Application of Ni/SiCw Composite Material in MEMS Microspring.

The microspring is a typical type of device in MEMS devices, with a wide range of application scenarios and demands, among which a popular one is the microelectroformed nickel-based planar microspring prepared by the UV-LIGA technology based on the SU-8 adhesive. It is worth noting that the yield strength of the electrodeposited nickel microstructure is low, and the toughness of the structure is not high, which is unbeneficial for the enduring and stable operation of the spring. The paper mainly presents the methods of preparing high-aspect-ratio Ni/SiCw microstructures for MEMS devices based on UV-LIGA technology, developing Ni/SiCw-based microspring samples with a thickness of 300 µm, and applying a DMA tensile tester for mechanical property tests and characterization. In addition, the paper explores the influence of heat treatment at 300 °C and 600 °C on the tensile properties and microstructure of composite coatings. The results show that the W-form microspring prepared from Ni/SiCw composites not only has a wider linear range (about 1.2 times wider) than that of pure nickel material but also has a stronger resistance capacity to plastic deformation, which is competent for MEMS device applications in environments below 300 °C. The research provides a frame of reference and guidance for improving the stable cyclic operating life of such flat springs.

Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like Nano/Microstructure Array.

This polymer microstructure expands more available application, which is a milestone for the development of micro-electro-mechanical system devices towards intelligence and multifunction. Poor interface bonding between the polymer and Si or metal is a particular problem, which restricts the application and promotion of polymer materials. In this study, a transition strengthening layer is proposed to obtain a highly stable polymer microstructure by enhancing the interfacial adhesion strength. The transition strengthening layer is activated by a pushpin-like nano/microstructure array with micromachining technology. Given its good graphical qualities and compatibility, epoxy negative photoresist SU-8 is applied to evaluate the strengthened capabilities of the pushpin-like nano/microstructure array. The microstructure of SU-8 is prepared by the same processes, and then the adhesion strength between the SU-8 microstructure and various activated substrates is tested by the thrust tester. It was determined that SU-8 with an activated pushpin-like microstructure array possessed a highly stable adhesion ability, and its adhesion strength increased from 6.51 MPa to 15.42 MPa. With its ultrahigh stable adhesion ability, it has been applied in fabricating three typical microstructures (hollow square microstructure, gradually increasing adjacent periodic microstructure, and slender strip microstructures) and large-area SU-8 microstructures to evaluate the feasibility of the transition strengthening layer and repeatability and universality of the microfabrication processes. The drifting and gluing phenomenon are avoided by this method compared with the traditional design. The proposed pushpin-like nano/microstructure array is promising in enhancing the stability of polymer microstructures with a substrate.

Engineered Switchable-Wettability Surfaces for Multi-Path Directional Transportation of Droplets and Subaqueous Bubbles.

Conventional engineered surfaces for fluid manipulation are hindered by the set wettability, and thus they can only achieve spontaneous transport of single-phase fluid, namely liquid or gas. Moreover, fluid transport systems that are robust to path defects have yet to be fully explored. Here, unprecedentedly, a universal wettability switching strategy is developed for achieving programmable directional transport of both droplets and subaqueous bubbles on a dumbbell-patterned functional surface (DPFS), featuring in strong robustness, high efficiency, and effective cost. By tuning the superwettability of DPFS through octadecyltrichlorosilane treatment and ultraviolet-C selective irradiation, the transport fluid can alternate between liquid and gas. The material's switchable superwettability regulates the fluid directed dynamics within the confined pattern, in which the sustaining fluid propelling relies on the surface energy difference between the starting and terminal sites. This enables the construction of multiple channels, which works synergistically with ultralow-volume-loss transport to impart the fluidic system with strong robustness against path defects. Underlying the completion of complex microfluidics tasks, spatially-selective cooling devices and subaqueous gas microreactors are successfully demonstrated. This energy-consumption-free fluid transport system opens a new avenue for on-chip programmable fluid manipulation, promoting innovative applications requiring rational control of two-phase fluid transport.

High-Performance Directional Water Transport Using a Two-Dimensional Periodic Janus Gradient Structure.

