Atomic Precision Processing of Two-Dimensional Materials for Next-Generation Microelectronics.

The growth of the information era economy is driving the pursuit of advanced materials for microelectronics, spurred by exploration into "Beyond CMOS" and "More than Moore" paradigms. Atomically thin 2D materials, such as transition metal dichalcogenides (TMDCs), show great potential for next-generation microelectronics due to their properties and defect engineering capabilities. This perspective delves into atomic precision processing (APP) techniques like atomic layer deposition (ALD), epitaxy, atomic layer etching (ALE), and atomic precision advanced manufacturing (APAM) for the fabrication and modification of 2D materials, essential for future semiconductor devices. Additive APP methods like ALD and epitaxy provide precise control over composition, crystallinity, and thickness at the atomic scale, facilitating high-performance device integration. Subtractive APP techniques, such as ALE, focus on atomic-scale etching control for 2D material functionality and manufacturing. In APAM, modification techniques aim at atomic-scale defect control, offering tailored device functions and improved performance. Achieving optimal performance and energy efficiency in 2D material-based microelectronics requires a comprehensive approach encompassing fundamental understanding, process modeling, and high-throughput metrology. The outlook for APP in 2D materials is promising, with ongoing developments poised to impact manufacturing and fundamental materials science. Integration with advanced metrology and codesign frameworks will accelerate the realization of next-generation microelectronics enabled by 2D materials.

The Pivotal Radical Intermediate [Au21(SR)15]+ in the Ligand-Exchange-Induced Size-Reduction of [Au23(SR)16]- to Au16(SR)12.

The atomic precision of sub-nanometer-sized metal nanoclusters makes it possible to elucidate the kinetics of metal nanomaterials from the molecular level. Herein, the size reduction of an atomically precise [Au23(CHT)16]- (HCHT = cyclohexanethiol) cluster upon ligand exchange with HSAdm (1-adamantanethiol) has been reported. During the 16 h conversion of [Au23(CHT)16]- to Au16(SR)12, the neutral 6e Au21(SR)15, and its 1e-reduction state, i.e. the 5e, cationic radical, [Au21(SR)15]+, are active intermediates to account for the formation of thermodynamically stable Au16 products. The combination of spectroscopic monitoring (with UV-vis and ESI-MS) and DFT calculations indicates the preferential size-reduction on the corner Au atoms on the core surface and the terminal Au atoms on longer AunSn+1 staples. This study provides a reassessment on the electronic state of the Au21 structure and highlights the single electron transfer processes in cluster systems and thus the importance of the EPR analysis on the mechanistic issues.

Single-Atom Control of Arsenic Incorporation in Silicon for High-Yield Artificial Lattice Fabrication.

Artificial lattices constructed from individual dopant atoms within a semiconductor crystal hold promise to provide novel materials with tailored electronic, magnetic, and optical properties. These custom-engineered lattices are anticipated to enable new, fundamental discoveries in condensed matter physics and lead to the creation of new semiconductor technologies including analog quantum simulators and universal solid-state quantum computers. This work reports precise and repeatable, substitutional incorporation of single arsenic atoms into a silicon lattice. A combination of scanning tunneling microscopy hydrogen resist lithography and a detailed statistical exploration of the chemistry of arsine on the hydrogen-terminated silicon (001) surface are employed to show that single arsenic dopants can be deterministically placed within four silicon lattice sites and incorporated with 97 ± 2% yield. These findings bring closer to the ultimate frontier in semiconductor technology: the deterministic assembly of atomically precise dopant and qubit arrays at arbitrarily large scales.

Non-Equilibrium Assembly of Atomically-Precise Copper Nanoclusters.

