Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities.

de Clerck, Albrey; Kang, Yuhong; Sibold, Ridge; Mouring, Scott; Ruan, Hang; Ng, Wing

de Clerck, Albrey; Kang, Yuhong; Sibold, Ridge; Mouring, Scott; Ruan, Hang; Ng, Wing.

Afiliación

de Clerck A; Department of Mechanical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA.
Kang Y; NanoSonic, Inc., Pembroke, VA 24136, USA.
Sibold R; NanoSonic, Inc., Pembroke, VA 24136, USA.
Mouring S; Department of Mechanical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA.
Ruan H; NanoSonic, Inc., Pembroke, VA 24136, USA.
Ng W; Department of Mechanical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA.

Sensors (Basel) ; 22(10)2022 May 18.

Article en En | MEDLINE | ID: mdl-35632237

Palabras clave

MEMS; intelligent; pressure sensor; self-calibrating

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Sensors (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Estados Unidos

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