Tunable terahertz absorption of ion gel-graphene hybrids based on the Salisbury effect.

The gate-tunable absorption properties of graphene make it suitable for terahertz (THz) absorbers. However, the realization of a graphene-based THz absorber faces challenges between the difficulty of patterning graphene for processing and the intrinsically low absorbance of graphene with the high electric field needed to change the conductivity of graphene. This report presents an electrically tunable graphene THz absorber where a single-layer graphene film and a gold reflective layer are separated by a polyimide (PI) dielectric layer to form an easily fabricated three-layer Salisbury screen structure. The carrier density of the graphene layer can be efficiently tuned by a small external electrical gating (-5V-5 V) with the assistance of an ion gel layer. The voltage modulation of the Fermi energy level (EF) of graphene was confirmed by Raman spectra, and the variation of the device absorbance was confirmed using a THz time-domain spectroscopy system (THz-TDS). The measurements show that the EF is adjusted in the range of 0-0.5 eV, and THz absorbance is adjusted in the range of 60%-99%. The absorber performs well under different curvatures, and the peak absorbance is all over 95%. We conducted further analysis of the absorber absorbance by varying the thickness of the PI dielectric layer, aiming to examine the correlation between the resonant frequency of the absorber and the dielectric layer thickness. Our research findings indicate that the proposed absorber holds significant potential for application in diverse fields such as communication, medicine, and sensing.

Enhancing the electric charge output in LiNbO3-based piezoelectric pressure sensors.

Lithium niobate (LiNbO3) single crystals are a kind of ferroelectric material with a high piezoelectric coefficient and Curie temperature, which is suitable for the preparation of piezoelectric pressure sensors. However, there is little research reporting on the use of LiNbO3 single crystals to prepare piezoelectric pressure sensors. Therefore, in this paper, LiNbO3 was used to prepare piezoelectric pressure sensors to study the feasibility of using LiNbO3 single crystals as a sensitive material for piezoelectric pressure sensors. In addition, chemical mechanical polishing (CMP) technology was used to prepare LiNbO3 crystals with different thicknesses to study the influence of these LiNbO3 crystals on the electric charge output of the sensors. The results showed that the sensitivity of a 300 µm sample (0.218 mV kPa-1) was about 1.23 times that of a 500 µm sample (0.160 mV kPa-1). Low-temperature polymer heterogeneous integration and oxygen plasma activation technologies were used to realize the heterogeneous integration of LiNbO3 and silicon to prepare piezoelectric pressure sensors, which could significantly improve the sensitivity of the sensor by approximately 16.06 times (2.569 mV kPa-1) that of the original sample (0.160 mV kPa-1) due to an appropriate residual stress that did not shatter LiNbO3 or silicon, thus providing a possible method for integrating piezoelectric pressure sensors and integrated circuits.

Robust Energy Storage Property of La-Doped PZT Films Within a Wide Temperature Range.

Antiferroelectric (AFE) films have received a lot of attention for their high energy storage density and temperature stability, giving them potential in electrostatic energy storage devices. In this work, La-doped PZT AFE films were prepared through a sol-gel procedure, and energy storage properties within a wide temperature range (73-533 K) were explored. Typical dipoles rotate in one direction along electric fields, combined with phase transition behavior. The polarization behavior is modulated by both electric field and temperature. With increasing temperature, the saturation polarization strength decreases due to the phase transition from the AFE state to the ferroelectric state. Besides, the temperature dependence of electrical properties was investigated, and the energy storage density of Pb0.97La0.02(Zr0.95Ti0.05)O3 films was about 5.84 J/cm3 in the low temperature range (<273.15 K). All results indicate the great potential of AFE films in pulse power device applications, especially in low-temperature ranges.

Robust global arrangement by coherent enhancement in Huygens-Fresnel traveling surface acoustic wave interference field.

