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1.
Nanotechnology ; 34(39)2023 Jul 14.
Artículo en Inglés | MEDLINE | ID: mdl-37343526

RESUMEN

In this study, resistive random-access memory (ReRAM) devices with ZnO nanoparticles (NPs) are suggested to enhance performance and reduce variation in device switching parameters. The ZnO NPs are formed by annealing ZnO prepared via atomic layer deposition on HfO2, which is verified using transmission electron microscopy, x-ray diffraction pattern, and atomic force microscopy. The depth profile analysis of x-ray photoelectron spectroscopy shows that oxygen diffuses from HfO2to ZnO NPs during annealing. This can be explained by the calculation results using density functional theory (DFT) where the formation energy of oxygen vacancies is reduced at the interface of ZnO NPs and HfO2compared to single HfO2. The fabricated ZnO NPs ReRAM demonstrates reduced forming voltage, stable resistive switching behavior, and improved cycle-to-cycle uniformity in a high-resistance state.


Asunto(s)
Nanopartículas , Óxido de Zinc , Microscopía de Fuerza Atómica , Microscopía Electrónica de Transmisión , Oxígeno
2.
Sensors (Basel) ; 22(10)2022 May 12.
Artículo en Inglés | MEDLINE | ID: mdl-35632088

RESUMEN

Vehicular edge computing (VEC) is one of the prominent ideas to enhance the computation and storage capabilities of vehicular networks (VNs) through task offloading. In VEC, the resource-constrained vehicles offload their computing tasks to the local road-side units (RSUs) for rapid computation. However, due to the high mobility of vehicles and the overloaded problem, VEC experiences a great deal of challenges when determining a location for processing the offloaded task in real time. As a result, this degrades the quality of vehicular performance. Therefore, to deal with these above-mentioned challenges, an efficient dynamic task offloading approach based on a non-cooperative game (NGTO) is proposed in this study. In the NGTO approach, each vehicle can make its own strategy on whether a task is offloaded to a multi-access edge computing (MEC) server or a cloud server to maximize its benefits. Our proposed strategy can dynamically adjust the task-offloading probability to acquire the maximum utility for each vehicle. However, we used a best response offloading strategy algorithm for the task-offloading game in order to achieve a unique and stable equilibrium. Numerous simulation experiments affirm that our proposed scheme fulfills the performance guarantees and can reduce the response time and task-failure rate by almost 47.6% and 54.6%, respectively, when compared with the local RSU computing (LRC) scheme. Moreover, the reduced rates are approximately 32.6% and 39.7%, respectively, when compared with a random offloading scheme, and approximately 26.5% and 28.4%, respectively, when compared with a collaborative offloading scheme.

3.
Sensors (Basel) ; 22(22)2022 Nov 17.
Artículo en Inglés | MEDLINE | ID: mdl-36433504

RESUMEN

In this study, a bottom-gated ZnO thin film transistor (TFT) pressure sensor with nanorods (NRs) is suggested. The NRs are formed on a planar channel of the TFT by hydrothermal synthesis for the mediators of pressure amplification. The fabricated devices show enhanced sensitivity by 16~20 times better than that of the thin film structure because NRs have a small pressure transmission area and causes more strain in the underlayered piezoelectric channel material. When making a sensor with a three-terminal structure, the leakage current in stand-by mode and optimal conductance state for pressure sensor is expected to be controlled by the gate voltage. A scanning electron microscope (SEM) was used to identify the nanorods grown by hydrothermal synthesis. X-ray diffraction (XRD) was used to compare ZnO crystallinity according to device structure and process conditions. To investigate the effect of NRs, channel mobility is also extracted experimentally and the lateral flow of current density is analyzed with simulation (COMSOL) showing that when the piezopotential due to polarization is formed vertically in the channel, the effective mobility is degraded.

