Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.

Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 µm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: sensor calibration and glycerine evaporation rate measurement.

This paper presents mass measurements of glycerine beads performed by means of laterally resonant micro-cantilevers. The transducer architecture is based on a resonant cantilever electrostatically coupled by two parallel placed electrodes. Previous to glycerine measurements, a calibration of the mass sensor has been performed by measuring a standard mass based on latex spheres. From these measurements, a value of the mass responsivity is deduced. In addition, a study of the transducer phase noise has been carried out in order to determine the minimum detectable mass. Mass measurements experiments have been performed by detecting the change on the resonance frequency of the on-plane cantilever resonant mode, produced by locally deposited mass. Additionally, the mass losses detected on the calibrated transducer after glycerine drop deposition allowed determining its evaporation rate.

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: electromechanical model and parameter extraction.

A microcantilever based platform for mass detection in the femtogram range has been integrated in the doped top silicon layer of a SOI substrate. The on-plane fundamental resonance mode of the cantilever is excited electrostatically and detected capacitively by means of two parallel placed electrodes in a two port configuration. An electromechanical model of the cantilever-electrodes transducer and its implementation in a SPICE environment are presented. The model takes into account non-linearities from variable cantilever-electrode gap, fringing field contributions and real deflection shape of the cantilever for the calculation of the driving electrostatic force. A fitting of the model to the measured S(21) transmitted power frequency response is performed to extract the characteristic sensor parameters as Young modulus, Q factor, electrical parasitics and mass responsivity.

Integrated CMOS amplifier for ENG signal recording.

The development and in vivo test of a fully integrated differential CMOS amplifier, implemented with standard 0.7-microm CMOS technology (one poly, two metals, self aligned twin-well CMOS process) intended to record extracellular neural signals is described. In order to minimize the flicker noise generated by the CMOS circuitry, a chopper technique has been chosen. The fabricated amplifier has a gain of 74 dB, a bandwidth of 3 kHz, an input noise of 6.6 nV/(Hz)0.5, a power dissipation of 1.3 mW, and the active area is 2.7 mm2. An ac coupling has been used to adapt the electrode to the amplifier circuitry for the in vivo testing. Compound muscle action potentials, motor unit action potentials, and compound nerve action potentials have been recorded in acute experiments with rats, in order to validate the amplifier.

On the electromechanical modelling of a resonating nano-cantilever-based transducer.

An electromechanical model for a transducer based on a lateral resonating cantilever is described. The on-plane vibrations of the cantilever are excited electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. The model predicts the static deflection and the frequency response of the oscillation amplitude for different voltage polarization conditions. For the electrostatic force calculation the model takes into account the real deflection shape of the cantilever and the contribution to the cantilever-driver capacitance of the fringing field. Both the static and dynamic predictions have been validated experimentally by measuring the deflection of the cantilever by means of an optical microscope.

Atomic force microscope characterization of a resonating nanocantilever.

An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant cantilever-based mass sensor. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. In order to minimize the interaction between AFM probe and the resonating transducer cantilever, the AFM is operated in a dynamic non-contact mode, using oscillation amplitudes corresponding to a low force regime. The dependence of the static cantilever deflection on DC voltage and of the oscillation amplitude on the frequency of the AC voltage is measured by this technique and the results are fitted by a simple non-linear electromechanical model.

AFM lithography of aluminum for fabrication of nanomechanical systems.

Nanolithography by local anodic oxidation of surfaces using atomic force microscopy (AFM) has proven to be more reproducible when using dynamic, non-contact mode. Hereby, the tip/sample interaction forces are reduced dramatically compared to contact mode, and thus tip wear is greatly reduced. Anodic oxidation of Al can be used for fabricating nanomechanical systems, by using the Al oxide as a highly selective dry etching mask. In our experiments, areas as large as 2 micro m x 3 micro m have been oxidized repeatedly without any sign of tip-wear. Furthermore, line widths down to 10nm have been routinely obtained, by optimization of AFM parameters, such as tip/sample distance, voltage and scan speed. Finally, AFM oxidation experiments have been performed on CMOS processed chips, demonstrating the first steps of fabricating fully functional nanomechanical devices.

An integrated implantable electrical sacral root stimulator for bladder control.

Objectives. The goal of this work is to study and develop an electrical integrated system that allows the control of the basic functions (such as micturition, defecation, and erection) by sacral root stimulation in paraplegic patients. Materials and Methods. The system has been implemented using a commercially available Mietec CMOS technology. It is based on an external transceiver unit, which provides data and energy to the implant device through a bi-directional inductive link, and an implantable batteryless module that generates the needed current pulses, according to the orders received from the external unit. To test the electrode-tissue interface and system performance, an impedance measurement circuit has been included. Results. The three independent channel stimulators allow an exhaustive control of the waveform parameters (amplitude, pulse width, frequency) independent of the placement of the external coil respect to the internal device. Conclusion. The architecture of the new stimulator, applied over the sacral roots, can be used to control the voiding of the bladder. The system allows an independent distance programmable stimulation. The impedance measurement circuit implemented allows an easy and systematic performance test.

Characterization of antiresonant reflecting optical waveguide devices by scanning near-field optical microscopy.

Silicon-based antiresonant reflecting optical waveguide (ARROW) devices were studied by means of a scanning near-field optical microscope. Various structures such as a Y junction of a Mach-Zehnder interferometer and a directional optical coupler were characterized, showing the propagation of the light inside the devices simultaneously with the topography. Scattering on the splitting point of the Y junction was shown, as well as a partial coupling of the light between the two branches of the coupler. Measurements on the decay length of the evanescent field were also performed to study the use of the ARROW waveguide for sensor purposes.