Unsupervised machine learning combined with 4D scanning transmission electron microscopy for bimodal nanostructural analysis.

Unsupervised machine learning techniques have been combined with scanning transmission electron microscopy (STEM) to enable comprehensive crystal structure analysis with nanometer spatial resolution. In this study, we investigated large-scale data obtained by four-dimensional (4D) STEM using dimensionality reduction techniques such as non-negative matrix factorization (NMF) and hierarchical clustering with various optimization methods. We developed software scripts incorporating knowledge of electron diffraction and STEM imaging for data preprocessing, NMF, and hierarchical clustering. Hierarchical clustering was performed using cross-correlation instead of conventional Euclidean distances, resulting in rotation-corrected diffractions and shift-corrected maps of major components. An experimental analysis was conducted on a high-pressure-annealed metallic glass, Zr-Cu-Al, revealing an amorphous matrix and crystalline precipitates with an average diameter of approximately 7 nm, which were challenging to detect using conventional STEM techniques. Combining 4D-STEM and optimized unsupervised machine learning enables comprehensive bimodal (i.e., spatial and reciprocal) analyses of material nanostructures.

STEM in situ thermal wave observations for investigating thermal diffusivity in nanoscale materials and devices.

Practical techniques to identify heat routes at the nanoscale are required for the thermal control of microelectronic, thermoelectric, and photonic devices. Nanoscale thermometry using various approaches has been extensively investigated, yet a reliable method has not been finalized. We developed an original technique using thermal waves induced by a pulsed convergent electron beam in a scanning transmission electron microscopy (STEM) mode at room temperature. By quantifying the relative phase delay at each irradiated position, we demonstrate the heat transport within various samples with a spatial resolution of ~10 nm and a temperature resolution of 0.01 K. Phonon-surface scatterings were quantitatively confirmed due to the suppression of thermal diffusivity. The phonon-grain boundary scatterings and ballistic phonon transport near the pulsed convergent electron beam were also visualized.