Accurate structure control in dissipative assemblies (DSAs) is vital for precise biological functions. However, accuracy and functionality of artificial DSAs are far from this objective. Herein, a novel approach is introduced by harnessing complex chemical reaction networks rooted in coordination chemistry to create atomically-precise copper nanoclusters (CuNCs), specifically Cu11(µ9-Cl)(µ3-Cl)3L6Cl (L = 4-methyl-piperazine-1-carbodithioate). Cu(I)-ligand ratio change and dynamic Cu(I)-Cu(I) metallophilic/coordination interactions enable the reorganization of CuNCs into metastable CuL2, finally converting into equilibrium [CuL·Y]Cl (Y = MeCN/H2O) via Cu(I) oxidation/reorganization and ligand exchange process. Upon adding ascorbic acid (AA), the system goes further dissipative cycles. It is observed that the encapsulated/bridging halide ions exert subtle influence on the optical properties of CuNCs and topological changes of polymeric networks when integrating CuNCs as crosslink sites. CuNCs duration/switch period could be controlled by varying the ions, AA concentration, O2 pressure and pH. Cu(I)-Cu(I) metallophilic and coordination interactions provide a versatile toolbox for designing delicate life-like materials, paving the way for DSAs with precise structures and functionalities. Furthermore, CuNCs can be employed as modular units within polymers for materials mechanics or functionalization studies.

Spiroligomer-Based Macrocycles for Atomically Precise Membranes.

Here, we report a new class of peptidomimetic macrocycles with well-defined three-dimensional structures and low conformational flexibility. They are assembled from fused-ring spiro-ladder oligomers (spiroligomers) by modular solid-phase synthesis. Two-dimensional nuclear magnetic resonance confirms their shape persistency. Triangular macrocycles of tunable sizes assemble into membranes with atomically precise pores, which exhibit size and shape-dependent molecular sieving towards a series of structurally similar compounds. The exceptional structural diversity and stability of spiroligomer-based macrocycles will be explored for more applications.

Highly Efficient Circularly Polarized Luminescence from Chiral Au13 Clusters Stabilized by Enantiopure Monodentate NHC Ligands.

Chiral Au nanoclusters have promising application prospects in chiral sensing, asymmetric catalysis, and chiroptics. However, enantiopure superatomic homogold clusters with crystallographic structures emitting bright circularly polarized luminescence (CPL) remain challenging. In this study, we designed chiral N-heterocyclic carbenes (NHCs), and for the first time enantioselectively synthesized a pair of monovalent cationic superatomic Au13 clusters. This new enantiomeric pair of clusters has a quasi-C2 symmetric core and exhibited CPL with an unprecedent solution-state quantum yield (QY) of 61 % among those of the atomically precise Au nanoclusters. DFT calculations provided insights into the circular dichroism behavior, and revealed the origin of CPL from superatomic Au clusters. This work opens a new avenue for developing novel homochiral nanoclusters using chiral NHC ligands and provides fundamental understanding of the origin of the chiroptics of metal clusters.

N4-Vacancy-Functionalized Carbon for High-Rate Li-Ion Storage.

Although heteroatom doping and pore management separately influence the Li+ adsorption and Li+ diffusion properties, respectively, merging their functions into a single unit is intriguing and has not been fully investigated. Herein, we have successfully incorporated both heteroatom doping and pore management within the same functional unit of N4-vacancy motifs, which is realized via acid etching of formamide-derived Zn-N4-functionalized carbon materials (Zn1NC). The N4-vacancy-rich porous carbon (V-NC) renders multiple merits: (1) a high N content of 13.94 atom % for large Li-storage capacity, (2) edged unsaturated N sites favoring highly efficient Li+ adsorption and desolvation, and (3) a shortening of the Li+ diffusion length through N4 vacancy, thereby enhancing the Li-storage kinetics and high-rate performance. This work serves as an inspiration for the creation of heteroatom-edged porous structures with controllable pore sizes for high-rate alkali-ion battery applications.

Enhanced Atomic Precision Fabrication by Adsorption of Phosphine into Engineered Dangling Bonds on H-Si Using STM and DFT.