4.
Sensors (Basel) ; 21(24)2021 Dec 09.
Artículo en Inglés | MEDLINE | ID: mdl-34960325

RESUMEN

Large-scale IoT applications with dozens of thousands of geo-distributed IoT devices creating enormous volumes of data pose a big challenge for designing communication systems that provide data delivery with low latency and high scalability. In this paper, we investigate a hierarchical Edge-Cloud publish/subscribe brokers model using an efficient two-tier routing scheme to alleviate these issues when transmitting event notifications in wide-scale IoT systems. In this model, IoT devices take advantage of proximate edge brokers strategically deployed in edge networks for data delivery services in order to reduce latency. To deliver data more efficiently, we propose a proactive mechanism that applies collaborative filtering techniques to efficiently cluster edge brokers with geographic proximity that publish and/or subscribe to similar topics. This allows brokers in the same cluster to exchange data directly with each other to further reduce data delivery latency. In addition, we devise a coordinative scheme to help brokers discover and bridge similar topic channels in the whole system, informing other brokers for data delivery in an efficient manner. Extensive simulation results prove that our model can adeptly support event notifications in terms of low latency, small amounts of relay traffic, and high scalability for large-scale, delay-sensitive IoT applications. Specifically, in comparison with other similar Edge-Cloud approaches, our proposal achieves the best in terms of relay traffic among brokers, about 7.77% on average. In addition, our model's average delivery latency is approximately 66% of PubSubCoord-alike's one.

5.
BMC Vet Res ; 16(1): 3, 2020 Jan 03.
Artículo en Inglés | MEDLINE | ID: mdl-31900158

RESUMEN

BACKGROUND: Pheochromocytoma (PCC) has poor prognosis and adrenalectomy is hard to be performed, in case of caudal vena cava invasion. The long-term administration of phenoxybenzamine in PCC has not been reported in dogs. CASE PRESENTATION: A 14-year-old castrated male Poodle dog presented with an abdominal mass. On physical examination, hypertension, increased lens opacity, calcinosis cutis, generalized alopecia, and systolic murmur were observed. Serum chemistry and urinalysis profiles revealed hyperglycemia, hypercholesterolemia, elevated liver enzymes, and glucosuria. Abdominal ultrasonography showed a right adrenal mass with invasion of the caudal vena cava, which was cytologically diagnosed as suspected PCC. An adrenal mass (width × height × length, 28 × 26 × 48 mm3) was found on computed tomography and diagnosed as PCC with increased plasma metanephrines and normetanephrines. An adrenocorticotropin hormone stimulation test showed elevated adrenal hormones (androstenedione, estradiol, progesterone, and 17-OH progesterone) with normal cortisol, compatible with atypical Cushing's syndrome. The dog was managed with trilostane, phenoxybenzamine, and insulin therapy. Glycosylated hemoglobin and fructosamine levels gradually decreased, and hypertension resolved. In the 10-month follow-up period, the liver enzymes levels gradually decreased, and the clinical signs of the dog were well-controlled without deterioration. CONCLUSIONS: This case report describes long-term medical management without adrenalectomy of PCC complicated with atypical Cushing's syndrome and DM.


Asunto(s)
Neoplasias de las Glándulas Suprarrenales/veterinaria , Enfermedades de los Perros/diagnóstico , Feocromocitoma/veterinaria , Neoplasias de las Glándulas Suprarrenales/diagnóstico , Antagonistas Adrenérgicos alfa/uso terapéutico , Animales , Antineoplásicos/uso terapéutico , Síndrome de Cushing , Diabetes Mellitus/tratamiento farmacológico , Dihidrotestosterona/análogos & derivados , Dihidrotestosterona/uso terapéutico , Enfermedades de los Perros/tratamiento farmacológico , Perros , Hipoglucemiantes/uso terapéutico , Insulina/uso terapéutico , Masculino , Fenoxibenzamina/uso terapéutico , Feocromocitoma/diagnóstico , Feocromocitoma/tratamiento farmacológico , Resultado del Tratamiento
6.
J Nanosci Nanotechnol ; 19(10): 6083-6086, 2019 Oct 01.
Artículo en Inglés | MEDLINE | ID: mdl-31026912

