Imaging Nanomechanical Vibrations and Manipulating Parametric Mode Coupling via Scanning Microwave Microscopy.

In this study, we present a novel platform based on scanning microwave microscopy for manipulating and detecting tiny vibrations of nanoelectromechanical resonators using a single metallic tip. The tip is placed on the top of a grounded silicon nitride membrane, acting as a movable top gate of the coupled resonator. We demonstrate its ability to map mechanical modes and investigate mechanical damping effects in a capacitive coupling scheme, based on its spatial resolution. We also manipulate the energy transfer coherently between the mode of the scanning tip and the underlying silicon nitride membrane, via parametric coupling. Typical features of optomechanics, such as anti-damping and electromechanically induced transparency, have been observed. Since the microwave optomechanical technology is fully compatible with quantum electronics and very low temperature conditions, it should provide a powerful tool for studying phonon tunnelling between two spatially separated vibrating elements, which could potentially be applied to quantum sensing.

Coupling Capacitively Distinct Mechanical Resonators for Room-Temperature Phonon-Cavity Electromechanics.

Coupled electromechanical resonators that can be independently driven/detected and easily integrated with external circuits are essential for exploring mechanical modes based signal processing and multifunctional integration. One of the main challenges lies in controlling energy transfers between distinct resonators experiencing nanoscale displacements. Here, we present a room temperature electromechanical system that mimics a "phonon-cavity", in analogy with optomechanics. It consists in a silicon nitride membrane capacitively coupled to an aluminum drum-head resonator. We demonstrate electromechanically induced transparency and amplification through manipulating the mechanical displacements of this coupled system, creating interferences in the measured signal. The anti-damping effects, generated by phonon-cavity force, have been observed in both movable objects. We develop an analytical model that captures the analoguous optomechanical features in the classical limit and enables to fit quantitatively the measurements. Our results open up new possibilities for building compact and multifunctional mechanical systems, and exploring phonon-phonon coupling based optomechanics.

Experimental evaluation of thermal rectification in a ballistic nanobeam with asymmetric mass gradient.

Practical applications of heat transport control with artificial metamaterials will heavily depend on the realization of thermal diodes/rectifiers, in which thermal conductivity depends on the heat flux direction. Whereas various macroscale implementations have been made experimentally, nanoscales realizations remain challenging and efficient rectification still requires a better fundamental understanding of heat carriers' transport and nonlinear mechanisms. Here, we propose an experimental realization of a thermal rectifier based on two leads with asymmetric mass gradients separated by a ballistic spacer, as proposed in a recent numerical investigation, and measure its thermal properties electrically with the microbridge technique. We use a Si[Formula: see text]N[Formula: see text] nanobeam on which an asymmetric mass gradient has been engineered and demonstrate that in its current form, this structure does not allow for thermal rectification. We explain this by a combination of too weak asymmetry and non-linearities. Our experimental observations provide important information towards fabricating rigorous thermal rectifiers in the ballistic phonon transport regime, which are expected to open new possibilities for applications in thermal management and quantum thermal devices.

Superconducting aluminum heat switch with 3 nΩ equivalent resistance.

Superconducting heat switches with extremely low normal state resistances are needed for constructing continuous nuclear demagnetization refrigerators with high cooling power. Aluminum is a suitable superconductor for the heat switch because of its high Debye temperature and its commercial availability in high purity. We have constructed a high quality Al heat switch whose design is significantly different than that of previous heat switches. In order to join the Al to Cu with low contact resistance, we plasma etched the Al to remove its oxide layer and then immediately deposited Au without breaking the vacuum of the e-beam evaporator. In the normal state of the heat switch, we measured a thermal conductance of 8T W/K2, which is equivalent to an electrical resistance of 3 nΩ according to the Wiedemann-Franz law. In the superconducting state, we measured a thermal conductance that is 2 × 106 times lower than that of the normal state at 50 mK.

High-Q Silicon Nitride Drum Resonators Strongly Coupled to Gates.

Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling to an electrical circuit for efficient on-chip integration. Here, we present a SiN drum resonator covered with an aluminum thin film, enabling large capacitive coupling to a suspended top-gate. Implementing the full electrical measurement scheme, we demonstrate a high quality factor ∼104 (comparable to that of bare drums at room temperature) and present our ability to detect ∼10 mechanical modes at low temperature. The drum resonator is also coupled to a microwave cavity, so that we can perform optomechanical sideband pumping with a fairly good coupling strength G and demonstrate mechanical parametric amplification. This SiN drum resonator design provides efficient electrical integration and exhibits promising features for exploring mode coupling and signal processing.

Heat conduction measurements in ballistic 1D phonon waveguides indicate breakdown of the thermal conductance quantization.

Emerging quantum technologies require mastering thermal management, especially at the nanoscale. It is now accepted that thermal metamaterial-based phonon manipulation is possible, especially at sub-kelvin temperatures. In these extreme limits of low temperatures and dimensions, heat conduction enters a quantum regime where phonon exchange obeys the Landauer formalism. Phonon transport is then governed by the transmission coefficients between the ballistic conductor and the thermal reservoirs. Here we report on ultra-sensitive thermal experiments made on ballistic 1D phonon conductors using a micro-platform suspended sensor. Our thermal conductance measurements attain a power sensitivity of 15 attoWatts [Formula: see text] around 100 mK. Ballistic thermal transport is dominated by non-ideal transmission coefficients and not by the quantized thermal conductance of the nanowire itself. This limitation of heat transport in the quantum regime may have a significant impact on modern thermal management and thermal circuit design.

Measuring Frequency Fluctuations in Nonlinear Nanomechanical Resonators.

Advances in nanomechanics within recent years have demonstrated an always expanding range of devices, from top-down structures to appealing bottom-up MoS2 and graphene membranes, used for both sensing and component-oriented applications. One of the main concerns in all of these devices is frequency noise, which ultimately limits their applicability. This issue has attracted a lot of attention recently, and the origin of this noise remains elusive to date. In this article we present a very simple technique to measure frequency noise in nonlinear mechanical devices, based on the presence of bistability. It is illustrated on silicon-nitride high-stress doubly clamped beams, in a cryogenic environment. We report on the same T/ f dependence of the frequency noise power spectra as reported in the literature. But we also find unexpected damping fluctuations, amplified in the vicinity of the bifurcation points; this effect is clearly distinct from already reported nonlinear dephasing and poses a fundamental limit on the measurement of bifurcation frequencies. The technique is further applied to the measurement of frequency noise as a function of mode number, within the same device. The relative frequency noise for the fundamental flexure δ f/ f0 lies in the range 0.5-0.01 ppm (consistent with the literature for cryogenic MHz devices) and decreases with mode number in the range studied. The technique can be applied to any type of nanomechanical structure, enabling progress toward the understanding of intrinsic sources of noise in these devices.

Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3ω-Völklein method.

We present a specific heat measurement technique adapted to thin or very thin suspended membranes from low temperature (8 K) to 300 K. The presented device allows the measurement of the heat capacity of a 70 ng silicon nitride membrane (50 or 100 nm thick), corresponding to a heat capacity of 1.4 × 10(-10) J/K at 8 K and 5.1 × 10(-8) J/K at 300 K. Measurements are performed using the 3ω method coupled to the Völklein geometry. This configuration allows the measurement of both specific heat and thermal conductivity within the same experiment. A transducer (heater/thermometer) is used to create an oscillation of the heat flux on the membrane; the voltage oscillation appearing at the third harmonic which contains the thermal information is measured using a Wheatstone bridge set-up. The heat capacity measurement is performed by measuring the variation of the 3ω voltage over a wide frequency range and by fitting the experimental data using a thermal model adapted to the heat transfer across the membrane. The experimental data are compared to a regular Debye model; the specific heat exhibits features commonly seen for glasses at low temperature.