Numerous materials in micro- or nanoscale hierarchical structures with surface gradients serve as the enablers in directional liquid transportation. However, concurrent high-speed and long-range liquid transport is yet to be fully realized so far. Here, an overall-improved approach is achieved in both water transport distance and velocity aspects using a 2D periodic Janus gradient structure, which is inspired by the Janus-wettable desert beetle back, tapered asymmetric cacti spine, and periodic Nepenthes alata microcavity. This 2D channel can efficiently regulate the kinetics of liquid transport within its confined structure, in which the terminal potential well and periodic Janus topological structure enable sustaining water propelling through a long distance. In addition, the rapidly formed aqueous film facilitates a high initial momentum and fast transport of liquid droplets along the channel, achieving an averaged velocity of over 400 mm s-1 and a maximum normalized transport distance of 23.4 for a 3 µL droplet, as well as an ultralow liquid volume loss of 6.02% upon high-flux water transport. This scalable, controllable, and easy-fabricable 2D water transport system provides an insightful pathway in realizing high-performance water manipulation and possibly facilitates substantial innovative applications in multidisciplinary fields.

A Single-Droplet Electricity Generator Achieves an Ultrahigh Output Over 100 V Without Pre-Charging.

The working principle of the triboelectric nanogenerator (TENG), contact electrification and electrostatic induction, has been used to harvest raindrop energy in recent years. However, the existing research is mainly concentrated on solid-liquid electrification, and adopts traditional electrostatic induction (TEI) for output. As a result, the efficiency of droplet electricity generators (DEGs) is severely constrained. Therefore, previous studies deem that the DEG output is limited by interfacial effects. This study reveals that this view is inappropriate and, in reality, the output strategy is the key bottleneck restricting the DEG performance. Here, a switch effect based on an electric-double-layer capacitor (EDLC) is introduced, and an equivalent circuit model is established to understand its working mechanism. Without pre-charging, a single droplet can generate high voltage over 100 V and the output is directly improved by two-orders of magnitude compared with TEI, which is precisely utilizing the interfacial effect. This work provides insightful perspective and lays solid foundation for DEG applications in large scale.

Retraction Note: Flexible Field Emitter for X-ray Generation by Implanting CNTs into Nickel Foil.

The Editors-in-Chief have retracted this article [1] because it significantly overlaps with a previously published article by the same authors [2].

Retraction Note: Flexible Field Emitter for X-ray Generation by Implanting CNTs into Nickel Foil.

The Editors-in-Chief have retracted this article [1] because it significantly overlaps with previously published articles by the same authors [2, 3].

A Minimally Invasive Hollow Microneedle With a Cladding Structure: Ultra-Thin but Strong, Batch Manufacturable.

OBJECTIVE: A minimally invasive hollow in-plane microneedle with a cladding structure is designed to improve the mechanical strength. METHODS: The traditional weak stack structure has been changed into a cladding structure, and the effectiveness has been validated through finite element analysis. The prototypes of the microneedles were batch manufactured by the integrated micromachining process with no need to assemble. RESULTS: Compared to our previously reported microneedle with the weak stack structure, the cladding microneedle in this paper shows 263% improvement in bonding strength (6.4±0.30 N) and 36.5% improvement in buckling strength (2.8±0.07 N). In addition, the fabricated microneedle will not fail during insertion into the fresh and dehydrated pig skin with a satisfying safety factor (1.55). CONCLUSION: A novel structure of hollow microneedle was developed and fabricated by microfabrication technology. The improvement in mechanical strength is obvious. SIGNIFICANCE: The microneedle has great mechanical property and good potential for wider applications in human skin.

A High Sensitive Flexible Pressure Sensor Designed by Silver Nanowires Embedded in Polyimide (AgNW-PI).

Silver nanowires (AgNW) have excellent electrical conductivity, transparency, and flexing endurance, and are broadly used in flexible electrodes and flexible sensors. This study mixed the silver nanowires and polyimide (PI) polymer using an in situ synthesis method, effectively reducing the problem of silver nanowires falling off the substrate. The selective wet etching method was firstly used to process the surface of AgNW-PI films, greatly enhancing the surface conductivity of AgNW-PI films. A flexible pressure sensor with high sensitivity was designed with two face-to-face AgNW-PI ultrathin layers. The experimental results show that our sensor presented a high sensitivity of about 1.3294 kPa-1 under a pressure of about 600 Pa, and when pressure continued to increase, the sensitivity decreased rapidly and reached saturation. Our flexible pressure sensor has the properties of low cost, high sensitivity, excellent repeatability, durability, and can detect various types of mechanical forces which could be utilized for flexible electronics.

Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application.

The design and fabrication of a Micro-electromechanical Systems (MEMS)-based tilted microcoil on a polyimide capillary are reported in this paper, proposed for an electromagnetically-driven single-fiber endoscope scanner application. The parameters of the tilted microcoil were optimized by simulation. It is proved that the largest driving force could be achieved when the tilt-angle, the pitch and the coil turns of the designed microcoil were 60°, 80 µm and 20, respectively. The modal simulation of the designed fiber scanner was carried out. The prototypes of the tilted microcoils were fabricated on the surface of polyimide capillary with 1 mm-diameter using our developed cylindrical projection lithography system. The dimensions of the two tilted microcoils were as follows: one was tilt-angle 45°, line width 10 ± 0.2 µm, coil pitch 78.5 ± 0.5 µm, and the other was tilt-angle 60°, line width 10 ± 0.2 µm, coil pitch 81.5 ± 0.5 µm. Finally, a direct mask-less electroplating process was employed to fabricate the copper microcoil with 15 µm thickness on the gold (Au) seed-layer, and the corresponding line width was expanded to 40 µm.

Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film.

In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam structure and reticular structure are designed. These designs have a reliable mechanical strength, so they can be designed and fabricated on single-layer SiO2 suspended film through a simplified process. Single-layer suspended film helps to reduce power consumption. Based on the new film shapes, different resistance heaters with various widths and thicknesses are designed. Then, the temperature uniformity and power consumption of different micro hotplates are compared to study the effect of these variables and obtain the one with the optimal thermal performance. We report the simulations of temperature uniformity and give the corresponding infrared images in measurement. The experimental temperature differences are larger than those of the simulation. Experimental results show that the lowest power consumption and the minimum temperature difference are 43 mW and 50 °C, respectively, when the highest temperature on the suspended platform (240 × 240 µm²) is 450 °C. Compared to the traditional four-beam micro hotplate, temperature non-uniformity is reduced by about 30⁻50%.

Shock-Resistibility of MEMS-Based Inertial Microswitch under Reverse Directional Ultra-High g Acceleration for IoT Applications.

This paper presents a novel MEMS-based inertial microswitch design with multi-directional compact constraint structures for improving the shock-resistibility. Its shock-resistibility in the reverse-sensitive direction to ultra-high g acceleration (~hunderds of thousands) is simulated and analyzed. The dynamic response process indicates that in the designed inertial microswitch the proof mass weight G, the whole system's stiffness k and the gap x2 between the proof mass and reverse constraint blocks have significant effect on the shock-resistibility. The MEMS inertial microswitch micro-fabricated by surface micromachining has been evaluated using the drop hammer test. The maximum allowable reverse acceleration, which does not cause the spurious trigger, is defined as the reverse acceleration threshold (athr). Test results show that athr increases with the decrease of the gap x2, and the proposed microswitch tends to have a better shock-resistibility under smaller gap. The measured responses of the microswitches with and without constraint structure indicates that the device without constraint structure is prone to spurious trigger, while the designed constraint structures can effectively improve the shock-resistibility. In this paper, the method for improving the shock-resistibility and reducing the spurious trigger has been discussed.

Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration.

