High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation.

Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore the effect of ultraviolet exposure on process efficiency. Specifically, we demonstrate that shorter wavelengths not only enable enhanced resolution but also yield higher etching selectivity, with an order of magnitude lower pulse energy and significantly higher repetition rates than current practice. This result is obtained using an exposure regime where the laser beam alternates between regimes of self-focusing and defocusing in a stable manner, forming a localized filament. Using this principle, we demonstrate the fabrication of self-organized nano-channels with diameters as small as 120 nm after etching, reaching extreme aspect ratios, exceeding 1500.

Formation Mechanism of Elemental Te Produced in Tellurite Glass Systems by Femtosecond Laser Irradiation.

The formation of elemental trigonal tellurium (t-Te) on tellurite glass surfaces exposed to femtosecond laser pulses is discussed. Specifically, the underlying elemental crystallization phenomenon is investigated by altering laser parameters in common tellurite glass compositions under various ambient conditions. Elemental crystallization of t-Te by a single femtosecond laser pulse is unveiled by high-resolution imaging and analysis. The thermal diffusion model reveals the absence of lattice melting upon a single laser pulse, highlighting the complexity of the phase transformation. The typical cross-section displays three different crystal configurations over its depth, in which the overall thickness increases with each subsequent pulse. The effect of various controlled atmospheres shows the suppressing nature of the elemental crystallization, whereas the substrate temperature shows no significant impact on the nucleation of t-Te nanocrystals. This research gives new insight into the elemental crystallization of glass upon femtosecond laser irradiation and shows the potential to fabricate functional transparent electronic micro/nanodevices.

Glass-in-glass infiltration for 3D micro-optical composite components.

Chalcogenide glass exhibits a wide transmission window in the infrared range, a high refractive index, and nonlinear optical properties; however, due to its poor mechanical properties and low chemical and environmental stability, producing three-dimensional microstructures of chalcogenide glass remains a challenge. Here, we combine the fabrication of arbitrarily shaped three-dimensional cavities within fused silica molds by means of femtosecond laser-assisted chemical etching with the pressure-assisted infiltration of a chalcogenide glass into the resulting carved silica mold structures. This process enables the fabrication of 3D, geometrically complex, chalcogenide-silica micro-glass composites. The resulting products feature a high refractive index contrast that enables total-internal-reflection guiding and an optical quality roughness level suited for applications in the infrared.

Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining.

Advanced three-dimensional manufacturing techniques are triggering new paradigms in the way we design and produce sophisticated parts on demand. Yet, to fully unravel its potential, a few limitations have to be overcome, one of them being the realization of high-aspect-ratio structures of arbitrary shapes at sufficiently high resolution and scalability. Among the most promising advanced manufacturing methods that emerged recently is the use of optical non-linear absorption effects, and in particular, its implementation in 3D printing of glass based on femtosecond laser exposure combined with chemical etching. Here, we optimize both laser and chemical processes to achieve unprecedented aspect ratio levels. We further show how the formation of pre-cursor laser-induced defects in the glass matrix plays a key role in etching selectivity. In particular, we demonstrate that there is an optimal energy dose, an order of magnitude smaller than the currently used ones, yielding to higher process efficiency and lower processing time. This research, in addition to a conspicuous technological advancement, unravels key mechanisms in laser-matter interactions essential in chemically-based glass manufacturing and offers an environmentally-friendly pathway through the use of less-dangerous etchants, replacing the commonly used hydrofluoric acid.

Wavelength-multiplexed single-shot ptychography.

We present the first experimental demonstration of wavelength-multiplexing in single-shot ptychography. Specifically, we experimentally reconstruct the complex transmission profile of a wavelength-independent and wavelength-dependent object simultaneously for 532 nm and 633 nm probing wavelengths. In addition, we discuss the advantages of a more general approach to detector segmentation in single-shot ptychography. A minimization to correct for uncertainties in a priori information that is required for single-shot geometries is presented along with a novel probe constraint. Furthermore, this technique is complementary to dual-wavelength interferometry without the need for an external reference. This work is enabling to imaging technologies and applications such as broadband single-shot ptychography, time-resolved imaging by multiplexed ptychography, real-time inspection for laser micro-machining, and plasma imaging.

Highly motile nanoscale magnetic artificial cilia.