RESUMEN

In this paper, the dependency of low frequency noise as a function of the gate voltage was examined for tunneling field effect transistors (TFETs). When the level of gate voltage is low, the tunneling width of the TFETs is large. Thus, electrons move via the trap instead of tunneling directly. On the other hand, when the level of gate voltage is high, the tunneling width of the TFETs becomes narrow. Thus, when the gate voltage is low, the noise level of TFETs is high because electrons pass through the trap. However, when the gate voltage is high, electrons pass directly from valence band of source to conduction band of drain, so the noise level is low. Finding the voltage suitable for this TFET is important to determine the optimum conditions for generating BTBT when measuring TFETs and to reduce noise.

7.
J Nanosci Nanotechnol ; 19(10): 6131-6134, 2019 Oct 01.
Artículo en Inglés | MEDLINE | ID: mdl-31026922

RESUMEN

The positive bias temperature instability (PBTI) characteristics of fully depleted silicon on insulator (FD-SOI) tunneling field effect transistor (TFET) are investigated in comparison with those of metal oxide semiconductor field effect transistor (MOSFET) fabricated with the same technology process. Unlike some of the previously reported studies, in which the PBTI lifetime of TFET is much longer than that of MOSFET, in this study, the PBTI lifetime of TFET is found to be shorter than that of MOSFET. This result is very interesting, because degradation of electrical parameters of TFET is mainly affected by local traps near the source junction rather than global traps in the channel region. Large degradation of the electrical parameters of TFET due to PBTI stress would result from large fluctuation of the vertical electric field caused by traps near the source junction. This electric field fluctuation near the local region in TFET has more impact on electrical parameter degradation than channel conductivity fluctuation in MOSFET. Therefore, to improve the reliability characteristics of TFET, evaluation of PBTI characteristics and improvement of the quality of gate oxide near the source junction are essential.

8.
J Korean Med Sci ; 34(42): e287, 2019 Nov 04.
Artículo en Inglés | MEDLINE | ID: mdl-31674161

RESUMEN

BACKGROUND: We evaluated the effects of neurofeedback as an augmentation treatment on depressive symptoms and functional recovery in patients with treatment-resistant depression (TRD). METHODS: We included 24 adult patients with TRD and 12 healthy adults. 24 TRD patients were assigned to the neurofeedback augmentation group (n = 12) and the medication-only (treatment as usual [TAU]) group (n = 12). The neurofeedback augmentation group underwent combined therapy comprising medication and 12-24 sessions of neurofeedback training for 12 weeks. To assess the serum levels of brain-derived neurotrophic factor (BDNF) in both groups, pre- and post-treatment blood samples were obtained. Patients were evaluated using the Hamilton Depression Rating Scale (HAM-D), Beck Depression Inventory (BDI), Clinical Global Impression-Severity (CGI-S), 5-level version of European Quality of Life Questionnaire 5-Dimensional Classification (EQ-5D-5L), and Sheehan Disability Scale (SDS) at baseline, and at the 1-, 4-, and 12-week. RESULTS: From baseline to week 12, neurofeedback training reduced mean scores on HAM-D, BDI-II, CGI-S, and SDS, and increased mean EQ-5D-5L tariff score. In the neurofeedback augmentation group, the response and remission rates were 58.3% and 50.0%, respectively, at week 12. Changes in HAM-D, EQ-5D-5L tariff score, and SDS were significantly larger in the neurofeedback group than in the medication-only (TAU) group. No significant difference in BDNF level was found pre- vs. post-treatment in any of the groups. CONCLUSION: Despite the small sample size, these results suggest that neurofeedback treatment may be effective as an augmentation treatment, not only for depressive symptoms, but also for functional recovery, in patients with TRD. TRIAL REGISTRATION: Clinical Research Information Service Identifier: KCT0004183 ClinicalTrials.gov Identifier: NCT04078438.


