[Experimental investigation of laser plasma soft X-ray source with gas target].
Guang Pu Xue Yu Guang Pu Fen Xi
; 23(1): 101-3, 2003 Feb.
Article
en Zh
| MEDLINE
| ID: mdl-12939982
ABSTRACT
This paper describes a debris-free laser plasma soft X-ray source with a gas target, which has high operating frequency and can produce strong soft X-ray radiation. The valve of this light source is drived by a piezoelectrical ceramic whose operating frequency is up to 400 Hz. In comparison with laser plasma soft X-ray sources using metal target, the light source is debris-free. And it has higher operating frequency than gas target soft X-ray sources whose nozzle is controlled by a solenoid valve. A channel electron multiplier (CEM) operating in analog mode is used to detect the soft X-ray generated by the laser plasma source, and the CEM's output is fed to to a charge-sensitive preamplifier for further amplification purpose. Output charges from the CEM are proportional to the amplitude of the preamplifier's output voltage. Spectra of CO2, Xe and Kr at 8-14 nm wavelength which can be used for soft X-ray projection lithography are measured. The spectrum for CO2 consists of separate spectral lines originate mainly from the transitions in Li-like and Be-like ions. The Xe spectrum originating mainly from 4d-5f, 4d-4f, 4d-6p and 4d-5p transitions in multiply charged xenon ions. The spectrum for Kr consists of separate spectral lines and continuous broad spectra originating mainly from the transitions in Cu-, Ni-, Co- and Fe-like ions.
Buscar en Google
Colección:
01-internacional
Banco de datos:
MEDLINE
Idioma:
Zh
Revista:
Guang Pu Xue Yu Guang Pu Fen Xi
Año:
2003
Tipo del documento:
Article
País de afiliación:
China