1.
Opt Express
; 26(16): 20868-20877, 2018 Aug 06.
Artigo
em Inglês
| MEDLINE
| ID: mdl-30119393
RESUMO
A two dimensional photonic crystal (PhC) resonator, based on a recent design concept, entirely embedded in Silica, is fabricated in a CMOS full-process multiproject wafer, including additional steps such as implantation, metalization, Germanium deposition and planarization. A large loaded Q-factor (5.9 × 105) is achieved without removal of the silica cladding. A statistical analysis over 56 devices leads to an average value for the loaded Q of 4 × 105, in close agreement with calculations. An upper boundary for the fabrication disorder is estimated to 1.2 nm.