Self-Detachable Through-Metal Acoustic Wireless Power Transfer.

Unlike electromagnetic waves, acoustic vibrations waves can be used to transfer power directly through metal structures without being shielded. In this article, a novel design of a self-detachable acoustic wireless power transfer system that can be used to transfer power through the thickness of a steel plate is presented, which does not require the use of any couplant. Electro-permanent-magnets (EPMs) were used to provide magnetic clamping force along the perimeter of the receiver transducer disk to enhance coupling to the steel plate, while the transmitter transducer was bonded to the other side of the plate. The EPM clamping force can be switched ON/ OFF electronically with low power consumption. Unlike past work reliant on additional bonding materials or liquid/gel couplant, this approach enables the receiver to be attached and detached at will, opening up the possibility of a simple charging pad for unmanned aerial vehicles (UAVs) or other consumer devices for harsh environment applications. Power transfer efficiency up to 63% was achieved, and the effect of varying steel plate thickness and clamping force was also investigated. A finite element model was also constructed to understand the vibration mode shape.

Ultrasonic Lamb Waves for Wireless Power Transfer.

Ultrasonic guided plate waves (Lamb waves) can be used to transfer power along the length of metal plates, achieving longer distance wireless power transfer (WPT), while not being impeded by electromagnetic shielding from the metal plate. In this article, a fundamental study on the performance of Lamb wave WPT is presented, including modeling, simulations, and experimental verification. By using Macro-Fiber Composite (MFC), d33 -mode, piezoelectric transducers bonded to a [Formula: see text] mm aluminum plate using an epoxy, power transfer of 0.47 W with 56% overall power transfer efficiency was achieved at a 204-mm distance. The measured frequency response of the power transfer efficiency matches well with the simulated results, and the effects of complex load impedance matching and transducer sizing were investigated. It is shown that the location where the efficiency is maximized roughly corresponds to the zero-order symmetrical mode (S0) standing wave patterns due to reflections from the plate edges. For practical implementation, the effect of using different methods to temporarily or permanently bond the MFC transducers to the metal plate was also investigated, as well as the effect of electrically grounding the metal plate.

Direct-Write Laser Greyscale Lithography for Multi-Layer Lead Zirconate Titanate Thin Films.

Direct-write laser greyscale lithography has been used to facilitate a single step patterning technique for multi-layer lead zirconate titanate (PZT) thin films. A 2.55 µm thick photoresist was patterned with a direct-write laser. The intensity of the laser was varied to create both tiered and sloped structures that are subsequently transferred into multi-layer PZT(52/48) stacks using a single Ar ion mill etch. Traditional processing requires a separate photolithography step and an ion mill etch for each layer of the substrate, which can be costly and time consuming. The novel process allows access to buried electrode layers in the multi-layer stack in a single photolithography step. The greyscale process was demonstrated on three 150 mm diameter Si substrates configured with a 0.5 µm thick SiO2 elastic layer, a base electrode of Pt/TiO2, and a stack of four PZT(52/48) thin films of either 0.25 µm thickness per layer or 0.50 µm thickness per layer, and using either Pt or IrO2 electrodes above and below each layer. Stacked capacitor structures were patterned and results will be reported on the ferroelectric and electromechanical properties using various wiring configurations and compared to comparable single layer PZT configurations.

Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films.

Direct-write laser grayscale lithography has been used to facilitate a single-step patterning technique for multilayer lead zirconate titanate (PZT) thin films. A 2.55- -thick photoresist was patterned with a direct-write laser. The intensity of the laser was varied to create both tiered and sloped structures that are subsequently transferred into multilayer PZT(52/48) stacks using a single Ar ion-mill etch. Traditional processing requires a separate photolithography step and an ion mill etch for each layer of the substrate, which can be costly and time consuming. The novel process allows access to buried electrode layers in the multilayer stack in a single photolithography step. The grayscale process was demonstrated on three 150-mm diameter Si substrates configured with a 0.5- -thick SiO2 elastic layer, a base electrode of Pt/TiO2, and a stack of four PZT(52/48) thin films of either 0.25- thickness per layer or 0.50- thickness per layer, and using either Pt or IrO2 electrodes above and below each layer. Stacked capacitor structures were patterned and results will be reported on the ferroelectric and electromechanical properties using various wiring configurations and compared to comparable single layer PZT configurations.

Phased Array Focusing for Acoustic Wireless Power Transfer.

