Large-scale range diffraction grating displacement sensor based on polarization phase-shifting.

ABSTRACT

A method is proposed and demonstrated to improve a diffraction grating displacement sensor to simultaneously achieve nanometer-level resolution and an extended range of operation. The method exploits the polarization phase-shifting optical path to extract two sinusoidal signals with a quadrature phase shift. The interpolation circuit is applied to nonlinearly convert two sinusoidal signals into a standard incremental AB quadrature digital signal, implementing an extended operation range with the magnitude of a laser coherence length. This work enables displacement measurement operated at large-scale range, and provides a significant guide for the design of a high performance micro-displacement sensor.