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Polymer link breakage of polyimide-film-surface using hydrolysis reaction accelerator for enhancing chemical-mechanical-planarization polishing-rate.
Jeong, Gi-Ppeum; Park, Jun-Seong; Lee, Seung-Jae; Kim, Pil-Su; Han, Man-Hyup; Hong, Seong-Wan; Kim, Eun-Seong; Park, Jin-Hyung; Choo, Byoung-Kwon; Kang, Seung-Bae; Park, Jea-Gun.
Afiliación
  • Jeong GP; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Park JS; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Lee SJ; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Kim PS; Department of Electronics and Communications Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Han MH; Department of Electronics and Communications Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Hong SW; Department of Electronics and Communications Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Kim ES; Department of Electronics and Communications Engineering, Hanyang University, Seoul, 04763, Republic of Korea.
  • Park JH; UB Materials Inc., Gyeonggi-do, 17162, Republic of Korea.
  • Choo BK; Department of Process Research Team, Display Research Center, Samsung Display Co., Ltd., Gyeonggi-do, 17113, Republic of Korea.
  • Kang SB; Department of Process Research Team, Display Research Center, Samsung Display Co., Ltd., Gyeonggi-do, 17113, Republic of Korea.
  • Park JG; Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 04763, Republic of Korea. parkjgL@hanyang.ac.kr.
Sci Rep ; 12(1): 3366, 2022 Mar 01.
Article en En | MEDLINE | ID: mdl-35233019
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2022 Tipo del documento: Article
Texto completo
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XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2022 Tipo del documento: Article