Development of General-purpose Dielectric Constant Imaging Unit for SEM and Direct Observation of Samples in Aqueous Solution.

Electron microscopes can observe samples with a spatial resolution of 10 nm or higher; however, they cannot observe samples in solutions due to the vacuum conditions inside the sample chamber. Recently, we developed a scanning electron-assisted dielectric microscope (SE-ADM), based on scanning electron microscope, which enables the observation of various specimens in solution. Until now, the SE-ADM system used a custom-made SE-ADM stage with a built-in amplifier and could not be linked to the scanning electron microscopy (SEM) operation system. Therefore, it was necessary to manually acquire images from the SE-ADM system after setting the EB focus, astigmatism, and observation field-of-view from the SEM operating console. In this study, we developed a general-purpose dielectric constant imaging unit attached to commercially available SEMs. The new SE-ADM unit can be directly attached to the standard stage of an SEM, and the dielectric signal detected from this unit can be input to the external input terminal of the SEM, enabling simultaneous observation yielding SEM and SE-ADM images. Furthermore, 4.5 nm spatial resolution was achieved using a 10 nm thick silicon nitride film in the sample holder in the observation of aggregated PM2.5. We carried out the observation of cultured cells, PM2.5, and clay samples in solution.

Temporal resolution in transmission electron microscopy using a photoemission electron source.

Temporal resolution in transmission electron microscopy (TEM) has progressed to the sub-picosecond level with the stroboscopic method using a photoemission mechanism with an ultrafast laser for the electron gun. Time-resolved TEM in conjunction with a photocathode (PC)-type electron source pumped by a pulsed laser has been actively developed to exceed sub-nanosecond time resolution. Here, we provide an overview of the trends in this field and discuss the measurement targets that can be obtained by time-resolved measurements. Furthermore, we consider the types and characteristics of PC materials and their related physical quantities for evaluation of electron beam properties. Experimental results obtained by time-resolved TEM using a semiconductor PC that has a surface with a negative electron affinity are presented, and application results based on quantum mechanics are given. We also describe new techniques for improving the time resolution and new applications of pulsed electron beams in electron microscopy and discuss the measurement targets that are expected for time-resolved electron microscopy.

A Novel Monochromator with Offset Cylindrical Lenses and Its Application to a Low-Voltage Scanning Electron Microscope.

Low-voltage scanning electron microscopes (LV-SEMs) are widely used in nanoscience. However, image resolution for SEMs is restricted by chromatic aberration due to energy spread of the electron beam at low acceleration voltage. This study introduces a new monochromator (MC) with offset cylindrical lenses (CLs) as one solution for LV-SEMs. The MC optics, with highly excited CLs in offset layouts, has advantageous high performance and simple experimental setup, making it suitable for field emission LV-SEMs. In a preliminary evaluation, our MC reduced the energy spread from 770 to 67 meV. The MC was integrated into a commercial SEM equipped with an out-lens (a conventional objective lens without immersion magnetic or retarding electric fields) and an Everhart­Thornley detector. Comparing SEM images under two conditions with the MC turned on or off, the spatial resolution was improved by 58% at 0.5 and 1 keV. The filtering effect of the MC decreased the probe current with a ratio (i.e., transmittance) of 5.7%, which was consistent with estimations based on measured energy spreads. To the best of our knowledge, this is the first report on an effective MC with higher-energy resolution than 100 meV and the results offer encouraging prospects for LV-SEM technology.

Brightness evaluation of pulsed electron gun using negative electron affinity photocathode developed for time-resolved measurement using scanning electron microscope.

Temporal changes in carrier relaxations, magnetic switching, and biological structures are known to be in the order of ns. These phenomena can be typically measured by means of an optical-pump & electron-probe method using an electron microscope combined with a pulsed electron source. A photoemission-type pulsed electron gun makes it possible to obtain a short-pulsed electron beam required for high temporal resolution. On the other hand, spatial resolution is restricted by the brightness of the pulsed electron gun used in electron microscopes when a low brightness electron source is used and an irradiation current larger than a certain value is required. Thus, we constructed a prototype pulsed electron gun using a negative electron affinity (NEA) photocathode for time-resolved measurement using a scanning electron microscope (SEM) with high spatiotemporal resolution. In this study, a high-speed detector containing an avalanche photodiode (APD) was used to directly measure waveforms of the pulsed electron beam excited by a rectangular-shape pulsed light with a variable pulse duration in the range of several ns to several µs. The measured waveforms were the same rectangular shape as incident pulsed excitation light. The maximum peak brightness of the pulsed electron beam was 4.2×107 A/m2/sr/V with a pulse duration of 3 ns. This value was larger than that of the continuous electron beam (1.6 × 107 A/m2/sr/V). Furthermore, an SEM image with image sharpness of 6.2 nm was obtained using an SEM equipped with a prototype pulsed electron gun at an acceleration voltage of 3 kV.

Collection efficiency and acceptance maps of electron detectors for understanding signal detection on modern scanning electron microscopy.

Collection efficiency and acceptance maps of typical detectors in modern scanning electron microscopes (SEMs) were investigated. Secondary and backscattered electron trajectories from a specimen to through-the-lens and under-the-lens detectors placed on an electron optical axis and an Everhart-Thornley detector mounted on a specimen chamber were simulated three-dimensionally. The acceptance maps were drawn as the relationship between the energy and angle of collected electrons under different working distances. The collection efficiency considering the detector sensitivity was also estimated for the various working distances. These data indicated that the acceptance maps and collection efficiency are keys to understand the detection mechanism and image contrast for each detector in the modern SEMs. Furthermore, the working distance is the dominant parameter because electron trajectories are drastically changed with the working distance.