NanoRobotic Structures with Embedded Actuation via Ion Induced Folding.

4D structures are tridimensional structures with time-varying abilities that provide high versatility, sophisticated designs, and a broad spectrum of actuation and sensing possibilities. The downsizing of these structures below 100 µm opens up exceptional opportunities for many disciplines, including photonics, acoustics, medicine, and nanorobotics. However, it requires a paradigm shift in manufacturing methods, especially for dynamic structures. A novel fabrication method based on ion-induced folding of planar multilayer structures embedding their actuation is proposed-the planar structures are fabricated in bulk through batch microfabrication techniques. Programmable and accurate bidirectional foldings (-70° - +90°) of Silica/Chromium/Aluminium (SiO2 /Cr/Al) multilayer structures are modeled, experimentally demonstrated then applied to embedded electrothermal actuation of controllable and dynamic 4D nanorobotic structures. The method is used to produce high-performances case-study grippers for nanorobotic applications in confined environments. Once folded, a gripping task at the nano-scale is demonstrated. The proposed fabrication method is suitable for creating small-scale 4D systems for nanorobotics, medical devices, and tunable metamaterials, where rapid folding and enhanced dynamic control are required.

A Two-Axis Piezoresistive Force Sensing Tool for Microgripping.

Force sensing has always been an important necessity in making decisions for manipulation. It becomes more appealing in the micro-scale context, especially where the surface forces become predominant. In addition, the deformations happening at the very local level are often coupled, and therefore providing multi-axis force sensing capabilities to microgripper becomes an important necessity. The manufacturing of a multi-axis instrumented microgripper comprises several levels of complexity, especially when it comes to the single wafer fabrication of a sensing and actuation mechanism. To address these requirements, in this work, an instrumented two-axis force sensing tool is proposed, which can then be integrated with the appropriate actuators for microgripping. Indeed, based on the task, the gripper design and shape requirements may differ. To cover wide needs, a versatile manufacturing strategy comprising of the separate fabrication of the passive and sensing parts was especially investigated. At the microscale, signal processing brings additional challenges, especially when we are dealing with multi-axis sensing. Therefore, a proper device, with efficient and appropriate systems and signal processing integration, is highly important. To keep these requirements in consideration, a dedicated clean-room based micro-fabrication of the devices and corresponding electronics to effectively process the signals are presented in this work. The fabricated sensing part can be assembled with wide varieties of passive parts to have different sensing tools as well as grippers. This force sensing tool is based upon the piezoresistive principle, and is experimentally demonstrated with a sensing capability up to 9 mN along the two axes with a resolution of 20 µN. The experimental results validate the measurement error within 1%. This work explains the system design, its working principle, FEM analysis, its fabrication and assembly, followed by the experimental validation of its performance. Moreover, the use of the proposed sensing tool for an instrumented gripper was also discussed and demonstrated with a micrograsping and release task.

Optimal Design of Piezoelectric Cantilevered Actuators for Charge-Based Self-Sensing Applications.

Charge-based Self-Sensing Actuation (SSA) is a cost and space-saving method for accurate piezoelectric based-actuator positioning. However, the performance of its implementation resides in the choice of its geometry and the properties of the constituent materials. This paper intends to analyze the charge-based SSA's performances dependence on the aforementioned parameters and properties for a piezoelectric cantilever. A model is established for this type of Piezoelectric Actuator (PEA), and a multi-objective function is defined. The multi-objective function consists of the weighted actuator and sensor objective functions of the PEA. The analytical optimization approach introduced herein aims to assess the evolution of the defined multi-objective function across a defined set of geometrical parameters and material properties and highlights the existence of a subset of solutions for an optimal charge-based SSA's implementation. The commercially-available finite element analysis software, COMSOL Multiphysics, is used on the parametric model of the given structure to validate the analytical model. Then, experiments are conducted to corroborate the numerical and analytical modeling and analysis.