for detecting various types of biomarkers of MDD, highlighting representative electrochemical sensors. Future trends in terms of new biomarkers, new sample processing methods, and new detection modalities are expected to provide a complete reference for psychiatrists and biomedical engineers.


Asunto(s)
Biomarcadores , Técnicas Biosensibles , Trastorno Depresivo Mayor , Técnicas Biosensibles/métodos , Técnicas Biosensibles/instrumentación , Humanos , Biomarcadores/análisis , Trastorno Depresivo Mayor/diagnóstico , Trastorno Depresivo Mayor/genética , Sistemas de Atención de Punto , Técnicas Electroquímicas/métodos
14.
J Nanosci Nanotechnol ; 13(8): 5665-70, 2013 Aug.
Artículo en Inglés | MEDLINE | ID: mdl-23882814

RESUMEN

This paper discusses solid-phase reaction, agglomeration and dendritic growth of Cu/Ti/Si thin films with different sublayer thickness, 70 nm Cu/20 nm Ti/Si and 20 nm Cu/70 nm Ti/Si, annealed using rapid thermal annealing (RTA) method at the temperature from 500 degrees C to 800 degrees C. The crystal structure is examined using XRD, and the surface morphology is measured by SEM and AFM. The sheet resistance is measured using four-point probe method. The dendritic patterns can be obtained in both thin films at high temperature but the density is not similar. For 70 nm Cu/20 nm Ti/Si thin films, Cu agglomerates at the annealed temperature upon to 700 degrees C and thin film is still crystalline after 800 degrees C. For 20 nm Cu/70 nm Ti/Si thin films, Cu agglomerated completely only after 500 degrees C and thin film has amorphous structure annealed after 800 degrees C.

15.
Nanomaterials (Basel) ; 13(4)2023 Feb 05.
Artículo en Inglés | MEDLINE | ID: mdl-36838999

RESUMEN

GaN high-electron-mobility transistor (HEMT) terahertz (THz) detectors have been widely studied and applied in the past few decades. However, there are few reports about the influence of GaN/AlGaN heterostructure material properties on the detection model at present. In this paper, a response voltage model for a GaN HEMT THz detector that considers the carrier scattering in a GaN/AlGaN heterostructure is proposed. The phonon scattering, dislocation scattering, and interface roughness scattering mechanisms are taken into account in the classic THz response voltage model; furthermore, the influence of various material parameters on the response voltage is studied. In a low-temperature region, acoustic scattering plays an important role, and the response voltage drops with an increase in temperature. In a high temperature range, optical phonon scattering is the main scattering mechanism, and the detector operates in a non-resonant detection mode. With an increase in carrier surface density, the response voltage decreases and then increases due to piezoelectric scattering and optical phonon scattering. For dislocation and interface roughness scattering, the response voltage is inversely proportional to the dislocation density and root mean square roughness (RMS) but is positively related to lateral correlation length. Finally, a comparison between our model and the reported models shows that our proposed model is more accurate.

16.
Micromachines (Basel) ; 14(8)2023 Aug 01.
Artículo en Inglés | MEDLINE | ID: mdl-37630086

RESUMEN

Integrated periodic structure reference materials are crucial for calibration in optical instruments and micro-computed tomography (micro-CT), yet they face limitations concerning a restricted measurement range, a single pattern type, and a single calibration parameter. In this study, we address these challenges by developing integrated periodic structure reference materials with an expanded measurement range, diverse pattern types, and multiple calibration parameters through a combination of photolithography and inductively coupled plasma (ICP) etching process. These reference materials facilitate high-efficiency and multi-value calibration, finding applications in the calibration of optical instruments and micro-CT systems. The simulations were conducted using MATLAB (R2022b) to examine the structure-morphology changes during the single-step ICP etching process. The variation rules governing line widths, periods, etching depths, and side wall verticality in integrated periodic structure reference materials were thoroughly evaluated. Linewidths were accurately extracted utilizing an advanced image processing algorithm, while average period values were determined through the precise Fast Fourier Transform method. The experimental results demonstrate that the relative errors of line widths do not exceed 17.5%, and the relative errors of periods do not exceed 1.5%. Furthermore, precise control of the etching depth was achieved, ranging from 30 to 60 µm for grids with line widths 2-20 µm. The side wall verticality exhibited remarkable consistency with an angle of 90° ± 0.8°, and its relative error was found to be less than 0.9%.