The application of standing surface acoustic wave (SSAW) tweezers based on backpropagation superposition to achieve precise behavior manipulation of microscale cells and even nanoscale bacteria has been widely studied and industrialized. However, the structure requires multiple transducer components or full channel resonance. It is very challenging to design a simple structure for nano-control by complex acoustic field. In this study, a reflector-interdigital transducer (R-IDT) acoustofluidic device based on unilateral coherence enhancement is proposed to achieve SSAW definition features of periodic particle capture positions. The SAW device based on a unilateral transducer can not only generate leaky-SAW in water-filled microchannel, but also have a contribution of spherical waves in the vibration area of the substrate-liquid interface due to the Huygens-Fresnel diffractive principle. Both of them form a robust time-averaged spatial periodicity in the pressure potential gradient, accurately predicting the lateral spacing of these positions through acoustic patterning methods. Furthermore, a reflector based on Bragg-reflection is used to suppress backward transmitted SAW and enhance forward conducted SAW beams. By using a finite element model, R-IDT structure's amplitude enhances 60.78% compared to single IDT structure. The particle manipulation range of the diffractive acoustic field greatly improves, verified by experimental polystyrene microspheres. Besides, biocompatibility is conformed through red blood cells and Bacillus subtilis. We investigate the overall shift of periodic pressure field that can still occur when the phase changes. This work provides a simpler and low-cost solution for the application of acoustic tweezer in biological cell culture and filtering.

Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams.

In micron or nano smart sensing systems, piezoelectric cantilever beams are distributed as major components in microsensors, actuators, and energy harvesters. This paper investigates the performance of four cantilever beam devices with "electric-force" conversion based on the inverse piezoelectric effect of lithium niobate (LiNbO3, LN) single-crystal materials. A new compact piezoelectric smart device model is proposed, designed as a single mass block connected by four beams, where devices exhibit smaller lateral errors (0.39-0.41%). The relationship between the displacement characteristics of cantilever beams and driving voltage was researched by applying excitation signals. The results show that the device has the maximum displacement at a first-order intrinsic frequency (fosc = 11.338 kHz), while the displacement shows a good linear relationship (R2 = 0.998) with driving voltage. The square wave signals of the same amplitude have greater "electrical-force" conversion efficiency. The output displacement can reach 12 nm, which is much higher than the output displacement with sinusoidal excitation. In addition, the relative displacement deviation of devices can be maintained within ±1% under multiple cycles of electrical signal loading. The small size, high reliability, and ultra-stability of Si-LN ferroelectric single-crystal cantilever beam devices with lower vibration amplitudes are promising for nanopositioning techniques in microscopy, diagnostics, and high-precision manufacturing applications.

Hybrid Pressure Sensor Based on Carbon Nano-Onions and Hierarchical Microstructures with Synergistic Enhancement Mechanism for Multi-Parameter Sleep Monitoring.

With the existing pressure sensors, it is difficult to achieve the unification of wide pressure response range and high sensitivity. Furthermore, the preparation of pressure sensors with excellent performance for sleep health monitoring has become a research difficulty. In this paper, based on material and microstructure synergistic enhancement mechanism, a hybrid pressure sensor (HPS) integrating triboelectric pressure sensor (TPS) and piezoelectric pressure sensor (PPS) is proposed. For the TPS, a simple, low-cost, and structurally controllable microstructure preparation method is proposed in order to investigate the effect of carbon nano-onions (CNOs) and hierarchical composite microstructures on the electrical properties of CNOs@Ecoflex. The PPS is used to broaden the pressure response range and reduce the pressure detection limit of HPS. It has been experimentally demonstrated that the HPS has a high sensitivity of 2.46 V/104 Pa (50-600 kPa) and a wide response range of up to 1200 kPa. Moreover, the HPS has a low detection limit (10 kPa), a high stability (over 100,000 cycles), and a fast response time. The sleep monitoring system constructed based on HPS shows remarkable performance in breathing state recognition and sleeping posture supervisory control, which will exhibit enormous potential in areas such as sleep health monitoring and potential disease prediction.

Ultra-Narrow Bandwidth Microwave Photonic Filter Implemented by Single Longitudinal Mode Parity Time Symmetry Brillouin Fiber Laser.