The doping of Si using the scanning probe hydrogen depassivation lithography technique has been shown to enable placing and positioning small numbers of P atoms with nanometer accuracy. Several groups have now used this capability to build devices that exhibit desired quantum behavior determined by their atomistic details. What remains elusive, however, is the ability to control the precise number of atoms placed at a chosen site with 100% yield, thereby limiting the complexity and degree of perfection achievable. As an important step toward precise control of dopant number, we explore the adsorption of the P precursor molecule, phosphine, into atomically perfect dangling bond patches of intentionally varied size consisting of three adjacent Si dimers along a dimer row, two adjacent dimers, and one single dimer. Using low temperature scanning tunneling microscopy, we identify the adsorption products by generating and comparing to a catalog of simulated images, explore atomic manipulation after adsorption in select cases, and follow up with incorporation of P into the substrate. For one-dimer patches, we demonstrate that manipulation of the adsorbed species leads to single P incorporation in 12 out of 12 attempts. Based on the observations made in this study, we propose this one-dimer patch method as a robust approach that can be used to fabricate devices where it is ensured that each site of interest has exactly one P atom.

Electric current paths in a Si:P delta-doped device imaged by nitrogen-vacancy diamond magnetic microscopy.

The recently-developed ability to control phosphorous-doping of silicon at an atomic level using scanning tunneling microscopy, a technique known as atomic precision advanced manufacturing (APAM), has allowed us to tailor electronic devices with atomic precision, and thus has emerged as a way to explore new possibilities in Si electronics. In these applications, critical questions include where current flow is actually occurring in or near APAM structures as well as whether leakage currents are present. In general, detection and mapping of current flow in APAM structures are valuable diagnostic tools to obtain reliable devices in digital-enhanced applications. In this paper, we used nitrogen-vacancy (NV) centers in diamond for wide-field magnetic imaging (with a few-mm field of view and micron-scale resolution) of magnetic fields from surface currents flowing in an APAM test device made of a P delta-doped layer on a Si substrate, a standard APAM witness material. We integrated a diamond having a surface NV ensemble with the device (patterned in two parallel mm-sized ribbons), then mapped the magnetic field from the DC current injected in the APAM device in a home-built NV wide-field microscope. The 2D magnetic field maps were used to reconstruct the surface current densities, allowing us to obtain information on current paths, device failures such as choke points where current flow is impeded, and current leakages outside the APAM-defined P-doped regions. Analysis on the current density reconstructed map showed a projected sensitivity of ∼0.03 A m-1, corresponding to a smallest-detectable current in the 200µm wide APAM ribbon of ∼6µA. These results demonstrate the failure analysis capability of NV wide-field magnetometry for APAM materials, opening the possibility to investigate other cutting-edge microelectronic devices.

Electrical devices designed based on inorganic clusters.

The idea of exploring the bottom brink of material science has been carried out for more than two decades. Clusters science is the frontmost study of all nanoscale structures. Being an example of 0-dimensional quantum dot, nanocluster serves as the bridge between atomic and conventionally understood solid-state physics. The forming mechanism of clusters is found to be the mutual effects of electronic and geometric configuration. It is found that electronic shell structure influences the properties and geometric structure of the cluster until its size becomes larger, where electronic effects submerge in geometric structure. The discrete electronic structures depend on the size and conformation of clusters, which can be controlled artificially for potential device applications. Especially, small clusters with a size of 1-2 nm, whose electronic states are possibly discrete enough to overcome thermal fluctuations, are expected to build a single-electron transistor with room temperature operation. However, exciting as the progress may be seen, cluster science still falls within the territory of merely the extension of atomic and molecular science. Its production rate limits the scientific and potential application research of nanoclusters. It is suggested in this review that the mass-produce ability without losing the atomic precision selectivity would be the milestone for nanoclusters to advance to material science.

The New Ag-S Cluster [Ag50S13(StBu)20][CF3COO]4 with a Unique hcp Ag14 Kernel and Ag36 Keplerian-Shell-Based Structural Architecture and Its Photoresponsivity.