17.
Dalton Trans ; 52(36): 12988-12998, 2023 Sep 19.
Artículo en Inglés | MEDLINE | ID: mdl-37650562

RESUMEN

Given the worldwide increase in diabetes, there is an urgent need for glucose sensors that can achieve the on-body detection of glucose concentration. With the development of nanomaterials and flexible electronics, wearable electrochemical enzyme-free glucose biosensors that can conveniently, continuously and stably monitor the glucose concentrations of diabetes patients without invasion and risk of infection are coming into focus. However, despite the enormous efforts toward wearable electrochemical enzyme-free glucose sensors, there have been limited achievements in developing a stretchable and breathable glucose sensor with high sensitivity, low detection limit, and excellent catalytic activity towards glucose oxidation in neutral media, to meet the need for continuous wearable glucose monitoring in scenarios such as the on-body detection of glucose in human sweat. Herein, we demonstrate a novel electrochemical enzyme-free glucose-sensing patch on the foundation of electrospun polyurethane (PU) fibrous mats to address some of the aforementioned challenges. The sensing patch was fabricated through a facile technology of electrospinning, followed by magnetron sputtering of gold (Au) to enable high conductivity. After that, ultrasonic-assisted electrodeposition was utilized to in situ introduce well-dispersed platinum nano pine needles along each fiber. Due to the good stretchability of PU materials, porous structure, and large specific surface area of electrochemical sites, the glucose-sensing patch promises merits such as good stretchability (performs well under 10% strain), high sensitivity (203.13 µA mM-1 cm-1), prominently low detection limit (14.77 µM), excellent selectivity, and efficient vapor permeability. Notably, the advanced hierarchical nanostructures with excellent catalytic activity towards glucose oxidation could be capable of detecting glucose in neutral conditions (pH = 7.4) without the assistance of enzymes. Given the facile fabrication methods and the integrated superior performances, this enzyme-free glucose-sensing patch could play a vital role in wearable glucose sensors.


Asunto(s)
Automonitorización de la Glucosa Sanguínea , Glucemia , Humanos , Platino (Metal) , Electrónica , Glucosa
18.
Micromachines (Basel) ; 14(4)2023 Apr 14.
Artículo en Inglés | MEDLINE | ID: mdl-37421088

RESUMEN

With polymerization duration and Au3+ concentration of the electrolyte regulated, a desirable nitrate-doped polypyrrole ion-selective membrane (PPy(NO3-)-ISM) and Au solid contact layer of anticipate surface morphology were obtained, and the performance of nitrate all-solid ion-selective electrodes (NS ISEs) was improved. It was found that the roughest PPy(NO3-)-ISM remarkably increases the actual contact surface area of the PPy(NO3-)-ISMs with nitrate solution, which leads to better adsorption of NO3- ions upon the PPy(NO3-)-ISMs, and produces a larger number of electrons. The most hydrophobic Au solid contact layer avoids the formation of the aqueous layer at the interface between the PPy(NO3-)-ISM and Au solid contact layer, and ensures unimpeded transporting of the produced electrons. The PPy-Au-NS ISE for polymerization duration 1800 s and at Au3+ concentration 2.5 mM of the electrolyte displays an optimal nitrate potential response, including a Nernstian slope of 54.0 mV/dec, LOD of 1.1 × 10-4 M, rapid average response time less than 1.9 s, and long-term stability of more than 5 weeks. This indicates that the PPy-Au-NS ISE is an effective working electrode for the electrochemical determination of NO3- concentration.

19.
Micromachines (Basel) ; 13(5)2022 May 19.
Artículo en Inglés | MEDLINE | ID: mdl-35630258

RESUMEN

A side ohmic contact mode for the double channel GaN/AlGaN epitaxial layer is proposed in this paper. Rectangle transmission line model (TLM) electrodes are prepared, and the specific contact resistance is tested at the annealing temperatures from 700 °C to 850 °C. The results show that the minimum specific contact resistance is 2.58 × 10-7 Ω·cm2 at the annealing temperature of 750 °C, which is three to four times lower than the surface contact mode. Scanning electron microscope (SEM), energy dispersive spectrometer (EDS), and atomic force microscope (AFM) were carried out for the analysis of the morphology, element composition, and the height fluctuation at the contact edge. With the increase in the annealing temperature, the specific contact resistance decreases due to the alloying of electrodes and the raised number of N vacancies. However, when the annealing temperature exceeds 800 °C, the state of the stress in the electrode films transforms from compressive stress to tensile stress. Besides, the volume expansion of metal electrode film and the increase in the roughness at the contact edge leads to the degradation of the side ohmic contact characteristics.

20.
Micromachines (Basel) ; 13(7)2022 Jun 24.
Artículo en Inglés | MEDLINE | ID: mdl-35888812

RESUMEN

A nano-grating standard with accurate linewidth can not only calibrate the magnification of nano-measurement instruments, but can also enable comparison of linewidths. Unfortunately, it is still a challenging task to control the linewidth of nano-grating standards. Accordingly, in this paper, atomic layer deposition (ALD) was used to regulate the linewidth of the one-dimensional grating standards with a pitch of 1000 nm, fabricated by electron beam lithography (EBL). The standards were measured using an atomic force microscope (AFM) before and after ALD, and the linewidth and pitch of the grating were calculated through the gravity center method. The obtained results prove that the width of a single grating line in the standard can be regulated with great uniformity by precisely utilizing ALD. Meanwhile, the proposed method does not affect the pitch of grating, and the measurement uncertainty of standards is less than 0.16% of the pitch, thereby demonstrating a high surface quality and calibration reliability of the standards, and realizing the integration of linewidth and pitch calibration functions. Moreover, the precise and controllable fabrication method of the micro-nano periodic structure based on ALD technology has many potential applications in the fields of optoelectronic devices and biosensors.

SELECCIÓN DE REFERENCIAS
DETALLE DE LA BÚSQUEDA