CMOS Depth Image Sensor with Offset Pixel Aperture Using a Back-Side Illumination Structure for Improving Disparity.

This paper presents a CMOS depth image sensor with offset pixel aperture (OPA) using a back-side illumination structure to improve disparity. The OPA method is an efficient way to obtain depth information with a single image sensor without additional external factors. Two types of apertures (i.e., left-OPA (LOPA) and right-OPA (ROPA)) are applied to pixels. The depth information is obtained from the disparity caused by the phase difference between the LOPA and ROPA images. In a CMOS depth image sensor with OPA, disparity is important information. Improving disparity is an easy way of improving the performance of the CMOS depth image sensor with OPA. Disparity is affected by pixel height. Therefore, this paper compared two CMOS depth image sensors with OPA using front-side illumination (FSI) and back-side illumination (BSI) structures. As FSI and BSI chips are fabricated via different processes, two similar chips were used for measurement by calculating the ratio of the OPA offset to pixel size. Both chips were evaluated for chief ray angle (CRA) and disparity in the same measurement environment. Experimental results were then compared and analyzed for the two CMOS depth image sensors with OPA.

Flight model characterization of the wide-field off-axis telescope for the MATS satellite.

We present optical characterization, calibration, and performance tests of the Mesospheric Airglow/Aerosol Tomography Spectroscopy (MATS) satellite, which for the first time, to the best of our knowledge, for a satellite, applies a linear-astigmatism-free confocal off-axis reflective optical design. Mechanical tolerances of the telescope were investigated using Monte Carlo methods and single-element perturbations. The sensitivity analysis results indicate that tilt errors of the tertiary mirror and a surface RMS error of the secondary mirror mainly degrade optical performance. From the Monte Carlo simulation, the tolerance limits were calculated to ±0.5mm, ±1mm, and ±0.15∘ for decenter, despace, and tilt, respectively. We performed characterization measurements and optical tests with the flight model of the satellite. Multi-channel relative pointing, total optical system throughput, and distortion of each channel were characterized for end-users. Optical performance was evaluated by measuring the modulation transfer function (MTF) and point spread function (PSF). The final MTF performance was 0.25 MTF at 20 lp/mm for the ultraviolet channel (304.5 nm), and 0.25-0.54 MTF at 10 lp/mm for infrared channels. The salient fact of the PSF measurement of this system is that there is no noticeable linear astigmatism detected over a wide field of view (5.67∘×0.91∘). All things considered, the design method showed great advantages in wide field of view observations with satellite-level optical performance.

Effects of Offset Pixel Aperture Width on the Performances of Monochrome CMOS Image Sensors for Depth Extraction.

This paper presents the effects of offset pixel aperture width on the performance of monochrome (MONO) CMOS image sensors (CISs) for a three-dimensional image sensor. Using a technique to integrate the offset pixel aperture (OPA) inside each pixel, the depth information can be acquired using a disparity from OPA patterns. The OPA is classified into two pattern types: Left-offset pixel aperture (LOPA) and right-offset pixel aperture (ROPA). These OPAs are divided into odd and even rows and integrated in a pixel array. To analyze the correlation between the OPA width and the sensor characteristics, experiments were conducted by configuring the test elements group (TEG) regions. The OPA width of the TEG region for the measurement varied in the range of 0.3-0.5 µm. As the aperture width decreased, the disparity of the image increased, while the sensitivity decreased. It is possible to acquire depth information by the disparity obtained from the proposed MONO CIS using the OPA technique without an external light source. Therefore, the proposed MONO CIS with OPA could easily be applied to miniaturized devices. The proposed MONO CIS was designed and manufactured using the 0.11 µm CIS process.

Wide-field off-axis telescope for the Mesospheric Airglow/Aerosol Tomography Spectroscopy satellite.

