Novel Energetic Co-Reactant for Thermal Oxide Atomic Layer Deposition: The Impact of Plasma-Activated Water on Al2O3 Film Growth.

In the presented study, a novel approach for thermal atomic layer deposition (ALD) of Al2O3 thin films using plasma-activated water (PAW) as a co-reactant, replacing traditionally employed deionized (DI) water, is introduced. Utilizing ex situ PAW achieves up to a 16.4% increase in the growth per cycle (GPC) of Al2O3 films, consistent with results from plasma-enhanced atomic layer deposition (PEALD). Time-resolved mass spectrometry (TRMS) revealed disparities in CH4 partial pressures between TMA reactions with DI water and PAW, with PAW demonstrating enhanced reactivity. Reactive oxygen species (ROS), namely H2O2 and O3, are posited to activate Si(100) substrate sites, thereby improving GPC and film quality. Specifically, Al2O3 films grown with PAW pH = 3.1 displayed optimal stoichiometry, reduced carbon content, and an expanded bandgap. This study thus establishes "PAW-ALD" as a descriptor for this ALD variation and highlights the significance of comprehensive assessments of PAW in ALD processes.

Effect of Gliding Arc Plasma Jet on the Mycobiota and Deoxynivalenol Levels in Naturally Contaminated Barley Grains.

Fusarium graminearum and Fusarium meridionale are primary contaminants of barley, capable of producing several mycotoxins, mainly type B trichothecenes and zearalenone. Cold plasma decontamination has been gaining prominence, seeking to control the fungal and mycotoxin contamination of food and feed and to improve product quality. To reach this objective, the present study was divided into two parts. In the first part, F. meridionale and F. graminearum strains were exposed to gliding arc plasma jet (GAPJ). Cell viability tests showed the inactivation of F. meridionale after 15-min treatment, whereas F. graminearum showed to be resistant. In the second part, barley grains were treated by GAPJ for 10, 20, and 30 min, demonstrating a reduction of about 2 log CFU/g of the barley's mycobiota, composed of yeasts, strains belonging to the F. graminearum species complex, Alternaria, and Aspergillus. A decrease in DON levels (up to 89%) was observed after exposure for 20 min. However, an increase in the toxin Deoxynivalenol-3-glucoside (D3G) was observed in barley grains, indicating a conversion of DON to D3G.

Simultaneous Treatment of Both Sides of the Polymer with a Conical-Shaped Atmospheric Pressure Plasma Jet.

A conical-shaped atmospheric pressure plasma jet (CS-APPJ) was developed to overcome a standard limitation of APPJs, which is their small treatment area. The CS-APPJs increase the treatment area but use the same gas flow. In the present work, polypropylene samples were treated by CS-APPJ and characterized by scanning electron microscope (SEM), the contact angle, Fourier-transformed infrared spectroscopy (FTIR), and X-ray photoelectron spectroscopy (XPS). It was observed that the treatment co-occurs on the face directly in contact with the plasma and on the opposite face (OF) of the samples, i.e., no contact. However, the treatment changed the chemical composition on each side; the OF is rougher than the direct contact face (DCF), probably due to the oxygen groups in excess at the DCF and nitrogen in quantity at the OF. Although simultaneous treatment of both sides of the sample occurs for most atmospheric plasma treatments, this phenomenon is not explored in the literature.

Effect of the pH on the Antibacterial Potential and Cytotoxicity of Different Plasma-Activated Liquids.

In this study, different plasma-activated liquids were evaluated for their antimicrobial effects against Escherichia coli, as well as for their cytotoxicity on mammalian cells. The PALs were prepared from distilled (DIS), deionized (DI), filtered (FIL), and tap (TAP) water. Additionally, 0.9% NaCl saline solution (SAL) was plasma-activated. These PALs were prepared using 5 L/min air gliding arc plasma jet for up to 60.0 min of exposure. Subsequently, the physicochemical properties, such as, the oxidation-reduction potential (ORP), the pH, the conductivity, and the total dissolved solids (TDS) were characterized by a water multiparameter. The PALs obtained showed a drastic decrease in the pH with increasing plasma exposure time, in contrast, the conductivity and TDS increased. In a general trend, the UV-vis analyses identified a higher production of the following reactive species of nitrogen and oxygen (RONS), HNO2, H2O2, NO3-, and NO2-. Except for the plasma-activated filtered water (PAW-FIL), where there was a change in the position of NO2- and NO3- at some pHs, The higher production of HNO2 and H2O2-reactive species was observed at a low pH. Finally, the standardized suspensions of Escherichia coli were exposed to PAL for up to 60.0 min. The plasma-activated deionized water (PAW-DI pH 2.5), plasma-activated distilled water (PAW-DIS pH 2.5 and 3), and plasma-activated tap water (PAW-TAP 3.5) showed the best antimicrobial effects at exposure times of 3.0, 10.0, and 30.0 min, respectively. The MTT analysis demonstrated low toxicity of all of the PAL samples. Our results indicate that the plasma activation of different liquids using the gliding arc system can generate specific physicochemical conditions that produce excellent antibacterial effects for E. coli with a safe application, thus bringing future contributions to creating new antimicrobial protocols.

Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching.

The growing need for increasingly miniaturized devices has placed high importance and demands on nanofabrication technologies with high-quality, low temperatures, and low-cost techniques. In the past few years, the development and recent advances in atomic layer deposition (ALD) processes boosted interest in their use in advanced electronic and nano/microelectromechanical systems (NEMS/MEMS) device manufacturing. In this context, non-thermal plasma (NTP) technology has been highlighted because it allowed the ALD technique to expand its process window and the fabrication of several nanomaterials at reduced temperatures, allowing thermosensitive substrates to be covered with good formability and uniformity. In this review article, we comprehensively describe how the NTP changed the ALD universe and expanded it in device fabrication for different applications. We also present an overview of the efforts and developed strategies to gather the NTP and ALD technologies with the consecutive formation of plasma-assisted ALD (PA-ALD) technique, which has been successfully applied in nanofabrication and surface modification. The advantages and limitations currently faced by this technique are presented and discussed. We conclude this review by showing the atomic layer etching (ALE) technique, another development of NTP and ALD junction that has gained more and more attention by allowing significant advancements in plasma-assisted nanofabrication.

Applications of Plasma-Activated Water in Dentistry: A Review.

The activation of water by non-thermal plasma creates a liquid with active constituents referred to as plasma-activated water (PAW). Due to its active constituents, PAW may play an important role in different fields, such as agriculture, the food industry and healthcare. Plasma liquid technology has received attention in recent years due to its versatility and good potential, mainly focused on different health care purposes. This interest has extended to dentistry, since the use of a plasma-liquid technology could bring clinical advantages, compared to direct application of non-thermal atmospheric pressure plasmas (NTAPPs). The aim of this paper is to discuss the applicability of PAW in different areas of dentistry, according to the published literature about NTAPPs and plasma-liquid technology. The direct and indirect application of NTAPPs are presented in the introduction. Posteriorly, the main reactors for generating PAW and its active constituents with a role in biomedical applications are specified, followed by a section that discusses, in detail, the use of PAW as a tool for different oral diseases.

The status and perspectives of nanostructured materials and fabrication processes for wearable piezoresistive sensors.

The wearable sensors have attracted a growing interest in different markets, including health, fitness, gaming, and entertainment, due to their outstanding characteristics of convenience, simplicity, accuracy, speed, and competitive price. The development of different types of wearable sensors was only possible due to advances in smart nanostructured materials with properties to detect changes in temperature, touch, pressure, movement, and humidity. Among the various sensing nanomaterials used in wearable sensors, the piezoresistive type has been extensively investigated and their potential have been demonstrated for different applications. In this review article, the current status and challenges of nanomaterials and fabrication processes for wearable piezoresistive sensors are presented in three parts. The first part focuses on the different types of sensing nanomaterials, namely, zero-dimensional (0D), one-dimensional (1D), two-dimensional (2D), and three-dimensional (3D) piezoresistive nanomaterials. Then, in second part, their fabrication processes and integration are discussed. Finally, the last part presents examples of wearable piezoresistive sensors and their applications.

Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating.

The chemical, structural, morphological, and optical properties of Al-doped TiO2 thin films, called TiO2/Al2O3 nanolaminates, grown by plasma-enhanced atomic layer deposition (PEALD) on p-type Si <100> and commercial SLG glass were discussed. High-quality PEALD TiO2/Al2O3 nanolaminates were produced in the amorphous and crystalline phases. All crystalline nanolaminates have an overabundance of oxygen, while amorphous ones lack oxygen. The superabundance of oxygen on the crystalline film surface was illustrated by a schematic representation that described this phenomenon observed for PEALD TiO2/Al2O3 nanolaminates. The transition from crystalline to amorphous phase increased the surface hardness and the optical gap and decreased the refractive index. Therefore, the doping effect of TiO2 by the insertion of Al2O3 monolayers showed that it is possible to adjust different parameters of the thin-film material and to control, for example, the mobility of the hole-electron pair in the metal-insulator-devices semiconductors, corrosion protection, and optical properties, which are crucial for application in a wide range of technological areas, such as those used to manufacture fluorescence biosensors, photodetectors, and solar cells, among other devices.

Physicochemical Studies on the Surface of Polyamide 6.6 Fabrics Functionalized by DBD Plasmas Operated at Atmospheric and Sub-Atmospheric Pressures.

This work proposes the use of a dielectric barrier discharge (DBD) reactor operating at atmospheric pressure (AP) using air and sub-atmospheric pressure (SAP) using air or argon to treat polyamide 6.6 (PA6.6) fabrics. Here, plasma dosages corresponding to 37.5 kW·min·m-2 for AP and 7.5 kW·min·m-2 for SAP in air or argon were used. The hydrophilicity aging effect property of untreated and DBD-treated PA6.6 samples was evaluated from the apparent contact angle. The surface changes in physical microstructure were studied by field emission scanning electron microscopy (FE-SEM). To prove the changes in chemical functional groups in the fibers, Fourier transform infrared spectroscopy (FTIR) was used, and the change in surface bonds was evaluated by energy dispersive X-ray spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). In addition, the whiteness effect was investigated by the color spectrophotometry (Datacolor) technique. The results showed that the increase in surface roughness by the SAP DBD treatment contributed to a decrease in and maintenance of the hydrophilicity of PA6.6 fabrics for longer. The SAP DBD in air treatment promoted an enhancement of the aging effect with a low plasma dosage (5-fold reduction compared with AP DBD treatment). Finally, the SAP DBD treatment using argon functionalizes the fabric surface more efficiently than DBD treatments in air.