A novel micro-electro-mechanical systems (MEMS) inertial microswitch with a flexible contact-enhanced structure to extend the contact duration has been proposed in the present work. In order to investigate the stiffness k of the stationary electrodes, the stationary electrodes with different shapes, thickness h, width b, and length l were designed, analyzed, and simulated using ANSYS software. Both the analytical and the simulated results indicate that the stiffness k increases with thickness h and width b, while decreasing with an increase of length l, and it is related to the shape. The inertial micro-switches with different kinds of stationary electrodes were simulated using ANSYS software and fabricated using surface micromachining technology. The dynamic simulation indicates that the contact time will decrease with the increase of thickness h and width b, but increase with the length l, and it is related to the shape. As a result, the contact time decreases with the stiffness k of the stationary electrode. Furthermore, the simulated results reveal that the stiffness k changes more rapidly with h and l compared to b. However, overlarge dimension of the whole microswitch is contradicted with small footprint area expectation in the structure design. Therefore, it is unreasonable to extend the contact duration by increasing the length l excessively. Thus, the best and most convenient way to prolong the contact time is to reduce the thickness h of the stationary electrode while keeping the plane geometric structure of the inertial micro-switch unchanged. Finally, the fabricated micro-switches with different shapes of stationary electrodes have been evaluated by a standard dropping hammer system. The test maximum contact time under 288 g acceleration can reach 125 µs. It is shown that the test results are in accordance with the simulated results. The conclusions obtained in this work can provide guidance for the future design and fabrication of inertial microswitches.

Flexible Field Emitter for X-ray Generation by Implanting CNTs into Nickel Foil.

This paper reports on a flexible Ni micro wire with CNTs embedded into its surface. By using micromachining technology, for the first time, we could implant nanoscale materials into micro-scale metal substrate at room temperature. Thanks to the effective direct contact and the strong interactions between CNTs and the substrate, field emission current of 1.11 mA (current density of 22.2 mA/cm(2)) could be achieved from the micro wire. Moreover, the wire shows excellent mechanical properties for large amplitude bending, which is beneficial for geometric designing. To check the practical application of the wire, a simplified X-ray imaging system was set up by modifying a conventional tube. The gray shade that appears on the sensitive film after being exposed to the radiation confirms the X-ray generation.

Flexible Field Emitter for X-ray Generation by Implanting CNTs into Nickel Foil.

This paper reports a novel implanting micromachining technology. By using this method, for the first time, we could implant nano-scale materials into milli-scale metal substrates at room temperature. Ni-based flexible carbon nanotube (CNT) field emitters were fabricated by the novel micromachining method. By embedding CNT roots into Ni foil using polymer matrix as transfer media, effective direct contact between Ni and CNTs was achieved. As a result, our novel emitter shows relatively good field emission properties such as low turn-on field and good stability. Moreover, the emitter was highly flexible with preservation of the field emission properties. The excellent field emission characteristics attributed to the direct contact and the strong interactions between CNTs and the substrate. To check the practical application of the novel emitter, a simple X-ray imaging system was set up by modifying a traditional tube. The gray shadow that appears on the sensitive film after being exposed to the radiation confirms the successful generation of X-ray.

A minimally invasive micro sampler for quantitative sampling with an ultrahigh-aspect-ratio microneedle and a PDMS actuator.

This study describes a novel micro sampler consisting of an ultrahigh-aspect-ratio microneedle and a PDMS actuator. The microneedle was fabricated by a new method which introduced reshaped photoresist technology to form a flow channel inside. The microneedle includes two parts: shaft and pedestal. In this study, the shaft length is 1500 µm with a 45° taper angle on the tip and pedestal is 1000 µm. Besides, the shaft and pedestal are connected by an arc connection structure with a length of 600 µm. The microneedles have sufficient mechanical strength to insert into skin with a wide safety margin which was proved by mechanics tests. Moreover, a PDMS actuator with a chamber inside was designed and fabricated in this study. The chamber, acting as a reservoir in sampling process as well as providing power, was optimized by finite element analysis (FEA) to decrease dead volume and improve sampling precision. The micro sampler just needs finger press to activate the sampling process as well as used for quantitative micro injection to some extent. And a volume of 31.5 ± 0.8 µl blood was successfully sampled from the ear artery of a rabbit. This micro sampler is suitable for micro sampling for diagnose or therapy in biomedical field.

Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer.

This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 µm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element simulation to predict the reliable of the device. The prototype was fabricated and characterized. By utilizing thick laminated photoresist sacrificial layer, the large displacement was obtained to ensure the insulation of the microswitch. The testing results show that the microswitch realized the bistable mechanism at a 3-5 V input voltage and closed in 0.96 ms, which verified the simulation.

