Room temperature fabrication of ZnO/ST-cut quartz SAW UV photodetector with small temperature coefficient.
Opt Express
; 23(3): 2187-95, 2015 Feb 09.
Article
en En
| MEDLINE
| ID: mdl-25836089
ABSTRACT
Room-temperature fabricated ZnO/ST-cut quartz is adopted for SAW ultraviolet (UV) photodetector. The ST-cut quartz substrate and ZnO layer are used for SAW excitation and photodetection, respectively. High resolution x-ray diffraction (XRD) and photoluminescence (PL) measurement indicate that high quality ZnO films can be deposited on ST-cut quartz using radio frequency (RF) sputtering. As the SAW devices under UV illumination (6 mW/cm(2)), a downshift in frequency of about 35 KHz can be observed. The observed small temperature coefficient of frequency (TCF) indicates that SAW devices exhibit good temperature stability. The results present feasibility of using ZnO/ST-cut quartz SAW photodetectors in ultraviolet region.
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Colección:
01-internacional
Banco de datos:
MEDLINE
Idioma:
En
Revista:
Opt Express
Asunto de la revista:
OFTALMOLOGIA
Año:
2015
Tipo del documento:
Article