Asunto(s)
Trastorno Depresivo Resistente al Tratamiento/terapia , Neurorretroalimentación/métodos , Adulto , Anciano , Antidepresivos/uso terapéutico , Factor Neurotrófico Derivado del Encéfalo/metabolismo , Femenino , Estudios de Seguimiento , Humanos , Masculino , Persona de Mediana Edad , Proyectos Piloto , Estudios Prospectivos , Escalas de Valoración Psiquiátrica , Calidad de Vida , Proyectos de Investigación , Resultado del Tratamiento , Juegos de Video
9.
BMC Vet Res ; 14(1): 382, 2018 Dec 04.
Artículo en Inglés | MEDLINE | ID: mdl-30514314

RESUMEN

BACKGROUND: There is no specific therapy for cutaneous epitheliotropic T-cell lymphoma (CETL). The administration of retinoids in conjunction with interferon-α (IFN-α) in CETL has not been reported in dogs. CASE PRESENTATION: Two dogs (Shih tzu and Miniature pinscher) presented with multiple nodular skin lesions. Histopathological examination revealed diffuse infiltrations of lymphocytes in the epidermis and dermis, with a CD3-positive immunophenotypic profile. Based on the clinical and histopathological examination, CETL was diagnosed. Both dogs were treated with isotretinoin in combination with IFN-α and showed clinical improvement with complete or partial remission. The disease in these dogs was well-controlled for more than 264 days of overall median survival time without any additional clinical signs after initiation of the treatment. In both the cases, the dogs were followed up for 27 months, and 10 months without any evidence of recurrence or metastasis, respectively. CONCLUSIONS: We describe the clinical efficacy of isotretinoin combined with IFN-α in 2 dogs with CETL. Long-term management with isotretinoin combined with IFN-α was effective in treating CETL in these cases.


Asunto(s)
Enfermedades de los Perros/tratamiento farmacológico , Interferón-alfa/uso terapéutico , Isotretinoína/uso terapéutico , Linfoma Cutáneo de Células T/veterinaria , Animales , Antineoplásicos/uso terapéutico , Enfermedades de los Perros/patología , Perros , Femenino , Linfoma Cutáneo de Células T/tratamiento farmacológico , Linfoma Cutáneo de Células T/patología , Masculino , Resultado del Tratamiento
10.
Sensors (Basel) ; 14(5): 7857-80, 2014 Apr 30.
Artículo en Inglés | MEDLINE | ID: mdl-24784035

RESUMEN

Information technology (IT) is pushing ahead with drastic reforms of modern life for improvement of human welfare. Objects constitute "Information Networks" through smart, self-regulated information gathering that also recognizes and controls current information states in Wireless Sensor Networks (WSNs). Information observed from sensor networks in real-time is used to increase quality of life (QoL) in various industries and daily life. One of the key challenges of the WSNs is how to achieve lossless data transmission. Although nowadays sensor nodes have enhanced capacities, it is hard to assure lossless and reliable end-to-end data transmission in WSNs due to the unstable wireless links and low hard ware resources to satisfy high quality of service (QoS) requirements. We propose a node and path traffic prediction model to predict and minimize the congestion. This solution includes prediction of packet generation due to network congestion from both periodic and event data generation. Simulation using NS-2 and Matlab is used to demonstrate the effectiveness of the proposed solution.


Asunto(s)
Algoritmos , Redes de Comunicación de Computadores/instrumentación , Diseño Asistido por Computadora , Almacenamiento y Recuperación de la Información/métodos , Procesamiento de Señales Asistido por Computador/instrumentación , Tecnología Inalámbrica/instrumentación , Redes de Comunicación de Computadores/normas , Diseño de Equipo , Análisis de Falla de Equipo , Almacenamiento y Recuperación de la Información/normas , Mejoramiento de la Calidad , Tecnología Inalámbrica/normas
11.
J Nanosci Nanotechnol ; 13(5): 3313-6, 2013 May.
Artículo en Inglés | MEDLINE | ID: mdl-23858850