Among the many complex bioactuators functioning at different scales, the organelle cilium represents a fundamental actuating unit in cellular biology. Producing motions at submicrometer scales, dominated by viscous forces, cilia drive a number of crucial bioprocesses in all vertebrate and many invertebrate organisms before and after their birth. Artificially mimicking motile cilia has been a long-standing challenge while inspiring the development of new materials and methods. The use of magnetic materials has been an effective approach for realizing microscopic artificial cilia; however, the physical and magnetic properties of the magnetic material constituents and fabrication processes utilized have almost exclusively only enabled the realization of highly motile artificial cilia with dimensions orders of magnitude larger than their biological counterparts. This has hindered the development and study of model systems and devices with inherent size-dependent aspects, as well as their application at submicrometer scales. In this work, we report a magnetic elastomer preparation process coupled with a tailored molding process for the successful fabrication of artificial cilia with submicrometer dimensions showing unprecedented deflection capabilities, enabling the design of artificial cilia with high motility and at sizes equal to those of their smallest biological counterparts. The reported work crosses the barrier of nanoscale motile cilia fabrication, paving the way for maximum control and manipulation of structures and processes at micro- and nanoscales.

Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguides.

Vibration monitoring plays a key role in numerous applications, including machinery predictive maintenance, shock detection, space applications, packaging-integrity monitoring and mining. Here, we investigate mechanical nonlinearities inherently present in suspended glass waveguides as a means for optically retrieving key vibration pattern information. The principle is to use optical phase changes in a coherent light signal travelling through the suspended glass waveguide to measure both optical path elongation and stress build-up caused by a given vibration state. Due to the intrinsic non-linear mechanical properties of double-clamped beams, we show that this information not only offers a means for detecting excessive vibrations but also allows for identifying specific vibration patterns, such as positive or negative chirp, without the need for any additional signal processing. In addition, the manufacturing process based on femtosecond laser exposure and chemical etching makes this sensing principle not only simple, compact and robust to harsh environments but also scalable to a broad frequency range.

Ablation in Externally Applied Electric and Magnetic Fields.

To harness light-matter interactions at the nano-/micro-scale, better tools for control must be developed. Here, it is shown that by applying an external electric and/or magnetic field, ablation of Si and glass under ultra-short (sub-1 ps) laser pulse irradiation can be controlled via the Lorentz force F = e E + e [ v × B ] , where v is velocity of charge e, E is the applied electrical bias and B is the magnetic flux density. The external electric E-field was applied during laser ablation using suspended micro-electrodes above a glass substrate with an air gap for the incident laser beam. The counter-facing Al-electrodes on Si surface were used to study debris formation patterns on Si. Debris was deposited preferentially towards the negative electrode in the case of glass and Si ablation. Also, an external magnetic field was applied during laser ablation of Si in different geometries and is shown to affect ripple formation.

A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser.

With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners.

Self-organized nanostructures forming under high-repetition rate femtosecond laser bulk-heating of fused silica.

Femtosecond laser exposure of fused silica can lead to non-linear absorption, eventually causing structural modifications in the material. Above a given pulse repetition frequency, the effects from one pulse to the next one become cumulative leading to a localized bulk heating of the substrate, and in turn, to the dissociation of the glass matrix leading to gas bubbles formation. Here, we investigate the dynamics of bubbles formation as a function of the incoming net fluence. In particular, we observe evidences of laser trapping of gas bubbles and the unexpected formation of self-organized nanostructures, resembling nanogratings normally found at much lower repetition rate, i.e. when cumulative effects are absent.

Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications.

We present a novel hybrid glass-polymer micromechanical sensor by combining two femtosecond laser direct writing processes: laser illumination followed by chemical etching of glass and two-photon polymerization. This incorporation of techniques demonstrates the capability of combining mechanical deformable devices made of silica with an integrated polymer structure for passive chemical sensing application. We demonstrate that such a sensor could be utilized for investigating the elastic properties of polymeric microstructures fabricated via the two-photon polymerization technique. Moreover, we show that polymeric microstructure stiffness increases when immersed in organic liquids.

Ultrafast Laser to Tailor Material Properties: An Enabling Tool in Advanced Three-dimensional Micromanufacturing.

The progress made in ultrafast laser technology towards high repetition rate systems have opened new opportunities in micromanufacturing. Non-linear absorption phenomena triggered by femtosecond pulses interacting with transparent materials allow material properties to be tailored locally and in three dimensions, with resolution beyond the diffraction limits and at rate compatible with fabrication process requirements. In this short article, we illustrate the potential of this technology for manufacturing, and more specifically micro-engineering, with a few examples taken from our own research and beyond.

Plasmon-less surface enhanced Raman spectra induced by self-organized networks of silica nanoparticles produced by femtosecond lasers.