We present the development of a compact f/7.3 (D=35 mm) three-mirror reflective telescope for the atmospheric-research microsatellite Mesospheric Airglow/Aerosol Tomography Spectroscopy (MATS). The telescope design was driven by the end users' need for a reflective wide-field (5.67°×0.91°) optic with high stray light rejection and six detection channels with separate image sensors, operating at wavelengths 270-772 nm. For the first time, a design method for wide-field off-axis telescopes-in which linear astigmatism is eliminated-was applied and tested in practice. Single-point diamond turning was used to produce two sets of 37-110 mm large free-form aluminum mirrors with surface figure errors and roughness values of 34-62 nm (RMS)/193-497 nm (PV) and 2.8-3.5 nm (RMS), respectively. A method that combines precise machining and geometry measurements (using a coordinate measuring machine) was employed to fabricate an aluminum structure to accurately position the mirrors without the need for manual alignment. The telescope was tested with a network of plate beamsplitters and filters, which define the spectral selection for the six detection channels. Imaging performance measurements were carried out using a reflective off-axis collimator, which projects imaging targets at infinite focus. A modulation transfer function (MTF) value of 0.45 at 20 lp/mm was measured at ∼760 nm (diffraction limit: 0.85) using a slanted edge target. By modeling the measured mirror surfaces in optical design software, a reoptimization of the mirror positions could be performed and an improved MTF of ∼0.75 at 20 lp/mm was predicted. The results demonstrate design- and building methods that can be utilized to make off-axis telescopes for a vast range of applications.

Analysis of Disparity Information for Depth Extraction Using CMOS Image Sensor with Offset Pixel Aperture Technique.

A complementary metal oxide semiconductor (CMOS) image sensor (CIS), using offset pixel aperture (OPA) technique, was designed and fabricated using the 0.11-µm CIS process. In conventional cameras, an aperture is located on the camera lens. However, in a CIS camera using OPA technique, apertures are integrated as left-offset pixel apertures (LOPAs) and right-offset pixel apertures (ROPAs). A color pattern is built, comprising LOPA, blue, red, green, and ROPA pixels. The disparity information can be acquired from the LOPA and ROPA channels. Both disparity information and two-dimensional (2D) color information can be simultaneously acquired from the LOPA, blue, red, green, and ROPA channels. A geometric model of the OPA technique is constructed to estimate the disparity of the image, and the measurement results are compared with the estimated results. Depth extraction is thus achieved by a single CIS using the OPA technique, which can be easily adapted to commercial CIS cameras.

Linear astigmatism of confocal off-axis reflective imaging systems with N-conic mirrors and its elimination.

Linear astigmatism of plane-symmetric confocal off-axis reflective imaging systems with an arbitrary number of conic mirrors is derived. Linear astigmatism, a consequence of tilted astigmatic image planes, is the dominant aberration of this type of imaging system. In this work, the tilt angles of astigmatic image planes are obtained in closed form. An equation to eliminate the linear astigmatism is also derived. The presented theory is verified by examples.

Fabrication of electroless nickel plated aluminum freeform mirror for an infrared off-axis telescope.

Freeform mirrors can be readily fabricated by a single point diamond turning (SPDT) machine. However, this machining process often leaves mid-frequency errors (MFEs) that generate undesirable diffraction effects and stray light. In this work, we propose a novel thin electroless nickel plating procedure to remove MFE on freeform surfaces. The proposed procedure has a distinct advantage over a typical thick plating method in that the machining process can be endlessly repeated until the designed mirror surface is obtained. This is of great importance because the sophisticated surface of a freeform mirror cannot be optimized by a typical SPDT machining process, which can be repeated only several times before the limited thickness of the nickel plating is consumed. We will also describe the baking process of a plated mirror to improve the hardness of the mirror surface, which is crucial for minimizing the degradation of that mirror surface that occurs during the polishing process. During the whole proposed process, the changes in surface figures and textures are monitored and cross checked by two different types of measurements, as well as by an interference pattern test. The experimental results indicate that the proposed thin electroless nickel plating procedure is very simple but powerful for removing MFEs on freeform mirror surfaces.

Linear astigmatism of confocal off-axis reflective imaging systems and its elimination.

Linear astigmatism of a confocal off-axis reflective imaging system when the object plane is tilted and located at a finite distance from the imaging system is derived. We show that linear astigmatism can be eliminated by proper configuration of the parent mirror axes in confocal off-axis two-mirror systems. The tilt angle of the image plane is also derived. The developed theory is verified by ray-tracing analysis of an example system.

Geometrical theory of aberrations near the axis in classical off-axis reflecting telescopes.

A geometrical theory of aberrations for the vicinity of the focus of arbitrary off-axis sections of conic mirrors is derived. It is shown that an off-axis conic mirror introduces linear astigmatism in the image. However, in classical two-mirror telescopes this aberration can be eliminated by tilting the secondary parent mirror axis. It is also shown that the practical geometrical-optics performance of a classical off-axis two-mirror telescope with no linear astigmatism is equivalent to the performance of an on-axis system, proving that both systems have identical third-order coma. To demonstrate the applicability of the theory developed in a practical system, a fast (i.e., f/2), compact, obstruction-free classical off-axis Cassegrain telescope is designed.