In metal nanoclusters (NCs), the kernel geometry and the nature of the surface protecting ligands are very crucial for their structural stability and properties. The synthesis and structural elucidation of Ag NCs is challenging because the zerovalent oxidation state of Ag is very reactive and prone to oxidization. Here, we report the NC [Ag50S13(StBu)20][CF3COO]4 with a hexagonal close-packed (hcp) cagelike Ag14 kernel. A truncated cubic shell and an octahedral shell encapsulate the hcp-layered kernel via an interstitial S2- anionic shell to form an Ag36 Keplerian outer shell of the NC. A theoretical study indicates the stability of this NC in its 4+ charge state and the charge distribution between the kernel and Keplerian shell. The unprecedented electronic structure facilitates its application toward sustainable photoresponse properties. The new insights into this novel Ag NC kernel and Keplerian shell structure may pave the way to understanding the unique structure and developing electronic structure-based applications.

Atomically Precise Water-Soluble Graphene Quantum Dot for Cancer Sonodynamic Therapy.

Although water-soluble graphene quantum dots (GQDs) have shown various promising bio-applications due to their intriguing optical and chemical properties, the large heterogeneity in compositions, sizes, and shapes of these GQDs hampers the better understanding of their structure-properties correlation and further uses in terms of large-scale manufacturing practices and safety concerns. It is shown here that a water-soluble atomically-precise GQD (WAGQD-C96 ) is synthesized and exhibits a deep-red emission and excellent sonodynamic sensitization. By decorating sterically hindered water-soluble functional groups, WAGQD-C96 can be monodispersed in water without further aggregation. The deep-red emission of WAGQD-C96 facilitates the tracking of its bio-process, showing a good cell-uptake and long-time retention in tumor tissue. Compared to traditional molecular sonosensitizers, WAGQD-C96 generates superior reactive oxygen species and demonstrates excellent tumor inhibition potency as an anti-cancer sonosensitizer in in vivo studies. A good biosafety of WAGQD-C96 is validated in both in vitro and in vivo assays.

Surface Engineering Assisted Size and Structure Modulation of Gold Nanoclusters by Ionic Liquid Cations.

Surface modification induced core size/structure change is a recent discovery in inorganic nanoparticles research, and has rarely been revealed at the molecular level. Here, we exemplify with atomically precise Au nanoclusters (NCs) that proper surface modification can selectively stabilize the desired Au0 core, conducive to the formation of size/structure-controlled Au NCs. Leveraging π-π enhanced ion-pairing interactions, ionic liquid (IL) cations are bonded to AuI -thiolate complexes. The hydrophobic-hydrophobic interactions between IL cations subsequently provide a good mechanism to prolong the size of the AuI -thiolate complexes, selectively producing small-sized Au NCs upon reduction. Through combined control over the structure and concentration of IL cations, pH and solvent polarity, we are able to produce atomically precise Au NCs with customizable size, atomic packing structure, and surface chemistry. This work also provides a facile means to integrate/synergize the materials functionalities of Au NCs and ILs, increasing their acceptance in diverse fields.

Bright Future of Gold Nanoclusters in Theranostics.

Quantum-sized gold nanoclusters (AuNCs) are emerging as theranostic agents-those that combine diagnostics and therapeutic properties-given their ultrasmall size <3 nm, which makes them behave more like a molecule rather than a nanoparticle. This molecule-like behavior endows AuNCs with interesting properties including photoluminescence, catalytic activity, and paramagnetism-all without the presence of any toxic heavy metal. But despite these fundamental advances, scalable synthetic approaches to produce high-quality AuNCs with well-controlled and programmable properties for biological applications as well as methods to determine their structure-property relationships are not widely available. In this Perspective, we will discuss what is known so far about AuNCs as well as how to move forward to propel AuNCs as a theranostic agent of choice for many biomedical applications.

Supramolecular Chirality from Hierarchical Self-Assembly of Atomically Precise Silver Nanoclusters Induced by Secondary Metal Coordination.