Wireless power transfer (WPT) through acoustic waves can achieve higher efficiencies than inductive coupling when the distance is above several times the transducer size. This paper demonstrates the use of ultrasonic phased arrays to focus power to receivers at arbitrary locations to increase the power transfer efficiency. Using a phased array consisting of 37 elements at a distance nearly 5 times the receiver transducer diameter, a factor of 2.6 increase in efficiency was achieved when compared to a case equivalent to a single large transducer with the same peak efficiency distance. The array has a total diameter of 7 cm, and transmits through air at 40 kHz to a 1.1-cm diameter receiver, achieving a peak overall efficiency of 4% at a distance of 5 cm. By adjusting the focal distance, the efficiency can also be maintained relatively constant at distances up to 9 cm. Numerical models were developed and shown to closely match the experimental energy transfer behavior; modeling results indicate that the efficiency can be further doubled by increasing the number of elements. For comparison, an inductive WPT system was also built with the diameters of the transmitting and receiving coils equivalent to the dimensions of the transmitting ultrasonic phased array and receiver transducer, and the acoustic WPT system achieved higher efficiencies than the inductive WPT system when the transmit-to-receive distance is above 5 cm. In addition, beam angle steering was demonstrated by using a simplified seven-element 1-D array, achieving power transfer less dependent on receiver placement.

Ultrafine Pitch Stencil Printing of Liquid Metal Alloys.

With high conductivity and stretchable for large cross-sections, liquid metals such as galinstan are promising for creating stretchable devices and interconnects. Creating high resolution features in parallel is challenging, with most techniques limited to a hundred micrometers or more. In this work, multilevel electroplated stencils are investigated for printing liquid metals, with galinstan features as small as ten micrometers printed on soft elastomers, a factor of 10 reduction over past liquid metal stencil printing. Capacitors and resistive strain sensors are also demonstrated, showing the potential for creating stretchable conductors and devices.

Magnetic elastomers for stretchable inductors.

In this work, silicone loaded with magnetic particles is investigated for creating a composite with higher permeability while still maintaining stretchability. Magnetic and mechanical properties are first characterized for composites based on both spherical and platelet particle geometries. The first magnetic-core stretchable inductors are then demonstrated using the resulting ferroelastomer. Solenoid inductors based on liquid metal galinstan are then demonstrated around a ferroelastomeric core and shown to survive uniaxial strains up to 100%. Soft elastomers loaded with magnetic particles were found to increase the core permeability and inductance density of stretchable inductors by nearly 200%.

Electrode-shaping for the excitation and detection of permitted arbitrary modes in arbitrary geometries in piezoelectric resonators.

This paper reports theoretical analysis and experimental results on a numerical electrode shaping design technique that permits the excitation of arbitrary modes in arbitrary geometries for piezoelectric resonators, for those modes permitted to exist by the nonzero piezoelectric coefficients and electrode configuration. The technique directly determines optimal electrode shapes by assessing the local suitability of excitation and detection electrode placement on two-port resonators without the need for iterative numerical techniques. The technique is demonstrated in 61 different electrode designs in lead zirconate titanate (PZT) thin film on silicon RF micro electro-mechanical system (MEMS) plate, beam, ring, and disc resonators for out-of-plane flexural and various contour modes up to 200 MHz. The average squared effective electromechanical coupling factor for the designs was 0.54%, approximately equivalent to the theoretical maximum value of 0.53% for a fully electroded length-extensional mode beam resonator comprised of the same composite. The average improvement in S(21) for the electrode-shaped designs was 14.6 dB with a maximum improvement of 44.3 dB. Through this piezoelectric electrodeshaping technique, 95% of the designs showed a reduction in insertion loss.

Picogram material dosing of microstructures.

A solution delivery platform comprised of a suspended microcapillary connected to a microwell enables picogram solute deposition on suspended structures. Precision material placement in the capillary from a 100 pl drop inkjetted into the well is achieved without the destruction of the microstructure and adjacent submicron electrostatic gaps. This method scales to smaller structures without the need for drop miniaturization. The theory behind the solute transfer in the system is developed. Three regions in the drying process are observed and match with the model. The "accumulation" region builds solute concentration in the capillary. The "solidification" region initiates the solidification of solute starting at the free end of the capillary. The "termination" region is characterized by a rapid increase in the solidification due to an increase in the well concentration near the end of the drop lifetime. The accumulation time and solidification rate dependence on concentration compare well with the model.