In this paper, a novel microwave photonic filter (MPF) based on a single longitudinal mode Brillouin laser achieved by parity time (PT) symmetry mode selection is proposed, and its unparalleled ultra-narrow bandwidth as low as to sub-kHz together with simple and agile tuning performance is experimentally verified. The Brillouin fiber laser ring resonator is cascaded with a PT symmetric system to achieve this MPF. Wherein, the Brillouin laser resonator is excited by a 5 km single mode fiber to generate Brillouin gain, and the PT symmetric system is configured with Polarization Beam Splitter (PBS) and polarization controller (PC) to achieve PT symmetry. Thanks to the significant enhancement of the gain difference between the main mode and the edge mode when the polarization state PT symmetry system breaks, a single mode oscillating Brillouin laser is generated. Through the selective amplification of sideband modulated signals by ultra-narrow linewidth Brillouin single mode laser gain, the MPF with ultra-narrow single passband performance is obtained. By simply tuning the central wavelength of the stimulated Brillouin scattering (SBS) pumped laser to adjust the Brillouin oscillation frequency, the gain position of the Brillouin laser can be shifted, thereby achieving flexible tunability. The experimental results indicate that the MPF proposed in this paper achieves a single pass band narrow to 72 Hz and the side mode rejection ratio of more than 18 dB, with a center frequency tuning range of 0-20 GHz in the testing range of vector network analysis, which means that the MPF possesses ultra high spectral resolution and enormous potential application value in the domain of ultra fine microwave spectrum filtering such as radar imaging and electronic countermeasures.

Dual-ring parity-time symmetric brillouin fiber laser with an unbalanced polarization Mach-Zehnder interferometer.

A dual-ring parity-time (PT) symmetric Brillouin fiber laser (BFL) with an unbalanced polarization Mach-Zehnder interferometer (UP-MZI) is proposed and experimentally investigated. An UP-MZI consisting of optical coupler, polarization beam combiner (PBC) and two asymmetric length arms with 10 km and 100 m single-mode fiber, is used to achieve Vernier effect and PT symmetry. Due to the orthogonally polarized lights created in the PBC, the dual-ring PT symmetry BFL with an UP-MZI implements two unbalanced length feedback rings that are connected to one another, one long length ring with a Brillouin gain and the other short length ring with a loss of the same magnitude, to break a PT symmetric and maintain the Vernier effect. By contrast with existing PT symmetry BFL studies, this design does not require same lengths of the gain and loss loops, but can manipulate freely PT symmetry status in accordance with a rational scaling factor between them. Experimental results reveal that the 3-dB linewidth of dual-ring PT symmetry BFL with an UP-MZI is about 4.85 Hz with the threshold input power of 9.5 mW, in accordance with the 97 Hz measured linewidth at the -20 dB power point. Within 60 mins of the stability experiment, the power and frequency stability fluctuation are ±0.02 dB and ±0.137 kHz, respectively. Thanks to the two asymmetric ring lengths, the sidemode suppression ratio (SMSR) is optimized by 54 dB compared to that with the only long ring structure, 26 dB when using only the Vernier effect or 12 dB for existing PT symmetry BFL. This BFL design with single longitudinal mode and high SMSR output can be applied to high coherent communication and Brillouin-based microwave photonics systems with low phase noise.

Multilayer graphene-enabled structure based on Salisbury shielding effect for high-performance terahertz absorption.

Sandwich-type structure based on Salisbury screen effect is a simple and effective strategy to acquire high-performance terahertz (THz) absorption. The number of sandwich layer is the key factor that affects the absorption bandwidth and intensity of THz wave. Traditional metal/insulant/metal (M/I/M) absorber is difficult to construct multilayer structure because of low light transmittance of the surface metal film. Graphene exhibits huge advantages including broadband light absorption, low sheet resistance and high optical transparency, which are useful for high-quality THz absorber. In this work, we proposed a series of multilayer metal/PI/graphene (M/PI/G) absorber based on graphene Salisbury shielding. Numerical simulation and experimental demonstration were provided to explain the mechanism of graphene as resistive film for strong electric field. And it is important to improve the overall absorption performance of the absorber. In addition, the number of resonance peaks is found to increase by increasing the thickness of the dielectric layer in this experiment. The absorption broadband of our device is around 160%, greater than those previously reported THz absorber. Finally, this experiment successfully prepared the absorber on a polyethylene terephthalate (PET) substrate. The absorber has high practical feasibility and can be easily integrated with the semiconductor technology to make high efficient THz-oriented devices.

An ultra-compact acoustofluidic device based on the narrow-path travelling surface acoustic wave (np-TSAW) for label-free isolation of living circulating tumor cells.