Chiral assembly of metal nanoparticles (NPs) into complex superstructures has been widely studied, but their formation mechanisms still remain mysterious due to the lack of precise structural information from the metal-organic interface to metallic kernel. As "molecular models" of metal NPs, atomically precise metal nanoclusters (NCs) used in the assembly of a macroscale superstructure will provide details of microscopic structure for deep understanding of such highly sophisticated assemblies; however, chiral superstructures have not been realized starting from achiral metal NCs with atomic precision. Herein, we report the supramolecular assembly of a water-soluble silver NC ((NH4)9[Ag9(mba)9], H2mba = 2-mercaptobenzoic acid, abbreviated as Ag9-NCs hereafter) into chiral hydrogels induced by the coordination of secondary metal ions. Single crystal X-ray diffraction reveals the triskelion-like structure of Ag9-NCs with a pseudochiral conformation caused by special arrangement of the peripheral mba2- ligands. The enantioselective orientation of the peripheral carboxyl group facilitates the assembly of Ag9-NCs into nanotubes with a chiral cubic (I*) lattice when coordinating to Ba2+. The nanotubes can further intertwine into one-dimensional chiral nanobraids with a preferred left-handed arrangement. These multiple levels of chirality can be tuned by drying, during which the I* phase is missing but the chiral entanglement of the nanotubes is enhanced. Through the gelation of atomically precise, achiral NCs coordination of secondary metal ions, chiral amplification of superstructures was realized. The origination of the chirality at different length scales was also discussed.

B-Doped δ-Layers and Nanowires from Area-Selective Deposition of BCl3 on Si(100).

Atomically precise, δ-doped structures forming electronic devices in Si have been routinely fabricated in recent years by using depassivation lithography in a scanning tunneling microscope (STM). While H-based precursor/monatomic resist chemistries for incorporation of donor atoms have dominated these efforts, the use of halogen-based chemistries offers a promising path toward atomic-scale manufacturing of acceptor-based devices. Here, B-doped δ-layers were fabricated in Si(100) by using BCl3 as an acceptor dopant precursor in ultrahigh vacuum. Additionally, we demonstrate compatibility of BCl3 with both H and Cl monatomic resists to achieve area-selective deposition on Si. In comparison to bare Si, BCl3 adsorption selectivity ratios for H- and Cl-passivated Si were determined by secondary ion mass spectrometry depth profiling (SIMS) to be 310(10):1 and 1529(5):1, respectively. STM imaging revealed that BCl3 adsorbed readily on bare Si at room temperature, with SIMS measurements indicating a peak B concentration greater than 1.2(1) × 1021 cm-3 with a total areal dose of 1.85(1) × 1014 cm-2 resulting from a 30 langmuir BCl3 dose at 150 °C. In addition, SIMS showed a δ-layer thickness of ∼0.5 nm. Hall bar measurements of a similar sample were performed at 3.0 K, revealing a sheet resistance of ρ□ = 1.9099(4) kΩ â–¡-1, a hole carrier concentration of p = 1.90(2) × 1014 cm-2, and a hole mobility of µ = 38.0(4) cm2 V-1 s-1 without performing an incorporation anneal. Finally, 15 nm wide B δ-doped nanowires were fabricated from BCl3 and were found to exhibit ohmic conduction. This validates the use of BCl3 as a dopant precursor for atomic-precision fabrication of acceptor-doped devices in Si and enables development of simultaneous n- and p-type doped bipolar devices.

Precise Implantation of an Archimedean Ag@Cu12 Cuboctahedron into a Platonic Cu4Bis(diphenylphosphino)hexane6 Tetrahedron.