Microwave Synthesis of Silver Sulfide and Silver Nanoparticles: Light and Time Influence.

Silver sulfide (Ag2S) is a low band gap material, which absorbs near-infrared light and is of great importance in areas such as nanotechnology and biomedicine. We report the influence of the starting reagents, synthesis time, and light radiation on the geometry and size of silver sulfide nanoparticles and on the fraction of metallic Ag obtained in a microwave reactor. The X-ray diffraction diffractograms confirmed that Ag2S is the main product if the reaction's precursor contains silver in the oxidation state of +1 and mostly metallic silver (Ag°) when it is +2. Small nanoparticles (∼6 nm) of spherical geometry are present in the transmission electron microscopy images for the synthesis performed with the lamp light ON, while with the light switched OFF, wider and hundreds of nanometers longer particles are observed. This discriminative effect occurs with shorter synthesis time duration (<10 min) but when the time of reaction is extended, the particles coalesce for both light and dark conditions. Overall, it was observed by photoluminescence that crystalline Ag and Ag2S 4-8 nm nanoparticles obtained in 15 min and light irradiation during synthesis have a clear relative increase of the radiative recombination channels of the charged carriers, which are typical of materials characterized by the involvement of low density of states inside the band gap.

MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion.

In this paper, we report the plasma-enhanced atomic layer deposition (PEALD) of TiO2 and TiO2/Al2O3 nanolaminate films on p-Si(100) to fabricate metal-oxide-semiconductor (MOS) capacitors. In the PEALD process, we used titanium tetraisopropoxide (TTIP) as a titanium precursor, trimethyl aluminum (TMA) as an aluminum precursor and O2 plasma as an oxidant, keeping the process temperature at 250 °C. The effects of PEALD process parameters, such as RF power, substrate exposure mode (direct or remote plasma exposure) and Al2O3 partial-monolayer insertion (generating a nanolaminate structure) on the physical and chemical properties of the TiO2 films were investigated by Rutherford backscattering spectroscopy (RBS), Raman spectroscopy, grazing incidence X-ray diffraction (GIXRD), and field emission scanning electron microscopy (FESEM) techniques. The MOS capacitor structures were fabricated by evaporation of Al gates through mechanical mask on PEALD TiO2 thin film, followed by evaporation of an Al layer on the back side of the Si substrate. The capacitors were characterized by current density-voltage (J-V), capacitance-voltage (C-V) and conductance-voltage (G-V) measurements. Our results indicate that RF power and exposure mode promoted significant modifications on the characteristics of the PEALD TiO2 films, while the insertion of Al2O3 partial monolayers allows the synthesis of TiO2/Al2O3 nanolaminate with well-spaced crystalline TiO2 grains in an amorphous structure. The electrical characterization of the MOS structures evidenced a significant leakage current in the accumulation region in the PEALD TiO2 films, which could be reduced by the addition of partial-monolayers of Al2O3 in the bulk of TiO2 films or by reducing RF power.

Structure of hydrophobic ambient-pressure-dried aerogels prepared by sonohydrolysis of tetraethoxysilane with additions of N,N-dimethylformamide.

Silica wet gels with the same silica content were prepared by the sonohydrolysis of tetraethoxysilane (TEOS) with additions of dimethylformamide (DMF). DMF plays a role in the overall hydrolysis/gelification/aging step of the sol-gel process, providing more consolidated wet gels with larger syneresis degrees and densities. The structure of the as-obtained wet gels can be interpreted as being built up of mass-fractal domains with fractal dimension D = 2.2 and radius of gyration decreasing from about 14 to 12 nm with increasing quantity of DMF. Monolithic hydrophobic aerogels were prepared after washing of the wet gels with isopropyl alcohol (IPA), silylation with trimethylchrorosilane (TMCS), and ambient-pressure drying (APD). The specific surface area of the APD aerogels was found to be about 900 m(2)/g, and the mean silica particle size was about 2.0 nm, approximately independent of the DMF quantity, whereas the porosity decreased slightly with increasing amount of DMF, fairly accompanying the behavior of the radius of gyration of the precursor wet gels. The mass-fractal characteristics were preserved in the APD aerogels, but the radius of gyration of the mass-fractal domains was reduced to values between 2.8 to 4.0 nm, with the values decreasing slightly with the DMF quantity, and the fractal domains developed a surface-mass-fractal structure with the overall washing/silylation/APD treatment. The structural characteristics of the APD aerogels as determined by SAXS were found to be in notable agreement with those inferred from nitrogen adsorption.