Obtaining highly purified intact living cells from complex environments has been a challenge, such as the isolation of circulating tumor cells (CTCs) from blood. In this work, we demonstrated an acoustic-based ultra-compact device for cell sorting, with a chip size of less than 2 × 1.5 cm2. This single actuator device allows non-invasive and label-free isolation of living cells, offering greater flexibility and applicability. The device performance was optimized with different-sized polystyrene (PS) particles and blood cells spiked with cancer cells. Using the narrow-path travelling surface acoustic wave (np-TSAW), precise isolation of 10 µm particles from a complex mixture of particles (5, 10, 20 µm) and separation of 8 µm and 10 µm particles was achieved. The purified collection of 10 µm particles with high separation efficiency (98.75%) and high purity (98.1%) was achieved by optimizing the input voltage. Further, we investigated the isolation and purification of CTCs (MCF-7, human breast cancer cells) from blood cells with isolation efficiency exceeding 98% and purity reaching 93%. Viabilities of the CTCs harvested from target-outlet were all higher than 97% after culturing for 24, 48, and 72 h, showing good proliferation ability. This novel ultra-miniaturized microfluidic chip demonstrates the ability to sorting cells with high-purity and label-free, providing an attractive miniaturized system alternative to traditional sorting methods.

Nanoelectromechanical Temperature Sensor Based on Piezoresistive Properties of Suspended Graphene Film.

The substrate impurities scattering will lead to unstable temperature-sensitive behavior and poor linearity in graphene temperature sensors. And this can be weakened by suspending the graphene structure. Herein, we report a graphene temperature sensing structure, with suspended graphene membranes fabricated on the cavity and non-cavity SiO2/Si substrate, using monolayer, few-layer, and multilayer graphene. The results show that the sensor provides direct electrical readout from temperature to resistance transduction by the nano piezoresistive effect in graphene. And the cavity structure can weaken the substrate impurity scattering and thermal resistance effect, which results in better sensitivity and wide-range temperature sensing. In addition, monolayer graphene is almost no temperature sensitivity. And the few-layer graphene temperature sensitivity, lower than that of the multilayer graphene cavity structure (3.50%/°C), is 1.07%/°C. This work demonstrates that piezoresistive in suspended graphene membranes can effectively enhance the sensitivity and widen the temperature sensor range in NEMS temperature sensors.

Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer.

Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acoustic wireless communication systems. The ongoing demand for high-performance and adjustable PMUTs has inspired the idea of manipulating PMUTs by voltage. Here, PMUTs based on AlN thin films protected by a SiO2 layer of 200 nm were fabricated using a standard MEMS process with a resonant frequency of 505.94 kHz, a -6 dB bandwidth (BW) of 6.59 kHz, and an electromechanical coupling coefficient of 0.97%. A modification of 4.08 kHz for the resonant frequency and a bandwidth enlargement of 60.2% could be obtained when a DC bias voltage of -30 to 30 V was applied, corresponding to a maximum resonant frequency sensitivity of 83 Hz/V, which was attributed to the stress on the surface of the piezoelectric film induced by the external DC bias. These findings provide the possibility of receiving ultrasonic signals within a wider frequency range, which will play an important role in underwater three-dimensional imaging and nondestructive testing.

A Novel Detachable, Reusable, and Versatile Acoustic Tweezer Manipulation Platform for Biochemical Analysis and Detection Systems.

Multifunctional, integrated, and reusable operating platforms are highly sought after in biochemical analysis and detection systems. In this study, we demonstrated a novel detachable, reusable acoustic tweezer manipulation platform that is flexible and versatile. The free interchangeability of different detachable microchannel devices on the acoustic tweezer platform was achieved by adding a waveguide layer (glass) and a coupling layer (polydimethylsiloxane (PDMS) polymer film). We designed and demonstrated the detachable multifunctional acoustic tweezer platform with three cell manipulation capabilities. In Demo I, the detachable acoustic tweezer platform is demonstrated to have the capability for parallel processing and enrichment of the sample. In Demo II, the detachable acoustic tweezer platform with capability for precise cell alignment is demonstrated. In Demo III, it was demonstrated that the detachable acoustic tweezer platform has the capability for the separation and purification of cells. Through experiments, our acoustic tweezer platform has good acoustic retention ability, reusability, and stability. More capabilities can be expanded in the future. It provides a simple, economical, and multifunctional reusable operating platform solution for biochemical analysis and detection systems.