RESUMEN

We fabricated pentacene-based organic thin film transistors (OTFTs) with formulated poly[4-vinylphenol] (PVP) gate dielectrics. The solution of gate dielectrics is prepared by adding methylated poly[melamine-co-formaldehyde] (MMF) and photo-initiator (PI) [1-phenyl-2-hydroxy-2-methylpropane-1-one, Darocur1173@Ciba] to PVP By using a small amount (2.4 wt%) of PI, the cross-linking temperature is lowered to 90 degrees C, which is lower than general thermal curing reaction temperature for the cross-linked PVP (> 180 degrees C). The hysteresis and the leakage current of the OTFTs are also decreased by adding the MMF and PI in the PVP gate dielectric.


Asunto(s)
Membranas Artificiales , Nanopartículas/química , Compuestos Orgánicos/química , Polivinilos/química , Transistores Electrónicos , Diseño de Equipo , Análisis de Falla de Equipo , Ensayo de Materiales
12.
Front Vet Sci ; 10: 1267222, 2023.
Artículo en Inglés | MEDLINE | ID: mdl-37929281

RESUMEN

A 6 year-old spayed female Poodle presented with a mandibular mass. Radiographic examination revealed osteolysis from the right mandibular canine to the fourth premolar, along with horizontal bone loss and dorsal displacement of the right mandibular first and second premolars. Skull cone beam computed tomography revealed osteolysis at the level of the right mandibular canine and fourth premolar. A destructive bone lesion was observed in the apical area of the right mandibular canine, with mass invasion of the interradicular bone of the right mandibular first molar near the mandibular canal. Consequently, unilateral total mandibulectomy and skin flap surgery were performed. Histopathological examination revealed poorly demarcated and infiltrative neoplastic epithelial cells that formed small islands and trabeculae. Neoplastic cells exhibited the malignant features of cytological atypia and high mitotic activity. Furthermore, the neoplastic epithelial cells frequently showed ghost cell changes and were diagnosed as ghost cell odontogenic carcinoma (GCOC). The dog was followed up for 1 year, during which no severe complications or local recurrence was observed, except for slight mandibular drift, tongue protrusion, and drooling. This case report describes the clinical features, diagnostic imaging, and histologic features of an unreported GCOC in a dog and the favorable outcome following surgical resection.

13.
Front Vet Sci ; 10: 1153903, 2023.
Artículo en Inglés | MEDLINE | ID: mdl-37143500

RESUMEN

Introduction: Allodynia, which can be induced by paclitaxel administration, is the presence of pain as a result of a stimulus that does not usually provoke pain. Many studies have investigated the analgesic efficacy of acupuncture, including laser acupuncture (LA) and electroacupuncture (EA). Although pain-related diseases are relatively common, few studies have analyzed the analgesic effects and mechanisms of LA combined with EA. The purpose of this study was to investigate the therapeutic effect and mechanism of manual acupuncture (MA), EA, LA, and combined therapy (LA + EA) in a paclitaxel-induced allodynia rat model. Methods: A total of 56 rats were classified into eight groups: a normal (Nor, n = 7), a control (Con, n = 7), an MA (n = 7), an EA (n = 7), a 650-nm LA (650LA, n = 7), an 830-nm LA (830LA, n = 7), a 650-nm LA combined with EA (650LA + EA, n = 7), and an 830-nm LA combined with EA group (830LA + EA, n = 7). Allodynia was induced by intraperitoneal injection of 2 mg/kg of paclitaxel every other day for a total of four times except the Nor group. Acupuncture treatments were conducted at the points of Jungwan (CV12) and Joksamni (ST36) once every other day for 6 min, for a total of nine times. Withdrawal response reaction times and force intensity of the foot were measured before the start of the experiment, after the 4th paclitaxel administration (day 8), and after the 9th and last treatment (day 15). On the 16th day, mRNA and protein expression in the spinal nerves was assessed, and a metabolome analysis of the animals' feces was performed. Results and discussion: Our analyses show that 650LA + EA treatment resulted in an upregulation of protein expression related to pain relief and nerve regeneration, whereas 830LA + EA treatment led to significant changes in metabolomes. This study demonstrates that a combination treatment of EA and LA can suppress allodynia and promote upregulation of protein expression related to nerve regeneration and is effective in changing the intestinal microbiome. Further large-scale research is required to assess the exact mechanism underlying the therapeutic effect of this combination treatment in pain-related diseases.

