Comparison of AlN vs. SIO<sub>2</sub>/LiNbO<sub>3</sub> Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects.

Yu Shevchenko, Sergey; A Mikhailenko, Denis; Markelov, Oleg A

Comparison of AlN vs. SIO₂/LiNbO₃ Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects.

Yu Shevchenko, Sergey; A Mikhailenko, Denis; Markelov, Oleg A.

Afiliación

Yu Shevchenko S; Department of Laser Measuring and Navigation Systems, Saint Petersburg Electrotechnical University, 5 Prof. Popov str., 197376 Saint Petersburg, Russia.
A Mikhailenko D; Department of Laser Measuring and Navigation Systems, Saint Petersburg Electrotechnical University, 5 Prof. Popov str., 197376 Saint Petersburg, Russia.
Markelov OA; Department of Laser Measuring and Navigation Systems, Saint Petersburg Electrotechnical University, 5 Prof. Popov str., 197376 Saint Petersburg, Russia.

Sensors (Basel) ; 20(2)2020 Jan 14.

Article en En | MEDLINE | ID: mdl-31947572

Palabras clave

SAW-resonator; SAW-sensor; acceleration measurements; ring-shaped design; stress strained state

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Año: 2020 Tipo del documento: Article País de afiliación: Rusia

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