Raman spectroscopy is the workhorse for label-free analysis of molecules. It relies on the inelastic scattering of incoming monochromatic light impinging molecules of interest. This effect leads to a very weak emission of light spectrum that provides a signature of the molecules being observed. Considerable efforts have been made over the last decades, in particular with the development of Surface Enhanced Raman Spectroscopy (SERS), to enhance the intensity of the emitted signal so that ultimately, traces of molecules can be detected. Here, we show that dense self-organized networks of quasi-monodisperse nanoparticles redepositing during femtosecond laser ablation of trenches in fused silica can lead to a significant field enhancement effect, enabling the Raman detection of a single-molecule layer deposited on the surface (so called monolayer). Unlike previously reported for SERS experiments, here, there is no metal layer promoting plasmonics effects causing localized field enhancement. The method for producing SERS substrates is therefore quite straightforward and low cost.

Femtosecond laser direct-write waveplates based on stress-induced birefringence.

The use of femtosecond lasers to introduce controlled stress states has recently been demonstrated in silica glass. We use this technique, in combination with chemical etching, to generate and control stress-induced birefringence over a well-defined region of interest, demonstrating direct-write wave plates with precisely tailored retardance levels. This tailoring enables the fabrication of laser-written polarization optics that can be tuned to any wavelength for which silica is transparent, and with a clear aperture free of any laser modifications. Using this approach, we achieve sufficient retardance to act as a quarter-wave plate. The stress distribution within the clear aperture is analyzed and modeled, providing a generic template that can be used as a set of design rules for laser-machined polarization devices.

Non-contact sub-nanometer optical repositioning using femtosecond lasers.

Optical components like resonator or waveguides often have stringent requirements in term of positioning accuracy during packaging. While this can be done routinely in a laboratory environment, permanently positioning and aligning optical elements with nanometer accuracy in a fully packaged device is a challenging endeavor. Here, we demonstrate the use of femtosecond laser-induced modifications in glass for the remote permanent fine-positioning of an optical element with sub-nanometer resolution.

Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation.

We present direct experimental observation of the morphological evolution during the formation of nanogratings with sub-100-nm periods with the increasing number of pulses. Theoretical simulation shows that the constructive interference of the scattering light from original nanoplanes will create an intensity maximum located between the two adjacent nanoplanes, resulting in shortening the nanograting period by half. The proposed mechanism explains the formation of nanogratings with periods beyond those predicted by the nanoplasmonic model.

Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writing.

We report evidence of intermittent behavior between chaotic and self-organized patterns while writing lines with a femtosecond lasers on the surface of a fused silica substrate. The patterns are accompanied by resolidified sub-microspheres and non-aligned grating lamellae. We observe that such dynamic behavior exhibits a striking similarity with the fluctuating content of a queuing system which alternate between random busy and idle periods.

Laser-assisted morphing of complex three dimensional objects.

Morphing refers to the smooth transition from a specific shape into another one, in which the initial and final shapes can be significantly different. A typical illustration is to turn a cube into a sphere by continuous change of shape curvatures. Here, we demonstrate a process of laser-induced morphing, driven by surface tension and thermally-controlled viscosity. As a proof-of-concept, we turn 3D glass structures fabricated by a femtosecond laser into other shapes by locally heating up the structure with a feedback-controlled CO2 laser. We further show that this laser morphing process can be accurately modelled and predicted.

On the anisotropy of stress-distribution induced in glasses and crystals by non-ablative femtosecond laser exposure.

Femtosecond laser exposure in the non-ablative regime induces a variety of bulk structural modifications, in which anisotropy may depend on the polarization of the writing beam. In this work, we investigate the correlation between polarization state and stress anisotropy. In particular, we introduce a methodology that allows for rapid analysis and visualization of laser-induced stress anisotropy in glasses and crystals. Using radial and azimuthal polarization, we also demonstrate stress states that are nearly isotropic.

Tailored surface birefringence by femtosecond laser assisted wet etching.

Surface texturing is demonstrated by the combination of wet etching and ultrafast laser nanostructuring of silica glass. Using potassium hydroxide (KOH) at room temperature as an etchant of laser modified glass, we show the polarization dependent linear increase in retardance reaching a threefold value within 25 hours. The dispersion control of birefringence by the etching procedure led to achromatic behaviour over the entire visible spectral range. The mechanism of enhanced KOH etching selectivity after femtosecond laser exposure is discussed and correlated to the formation of various laser-induced defects, such as silicon-rich oxygen deficiency and color centers.