Narrow linewidth parity-time symmetric Brillouin fiber laser based on a dual-polarization cavity with a single micro-ring resonator.

A narrow linewidth parity-time (PT) symmetric Brillouin fiber laser (BFL) based on dual-polarization cavity (DPC) with single micro-ring resonator (MRR) is proposed and experimentally investigated. A 10 km single-mode fiber provides SBS gain, while a DPC consisting of optical coupler, polarization beam combiner and a MRR, is used to achieve PT symmetry. Due to the reciprocity of light propagation in the MRR, the PT symmetry BFL based on DPC implements two identical feedback loops that are connected to one another, one with a Brillouin gain coefficient and the other with a loss coefficient of the same magnitude, to break a PT symmetric. Compared with existing BFL studies, this design does not call for frequency matching of compound cavities structures or without ultra-narrow bandwidth bandpass filters. In the experiment, the 3-dB linewidth of PT symmetry BFL based on DPC with single MRR is 11.95 Hz with the threshold input power of 2.5 mW, according to the measured linewidth of 239 Hz at the -20 dB power point. And a 40 dB maximum mode suppression ratio are measured. Furthermore, the PT symmetry BFL's wavelength is tuned between 1549.60 and 1550.73 nm. This design with single longitudinal mode output can be applied to high coherent communication systems.

Facilitated Photocatalytic Degradation of Rhodamine B over One-Step Synthesized Honeycomb-Like BiFeO3/g-C3N4 Catalyst.

In the present work, a facile one-step methodology was used to synthesize honeycomb-like BiFeO3/g-C3N4 composites, where the well-dispersed BiFeO3 strongly interacted with the hg-C3N4. The 10BiFeO3/hg-C3N4 could completely degrade RhB under visible light illumination within 60 min. The degradation rate constant was remarkably improved and approximately three times and seven times that of pristine hg-C3N4 and BiFeO3, respectively. This is ascribed to the following factors: (1) the unique honeycomb-like morphology facilitates the diffusion of the reactants and effectively improves the utilization of light energy by multiple reflections of light; (2) the charged dye molecules can be tightly bound to the spontaneous polarized BiFeO3 surface to form the Stern layer; (3) the Z-scheme heterojunction and the ferroelectric synergistically promoted the efficient separation and migration of the photogenerated charges. This method can synchronously tune the micro-nano structure, surface property, and internal field construction for g-C3N4-based photocatalysts, exhibiting outstanding potential in environmental purification.

Modulation of graphene THz absorption based on HAuCl4 doping method.

Graphene is an attractive material for terahertz (THz) absorbers because of its tunable Fermi-Level (EF). It has become a research hotspot to modulate the EF of graphene and THz absorption of graphene. Here, a sandwich-structured single layer graphene (SLG)/ Polyimide (PI)/Au THz absorber was proposed, and top-layer graphene was doped by HAuCl4 solutions. The EF of graphene was shifted by HAuCl4 doping, which was characterized by scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), and Raman tests. The results showed that the EF is shifted about 0.42 eV under 100 mM HAuCl4 doping, the sheet resistance is reduced from 1065 Ω/sq (undoped) to 375 Ω/sq (100 mM). The corresponding absorbance was increased from 40% to 80% at 0.65 THz and increased from 50% to 90% at 2.0 THz under 100 mM HAuCl4 doping. Detailed studies showed that the absorption came from a sandwich structure that meets the impedance matching requirements and provided a thin resonant cavity to capture the incident THz waves. In addition, not only the absorber can be prepared simply, but its results in experiments and simulations agree as well. The proposed device can be applied to electromagnetic shielding and imaging, and the proposed method can be applied to prepare other graphene-based devices.

Enhanced Detection in Droplet Microfluidics by Acoustic Vortex Modulation of Particle Rings and Particle Clusters via Asymmetric Propagation of Surface Acoustic Waves.