Heat transfer and friction characteristics of the microfluidic heat sink with variously-shaped ribs for chip cooling.

This paper experimentally and numerically investigated the heat transfer and friction characteristics of microfluidic heat sinks with variously-shaped micro-ribs, i.e., rectangular, triangular and semicircular ribs. The micro-ribs were fabricated on the sidewalls of microfluidic channels by a surface-micromachining micro-electro-mechanical system (MEMS) process and used as turbulators to improve the heat transfer rate of the microfluidic heat sink. The results indicate that the utilizing of micro-ribs provides a better heat transfer rate, but also increases the pressure drop penalty for microchannels. Furthermore, the heat transfer and friction characteristics of the microchannels are strongly affected by the rib shape. In comparison, the triangular ribbed microchannel possesses the highest Nusselt number and friction factor among the three rib types.

Behavior of dermal fibroblasts on microdot arrays yields insight into wound healing mechanisms.

The behavior of fibroblasts on patterned substrates was examined in order to elucidate the role of dermal structure in wound healing. Dermal fibroblasts were cultured on micro-patterned silicone elastomer substrates designed to enforce cell adhesion only to fibronectin microdots. The morphology, expression of α-smooth muscle actin (α-SMA), proliferation, apoptotic cells, and soluble collagen production of cells were measured. Cells grown on patterned substrates showed some signs of a scar-fibroblast phenotype such as: elongated pseudopodia, enhanced expression of alpha smooth muscle actin (α-SMA), and increased collagen/pre-collagen, in comparison to unpatterned controls. Cells also showed low proliferation rates and high apoptotic index. The results showed that the microdot arrays, acting as a grid of limited focal adhesion sites, could force cells to adopt constrained morphologies and limited adhesion areas, which affect the cytoskeleton, ultimately leading to expression of a scar-tissue fibroblast phenotype. This study provides insight into the regulatory mechanisms of micro-topology on cell behavior in wound healing.

[Exploratory study on the micro-remodeling of dermal tissue].

OBJECTIVE: To explore the effect of three-dimensional structure of dermal matrix on biological behavior of fibroblasts (Fb) in the microcosmic perspective. METHODS: The three-dimensional structure of dermal tissue was analyzed by plane geometric and trigonometric function. Microdots structure array with cell adhesion effect was designed by computer-assisted design software according to the adhesive and non-adhesive components of dermal tissue. Four sizes (8 microm x 3 microm, space 6 microm; 16 microm x 3 microm, space 6 microm; 16 microm x 5 microm, space 8 microm; 20 microm x 3 microm, space 2 microm) of micropier grid used for cell culture (MPGCC) with cell-adhesive microdots, built up with micro-pattern printing and molecule self-assembly method were used to culture dermal Fb. Fb cultured with cell culture matrix without micropier grid was set up as control. The expression of skeleton protein (alpha-SMA) of Fb, cell viability and cell secretion were detected with immunohistochemistry, fluorescent immunohistochemistry, MTT test and the hydroxyproline content assay. RESULTS: The three-dimensional structure of dermal tissue could be simulated by MPGCC as shown in arithmetic analysis. Compared with those of control group [(12 +/- 3)% and (0.53 +/- 0.03) microg/mg, (0.35 +/- 0.04)], the expression of alpha-SMA [(49 +/- 3)%, (61 +/- 3)%, (47 +/- 4)%, (51 +/- 3)%] and the content of hydroxyproline [(0.95 +/- 0.04), (0.87 +/- 0.03), (0.81 +/- 0.03), (0.77 +/- 0.03) microg/mg] were increased significantly (P < 0.05), the cell viability of Fb (0.12 +/- 0.03, 0.13 +/- 0.04, 0.14 +/- 0.03, 0.19 +/- 0.03) cultured in MPGCC was decreased significantly (P < 0.05). When the parameters of micropier grid were changed, the expression of alpha-SMA, the cell viability and the content of hydroxyproline of Fb cultured in four sizes of MPGCC were also significantly changed as compared with one another (P < 0.05). CONCLUSIONS: MPGCC may be the basic functional unit of dermal template, or unit of dermal template to call. Different three-dimensional circumstances for dermal tissue can result in different template effect and wound healing condition.