Optical path optimization of chromatic line confocal displacement sensor for high resolution and wide range.

This study introduces the optical path-optimized dual-grating chromatic line confocal imaging (DG-LCI) technique for high-resolution and wide-range surface topography measurements. Chromatic line confocal imaging (LCI) finds extensive applications in high-speed 3D imaging of surface morphology, roughness analysis in industrial production, and quality inspection. A key advantage of LCI is its ability to achieve a large depth of focus, enabling the imaging system to measure a wide range in the Z direction. However, the challenge lies in the trade-off between the measurement range and resolution. Increasing the measurement range reduces the resolution, making it unsuitable for precise measurements required in industrial processing. Conversely, enhancing the resolution limits the measurement range, thereby sacrificing the advantage of LCI systems' broad measurement capabilities. Addressing this limitation, we propose a dual optical path dual-grating structure using a simplified and ingenious optical path optimization design. This design overcomes the challenge of sacrificing the millimeter-level measurement range while simultaneously improving the resolution. Rigorous simulations and experiments validate the effectiveness and validity of our proposed method.

Improved calibration method of a four-quadrant detector based on Bayesian theory in a laser auto-collimation measurement system.

Reliable and accurate calibration for a four-quadrant detector (QD) is a prerequisite for high-accuracy laser auto-collimation measurements. However, the calibration accuracy is limited largely by the non-linearity of QD, especially for large-range detection. To address this issue, an improved calibration method of QD based on Bayesian theory in laser auto-collimation measurement is proposed in this paper. First, the non-linearity problem of QD is analyzed, and for accurate calibration of QD, a high-precision identification model based on Bayesian theory is presented. An analytical expression between the output signal of QD and the position of the laser spot is established, and then a calibration system with laser drift compensation to avoid influences from the laser source as a datum is constructed. A series of experiments is conducted to verify the performance of the improved calibration method. The results reveal that the improved method can effectively enhance the calibration accuracy of QD and reduce the residuals in root mean square error by 86% compared to the 15-order polynomial fitting over a detection range of ±1mm. The comparison experiments also demonstrate that the proposed calibration method has advantages over the conventional method in terms of accuracy and robustness.

Crosstalk decoupling measurement method to determine the six degrees of freedom of motion error of linear stages.

The simultaneous measurement of all six degrees of freedom of motion error for a linear stage is significantly faster than methods that measure each degree of freedom separately. However, in current simultaneous measurement methods, error crosstalk issues significantly affect measurement accuracy. In this paper, a direct and simple crosstalk decoupling simultaneous measurement method to determine the six degrees of freedom of motion error of a linear stage is proposed. Based on the combination of single-frequency laser interferometry and laser self-collimation, a novel, to the best of our knowledge, optical configuration with a complete error decoupling relationship is designed, and a mathematical model is derived for error decoupling to address the crosstalk issue. A prototype system based on the new method is developed, and experiments are conducted to verify its effectiveness. Analysis shows that, compared with a commercial laser interferometer for linear stage measurement, the deviations of the positioning, horizontal straightness, vertical straightness, roll, pitch, and yaw errors are±0.50µm, ±0.58µm, ±0.50µm, ±1.02in., ±0.72in., and ±0.87in. respectively, over a 200 mm measurement range.