As a basis for biometric and chemical analysis, issues of how to dilute or concentrate substances such as particles or cells to specific concentrations have long been of interest to researchers. In this study, travelling surface acoustic wave (TSAW)-based devices with three frequencies (99.1, 48.8, 20.4 MHz) have been used to capture the suspended Polystyrene (PS) microspheres of various sizes (5, 20, 40 µm) in sessile droplets, which are controlled by acoustic field-induced fluid vortex (acoustic vortex) and aggregate into clusters or rings with particles. These phenomena can be explained by the interaction of three forces, which are drag force caused by ASF, ARF caused by Leaky-SAW and varying centrifugal force. Eventually, a novel approach of free transition between the particle ring and cluster was approached via modulating the acoustic amplitude of TSAW. By this method, multilayer particles agglomerate with 20 µm wrapped around 40 µm and 20 µm wrapped around 5 µm can be obtained, which provides the possibility to dilute or concentrate the particles to a specific concentration.

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal.

The seeking of resonator with high Q and low insertion loss is attractive for critical sensing scenes based on the surface acoustic wave (SAW). In this work, 128° YX LiNbO3-based SAW resonators were utilized to optimize the output performance through IDT structure parameters. Once the pairs of IDTs, the acoustic aperture, the reflecting grid logarithm, and the gap between IDT and reflector are changed, a better resonance frequency of 224.85 MHz and a high Q of 1364.5 were obtained. All the results demonstrate the structure parameters design is helpful for the performance enhancement with regard to SAW resonators, especially for designing and fabricating high-Q devices.

Synergistic Enhancement Properties of a Flexible Integrated PAN/PVDF Piezoelectric Sensor for Human Posture Recognition.

The flexible pressure sensor has attracted much attention due to its wearable and conformal advantage. All the same, enhancing its electrical and structural properties is still a huge challenge. Herein, a flexible integrated pressure sensor (FIPS) composed of a solid silicone rubber matrix, composited with piezoelectric powers of polyacrylonitrile/Polyvinylidene fluoride (PAN/PVDF) and conductive silver-coated glass microspheres is first proposed. Specifically, the mass ratio of the PAN/PVDF and the rubber is up to 4:5 after mechanical mixing. The output voltage of the sensor with composite PAN/PVDF reaches 49 V, which is 2.57 and 3.06 times that with the single components, PAN and PVDF, respectively. In the range from 0 to 800 kPa, its linearity of voltage and current are all close to 0.986. Meanwhile, the sensor retains high voltage and current sensitivities of 42 mV/kPa and 0.174 nA/kPa, respectively. Furthermore, the minimum response time is 43 ms at a frequency range of 1-2.5 Hz in different postures, and the stability is verified over 10,000 cycles. In practical measurements, the designed FIPS showed excellent recognition abilities for various gaits and different bending degrees of fingers. This work provides a novel strategy to improve the flexible pressure sensor, and demonstrates an attractive potential in terms of human health and motion monitoring.

High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO3 Single-Crystal Cantilever Beams.

It is a great challenge to detect in-situ high-frequency vibration signals for extreme environment applications. A highly sensitive and robust vibration sensor is desired. Among the many piezoelectric materials, single-crystal lithium niobate (LiNbO3) could be a good candidate to meet the demand. In this work, a novel type of micro-electro-mechanical system (MEMS) vibration sensor based on a single crystalline LiNbO3 thin film is demonstrated. Firstly, the four-cantilever-beam MEMS vibration sensor was designed and optimized with the parametric method. The structural dependence on the intrinsic frequency and maximum stress was obtained. Then, the vibration sensor was fabricated using standard MEMS processes. The practical intrinsic frequency of the as-presented vibration sensor was 5.175 kHz, which was close to the calculated and simulated frequency. The dynamic performance of the vibration sensor was tested on a vibration platform after the packaging of the printed circuit board. The effect of acceleration was investigated, and it was observed that the output charge was proportional to the amplitude of the acceleration. As the loading acceleration amplitude is 10 g and the frequency is in the range of 20 to 2400 Hz, the output charge amplitude basically remains stable for the frequency range from 100 Hz to 1400 Hz, but there is a dramatic decrease around 1400 to 2200 Hz, and then it increases significantly. This should be attributed to the significant variation of the damping coefficient near 1800 Hz. Meanwhile, the effect of the temperature on the output was studied. The results show the nearly linear dependence of the output charge on the temperature. The presented MEMS vibration sensors were endowed with a high output performance, linear dependence and stable sensitivity, and could find potential applications for the detection of wide-band high-frequency vibration.