Precision loading of nanoclusters in confined spaces, which has been enthusiastically pursued in the scientific realm, is still associated with some mysteries of "how", "when", and "why". Here, we isolated two similar heterometallic cluster-in-cage compounds, [Ag@Cu12S8@Cu4(dpph)6]X (X = OH, SD/AgCu16a and X = PF6, SD/AgCu16b; SD = SunDi), by use of an antigalvanic reaction between organometallic [PhC≡CCu]n and Ph3CSH with elemental silver. Both compounds are formed by fitting an Archimedean Ag@Cu12 cuboctahedral cluster into a Platonic Cu4(dpph)6 tetrahedral cage [dpph = bis(diphenylphosphino)hexane]. The Ag@Cu12 cluster is a hollow cuboctahedral Cu12 cage filled with a central AgI atom, and all eight triangular faces of the Ag@Cu12 cuboctahedron are triply capped by eight S2- ions, four of which in a tetrahedral array further internally pillar four Cu vertices of the outer Cu4(dpph)6 tetrahedron, fixing the cluster in the cage. Both compounds can be deemed as molecular fragments excised from porous nanomaterials filled with discrete nanoclusters, thus providing more details for understanding the confined growth of atomically precise nanoclusters. Electrospray ionization mass spectrometry (ESI-MS) reveals that the AgCu16 cluster is quite stable in CH2Cl2 and can stepwise lose dpph ligand in the gas phase under increased collision energy. This work not only presents a precise aggregation of metal atoms in a confined cavity to form a cluster-in-cage compound but also provides deep insights into the binding and geometry matching between clusters and cages in one entity.

Truly Monodisperse Molecular Nanoparticles of Cerium Dioxide of 2.4†nm dimensions: A {Ce100 O167 } Cluster.

Ultra-small nanoparticles of CeO2 obtained in molecular form, so-called molecular nanoparticles, have been limited to date to a family whose largest member is of nuclearity Ce40 with a {Ce40 O58 } core atom count. Herein we report that a synthetic procedure has been developed to the cation [Ce100 O149 (OH)18 (O2 CPh)60 (PhCO2 H)12 (H2 O)20 ]16+ , a member with a much higher Ce100 nuclearity and a {Ce100 O167 } core that is more akin to the smallest ceria nanoparticles. Its crystal structure reveals it to possess a 2.4 nm size and high D2d symmetry, and it has also allowed identification of core surface features including facet composition, the presence and location of Ce3+ and H+ (i.e. HO- ) ions, and the binding modes of the ligand monolayer of benzoate, benzoic acid, and water ligands.

Atomic Precision Graphene Model Compound for Bright Electrochemiluminescence and Organic Light-Emitting Diodes.

An N-annulated perylene diimide dimer, tPDI2N-hex, a graphene model compound with atomic precision, was investigated for luminescence applications. Electrochemiluminescence (ECL) of tPDI2N-hex was studied with tri-n-propylamine (TPrA) as a reducing coreactant. ECL-voltage curves along with spooling ECL spectra provided details of light generation mechanisms. The relative ECL quantum efficiency of the Ru(bpy)3(PF6)2/TPrA system was calculated to be 64%, which is superior to that of many other organic molecules because of the desired excited state in the absence of surface states. An organic light-emitting diode (OLED) fabricated with tPDI2N-hex displayed bright orange-red emission with a low color temperature, which is very desirable. It is plausible that the sterically constrained and thus orthogonal aromatic moieties in the tPDI2N-hex structure, with atomic precision graphene layer characteristics, lead to the excellent luminescence performances. The ECL and OLED studies of tPDI2N-hex showcase great application potentials of tPDI2N-hex in both solution-based ECL probes and solid-state light devices.

Extra Silver Atom Triggers Room-Temperature Photoluminescence in Atomically Precise Radarlike Silver Clusters.

Luminescent metal clusters show promise for applications in imaging and sensing. However, promoting emission from metal clusters at room temperature is a challenging task owing to the lack of an efficient approach to suppress the nonradiative decay process in metal cores. We report herein that the addition of a silver atom into a metal interstice of the radarlike thiolated silver cluster [Ag27 (St Bu)14 (S)2 (CF3 COO)9 (DMAc)4 ]⋅DMAc (NC1, DMAc=dimethylacetamide), which is non-emissive under ambient conditions, produced another silver cluster [Ag28 (AdmS)14 (S)2 (CF3 COO)10 (H2 O)4 ] (NC2) that displayed bright green room-temperature photoluminescence aided by the new ligand 1-adamantanethiol (AdmSH). The 28th Ag atom, which hardly affects the geometrical and electronic structures of the Ag-S skeleton, triggered the emission of green light as a result of the rigidity of the cluster structure.