14.
J Nanosci Nanotechnol ; 12(7): 5347-50, 2012 Jul.
Artículo en Inglés | MEDLINE | ID: mdl-22966569

RESUMEN

The leakage current mechanism of Palladium (Pd) germanide Schottky contact on n-type Ge-on-Si substrate is analyzed in depth. The electric field dependent analysis shows that the dominant leakage current mechanism is the Poole-Frenkel emission due to the existence of deep level traps in the depletion region of the Pd germanide/n-type Ge Schottky diode. The analysis of the dependence of leakage current on temperature also shows that the Poole-Frenkel emission and generation current are the dominant components below 100 degrees C and that the Schottky emission related to thermionic emission of majority carriers over a potential barrier is the main cause of this dominance at high temperature region.

15.
J Nanosci Nanotechnol ; 12(7): 5325-9, 2012 Jul.
Artículo en Inglés | MEDLINE | ID: mdl-22966565

RESUMEN

We used micro contact printing (micro-CP) to fabricate inverted coplanar pentacene thin film transistors (TFTs) with 1-microm channels. The patterning of micro-scale source/drain electrodes without etch process was successfully achieved using Polydimethylsiloxane (PDMS) elastomer stamp. We used the Ag nano particle ink as an electrode material, and the sheet resistance and surface roughness of the Ag electrodes were effectively reduced with the 2-step thermal annealing on a hotplate, which improved the mobility, the on-off ratio, and the subthreshold slope (SS) of the pentacene TFTs. In addition, the device annealing on a hotplate in a N2 atmosphere for 30 sec can enhance the off-current and the mobility properties of OTFTs without damaging the pentacene thin films and increase the adhesion between pentacene and dielectric layer (SiO2), which was investigated with the pentacene films phase change of the XRD spectrum after device annealing.

16.
Sensors (Basel) ; 12(2): 2175-207, 2012.
Artículo en Inglés | MEDLINE | ID: mdl-22438759

RESUMEN

Wireless Sensor Networks (WSNs) are gaining tremendous importance thanks to their broad range of commercial applications such as in smart home automation, health-care and industrial automation. In these applications multi-vendor and heterogeneous sensor nodes are deployed. Due to strict administrative control over the specific WSN domains, communication barriers, conflicting goals and the economic interests of different WSN sensor node vendors, it is difficult to introduce a large scale federated WSN. By allowing heterogeneous sensor nodes in WSNs to coexist on a shared physical sensor substrate, virtualization in sensor network may provide flexibility, cost effective solutions, promote diversity, ensure security and increase manageability. This paper surveys the novel approach of using the large scale federated WSN resources in a sensor virtualization environment. Our focus in this paper is to introduce a few design goals, the challenges and opportunities of research in the field of sensor network virtualization as well as to illustrate a current status of research in this field. This paper also presents a wide array of state-of-the art projects related to sensor network virtualization.


Asunto(s)
Redes de Comunicación de Computadores/instrumentación , Modelos Teóricos , Tecnología de Sensores Remotos/instrumentación , Telemetría/instrumentación , Transductores , Interfaz Usuario-Computador , Simulación por Computador , Diseño de Equipo , Análisis de Falla de Equipo
17.
Front Vet Sci ; 9: 848405, 2022.
Artículo en Inglés | MEDLINE | ID: mdl-35782535

