Single Condensation Droplet Self-Ejection from Divergent Structures with Uniform Wettability.

Coalescence-induced condensation droplet jumping has been extensively studied for anti-icing, condensation heat transfer, water harvesting, and self-cleaning. Another phenomenon that is gaining attention for potential enhancements is the self-ejection of individual droplets. However, the mechanism underlying this process remains elusive due to cases in which the abrupt detachment of an interface establishes an initial Laplace pressure difference. In this study, we investigate the self-ejection of individual droplets from uniformly hydrophobic microstructures with divergent geometries. We design, fabricate, and test arrays of truncated, nanostructured, and hydrophobic microcones arranged in a square pattern. High-speed microscopy reveals the dynamics of a single condensation droplet between four cones: after cycles of growth and stopped self-propulsion, the suspended droplet self-ejects without abrupt detachments. Through analytical modeling of the droplet in a conical pore as an approximation, we describe the slow isopressure growth phases and the rapid transients driven by surface energy release once a dynamic configuration is reached. Microcones with uniform wettability, in addition to being easier to fabricate, have the potential to enable the self-ejection of all nucleated droplets with a designed size, promising significant improvements in the aforementioned applications and others.

A C-shaped hinge for displacement magnification in MEMS rotational structures.

The design, analysis, fabrication, and characterization of two distinct MEMS rotational structures are provided; these structures include a classical symmetrical lancet structure and a novel symmetrical C-shaped structure provided with a tilted arm, and both are actuated by thermal actuators. Our proposed C-shaped structure implemented a curved beam mechanism to enhance the movement delivered by the thermal actuators. The geometrical parameters of our proposed device were optimized using the design of experiment (DOE) method. Furthermore, the analytical modeling based on Castigliano's second theorem and the simulations based on the finite element method (FEM) were used to predict the behavior of the symmetrical C-shaped structure; the results were in good agreement with each other. The MEMS-based rotational structures were fabricated on silicon-on-insulator (SOI) wafers using bulk micromachining technology and deep reactive ion etching (DRIE) processes. The fabricated devices underwent experimental characterization; our results showed that our proposed MEMS rotational structure exhibited a 28% improvement in the delivered displacement compared to the symmetrical lancet structure. Furthermore, the experimental results showed good agreement with those obtained from numerical analysis. Our proposed structures have potential applications in a variety of MEMS devices, including accelerometers, gyroscopes, and resonators, due to their ability to maximize displacement and thus enhance sensitivity.

High Frequency MEMS Capacitive Mirror for Space Applications.

Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer. Micro Electromechanical (MEMS) mirrors are a promising option for high-frequency applications, given the very small moving mass typical of such devices. Capacitive MEMS mirrors are presented here for free space communications, based on a novel fabrication sequence that introduces a single-layer thin film aluminum mirror structure with an underlying silicon oxide sacrificial layer. The use of aluminum instead of gold as a mirror layer diminishes the heating generated by the absorption of the sun's radiation once the mirrors exit the earth's atmosphere. Thanks to the novel fabrication sequence, the presented mirror devices have a full range actuation voltage of less than 40 V, and a high operational frequency with an eigenfrequency above 2 MHz. The devices were manufactured and characterized, and their main parameters were obtained from experimental data combined with finite element analysis, thus enabling future design optimization of the reported MEMS technology. By optical characterization of the far field diffraction pattern, good mirror performance was demonstrated.

Performance Analysis of a CSFH-Based Microgripper: Analytical Modeling and Simulation.

Microgrippers are promising tools for micro-manipulation and characterization of cells. In this paper, a biocompatible electro-thermally actuated microgripper with rotary capacitive position sensor is presented. To overcome the limited displacement possibilities usually provided by electrothermal actuators and to achieve the desired tweezers output displacement, conjugate surface flexure hinges (CSFH) are adopted. The microgripper herein reported can in principle manipulate biological samples in the size range between 15 and 120 µm. A kinematics modeling approach based on the pseudo-rigid-body-method (PRBM) is applied to describe the microgripper's working mechanism, and analytical modeling, based on finite elements method (FEM), is used to optimize the electrothermal actuator design and the heat dissipation mechanism. Finally, FEM-based simulations are carried out to verify the microgripper, the electrothermal actuator and heat dissipation mechanism performance, and to assess the validity of the analytical modeling.

Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper.

This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. In fact, the adoption of multiple CSFHs gives rise to the possibility of embedding quite a complex mechanical structure and, therefore, increasing the number of design parameters. For the case under study, a double four-bar linkage in a mirroring configuration was adopted. The presented microgripper has been fabricated by using a hard metal mask on a Silicon-on-Insulator (SOI) wafer, subject to DRIE (Deep Reactive Ion Etching) process, with a vapor releasing final stage. Some prototypes have been obtained and then tested in a lab. Finally, the experimental results have been used in order to assess simulation tools that can be used to minimize the amount of expensive equipment in operational environments.

MEMS Membranes with Nanoscale Holes for Analytical Applications.

Micro-electro-mechanical membranes having nanoscale holes were developed, to be used as a nanofluidic sample inlet in novel analytical applications. Nanoscopic holes can be used as sampling points to enable a molecular flow regime, enhancing the performance and simplifying the layout of mass spectrometers and other analytical systems. To do this, the holes must be placed on membranes capable of consistently withstanding a pressure gradient of 1 bar. To achieve this goal, a membrane-in-membrane structure was adopted, where a larger and thicker membrane is microfabricated, and smaller sub-membranes are then realized in it. The nanoscopic holes are opened in the sub-membranes. Prototype devices were fabricated, having hole diameters from 300 to 600 nm, a membrane side of 80 µm, and a simulated maximum displacement of less than 150 nm under a 1 bar pressure gradient. The obtained prototypes were tested in a dedicated vacuum system, and a method to calculate the effective orifice diameter using gas flow measurements at different pressure gradients was implemented. The calculated diameters were in good agreement with the target diameter sizes. Micro-electro-mechanical technology was successfully used to develop a novel micromembrane with nanoscopic holes, and the fabricated prototypes were successfully used as a gas inlet in a vacuum system for mass spectrometry and other analytical systems.

Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis.

The substrate plays a key role in chemoresistive gas sensors. It acts as mechanical support for the sensing material, hosts the heating element and, also, aids the sensing material in signal transduction. In recent years, a significant improvement in the substrate production process has been achieved, thanks to the advances in micro- and nanofabrication for micro-electro-mechanical system (MEMS) technologies. In addition, the use of innovative materials and smaller low-power consumption silicon microheaters led to the development of high-performance gas sensors. Various heater layouts were investigated to optimize the temperature distribution on the membrane, and a suspended membrane configuration was exploited to avoid heat loss by conduction through the silicon bulk. However, there is a lack of comprehensive studies focused on predictive models for the optimization of the thermal and mechanical properties of a microheater. In this work, three microheater layouts in three membrane sizes were developed using the microfabrication process. The performance of these devices was evaluated to predict their thermal and mechanical behaviors by using both experimental and theoretical approaches. Finally, a statistical method was employed to cross-correlate the thermal predictive model and the mechanical failure analysis, aiming at microheater design optimization for gas-sensing applications.

RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications.

RF-MEMS, i.e., Micro-Electro-Mechanical Systems (MEMS) for Radio Frequency (RF) passive components, exhibit interesting characteristics for the upcoming 5G and Internet of Things (IoT) scenarios, in which reconfigurable broadband and frequency-agile devices, like high-order switching units, tunable filters, multi-state attenuators, and phase shifters will be necessary to enable mm-Wave services, small cells, and advanced beamforming. In particular, satellite communication systems providing high-speed Internet connectivity utilize the K and Ka bands, which offer larger bandwidth compared to lower frequencies. This paper focuses on two design concepts of multi-state phase shifter designed and manufactured in RF-MEMS technology. The networks feature 4 switchable stages (16 states) and are developed for the K and Ka bands. The proposed phase shifters are realized in a surface micromachining RF-MEMS technology and the experimentally measured parameters are compared with Finite Element Method (FEM) multi-physical electromechanical and RF simulations. The simulated phase shifts at both the operating bands fit well the measured value, despite the measured losses (S21) are larger than 5-7 dB if compared to simulations. However, such a non-ideality has a technological motivation that is explained in the paper and that will be fixed in the manufacturing of future devices.

Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper.

This paper deals with the manipulation of micro-objects operated by a new concept multi-hinge multi-DoF (degree of freedom) microsystem. The system is composed of a planar 3-DoF microstage and of a set of one-DoF microgrippers, and it is arranged is such a way as to allow any microgripper to crawl over the stage. As a result, the optimal configuration to grasp the micro-object can be reached. Classical algorithms of kinematic analysis have been used to study the rigid-body model of the mobile platform. Then, the rigid-body replacement method has been implemented to design the corresponding compliant mechanism, whose geometry can be transferred onto the etch mask. Deep-reactive ion etching (DRIE) is suggested to fabricate the whole system. The main contributions of this investigation consist of (i) the achievement of a relative motion between the supporting platform and the microgrippers, and of (ii) the design of a process flow for the simultaneous fabrication of the stage and the microgrippers, starting from a single silicon-on-insulator (SOI) wafer. Functionality is validated via theoretical simulation and finite element analysis, whereas fabrication feasibility is granted by preliminary tests performed on some parts of the microsystem.

Oscillations During Flow Boiling in Single Microchannels.

Flow boiling of degassed double-distilled water in a single 50 × 50 µm and 100 × 50 µm microchannel was investigated on the basis of experimental measurements and high-speed visualization. The visualized events during boiling were analyzed in terms of the bubble frequencies and boiling front oscillations in microchannels. A digital image sequence analysis algorithm was composed to determine the time dependence of bubble and meniscus locations. The results show (i) the dynamic characteristics of boiling in microchannels, (ii) the increase of fundamental oscillation frequencies with increasing heat flux and temperature of the microchannel bottom, (iii) the amplitudes of the flow boiling oscillations are inversely proportional to the fundamental frequencies. The outcomes of the study are important as the oscillations during boiling in single microchannels are experimentally confirmed to be predictable in terms of oscillation frequencies and amplitudes trends and dependencies. This knowledge is especially significant at constructing efficient two-phase micro heat exchangers, micro mixers or micro reactors, as the cross section and the length of the channel become exceedingly important design parameters in micro devices with boiling.

New MEMS Tweezers for the Viscoelastic Characterization of Soft Materials at the Microscale.

As many studies show, there is a relation between the tissue's mechanical characteristics and some specific diseases. Knowing this relationship would help early diagnosis or microsurgery. In this paper, a new method for measuring the viscoelastic properties of soft materials at the microscale is proposed. This approach is based on the adoption of a microsystem whose mechanical structure can be reduced to a compliant four bar linkage where the connecting rod is substituted by the tissue sample. A procedure to identify both stiffness and damping coefficients of the tissue is then applied to the developed hardware. Particularly, stiffness is calculated solving the static equations of the mechanism in a desired configuration, while the damping coefficient is inferred from the dynamic equations, which are written under the hypothesis that the sample tissue is excited by a variable compression force characterized by a suitable wave form. The whole procedure is implemented by making use of a control system.