X-ray phase contrast imaging of objects with subpixel-size inhomogeneities: a geometrical optics model.

Several x-ray phase contrast extraction algorithms use a set of images acquired along the rocking curve of a perfect flat analyzer crystal to study the internal structure of objects. By measuring the angular shift of the rocking curve peak, one can determine the local deflections of the x-ray beam propagated through a sample. Additionally, some objects determine a broadening of the crystal rocking curve, which can be explained in terms of multiple refraction of x rays by many subpixel-size inhomogeneities contained in the sample. This fact may allow us to differentiate between materials and features characterized by different refraction properties. In the present work we derive an expression for the beam broadening in the form of a linear integral of the quantity related to statistical properties of the dielectric susceptibility distribution function of the object.

Propagation-based phase-contrast enhancement of nanostructure images using a debris-free femtosecond-laser-driven cluster-based plasma soft x-ray source and an LiF crystal detector.

We demonstrate in-line phase-contrast imaging of nanothickness foils by using a relatively large, polychromatic, debris-free femtosecond-laser-driven cluster-based plasma soft x-ray source, and a high-resolution, large dynamic range LiF crystal detector. The spatial coherence length of radiation in our setup reached a value of 5 microm on the sample plane, which is enough to observe phase-contrast enhancement in the images registered by the detector placed only a few hundred micrometers behind the object. We have developed a tabletop soft x-ray emission source, which emits radiation within a 4pi sr solid angle, and which allows one to obtain contact and propagation-based phase-contrast imaging of nanostructures with 700 nm spatial resolutions. This advance could be of utility for metrology applications.