RESUMEN

A 6-year-old castrated male Chihuahua dog was presented with hindlimb paresis and ataxia. The dog had hyponatremia and was diagnosed as hypoadrenocorticism 10 days before its visit, and the neurologic signs including generalized tonic seizures and hindlimb paresis occurred 3 days after correction of hyponatremia at a referral hospital. Based on history and clinical findings, osmotic demyelination syndrome (ODS) secondary to rapid correction of hyponatremia was highly suspected. After administration of anti-convulsant and supplements, seizures did not occur, and gait was normalized within 2 weeks. Phenobarbital was tapered and finally discontinued after 3 months, and seizure did not recur. The neurologic signs were completely resolved and the dog continued to be free of neurologic or additional clinical signs over the 19-month follow-up period. ODS should be included among the differential diagnoses in case of any acute neurological dysfunction that occurs with episodes of rapid correction of hyponatremia. To the author's knowledge, this is the rare case report of a dog with hypoadrenocorticism and presumed ODS after rapid correction of hyponatremia leading to neurologic signs including seizures and ataxia.

18.
Micromachines (Basel) ; 13(11)2022 Nov 14.
Artículo en Inglés | MEDLINE | ID: mdl-36422400

RESUMEN

In this study, the resolution and depth of focus (DOF) of the ArF immersion scanner are measured experimentally according to numerical aperture (NA). Based on the experiment, the theoretical trade-off relationship between the resolution and depth of focus can be confirmed and k1 and k2 are extracted to be about 0.288 and 0.745, respectively. Another observation for a problem in small critical dimension realization is the increase in line width roughness (LWR) according to mask open area ratio. To mitigate the trade-off problem and critical dimension variation, the photoresist thickness effect on depth of focus is analyzed. Generally, the photoresist thickness is chosen considering depth of focus, which is decided by NA. In practice, the depth of focus is found to be influenced by the photoresist thickness, which can be caused by the intensity change of the reflected ArF light. This means that photoresist thickness can be optimized under a fixed NA in ArF immersion photolithography technology according to the critical dimension and pattern density of the target layer.

19.
Nanomaterials (Basel) ; 12(23)2022 Dec 06.
Artículo en Inglés | MEDLINE | ID: mdl-36500965

RESUMEN

In this study, a silicon carbon nitride (SiCN) thin film was grown with a thickness of 5~70 nm by the plasma-enhanced chemical vapor deposition (PECVD) method, and the oxygen permeation characteristics were analyzed according to the partial pressure ratio (PPR) of tetramethylsilane (4MS) to the total gas amount during the film deposition. X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FT-IR), and X-ray reflectivity (XRR) were used to investigate the composition and bonding structures of the SiCN film. An atomic force microscope (AFM) was used to examine the surface morphology of the SiCN films to see the porosity. The analysis indicated that Si-N bonds were dominant in the SiCN films, and a higher carbon concentration made the film more porous. To evaluate the oxygen permeation, a highly accelerated temperature and humidity stress test (HAST) evaluation was performed. The films grown at a high 4MS PPR were more susceptible to oxygen penetration, which changed Si-N bonds to Si-N-O bonds during the HAST. These results indicate that increasing the 4MS PPR made the SiCN film more porous and containable for oxygen. As an application, for the first time, SiCN dielectric film is suggested to be applied to resistive random access memory (RRAM) as an oxygen reservoir to store oxygen and prevent a reaction between metal electrodes and oxygen. The endurance characteristics of RRAM are found to be enhanced by applying the SiCN.

20.
Nanomaterials (Basel) ; 12(3)2022 Jan 29.
Artículo en Inglés | MEDLINE | ID: mdl-35159824

RESUMEN

The large area wire grid polarizers (LA-WGPs) with 50 nm half-pitch were fabricated using ArF immersion lithography overcoming the limit of the shot field size. To realize the 50 nm line and space patterns on a 300 mm wafer, a zero-distance stitching process that connects the shot fields is suggested. To compensate for mutual interference between the shot fields which is called the local flare effect (LFE), the shot field arrangement is changed with optical proximity correction (OPC). Using a master wafer produced by the suggested method, 300 mm large-area WGPs were fabricated by the nano-imprint process. The WGPs have more than 80% transmittance in the visible light region, and the possibility of performance improvement can be confirmed depending on the number and method of the etch process.

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