Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario-Part 2.

In this paper, different concepts of reconfigurable RF-MEMS attenuators for beamforming applications are proposed and critically assessed. Capitalizing on the previous part of this work, the 1-bit attenuation modules featuring series and shunt resistors and low-voltage membranes (7-9 V) are employed to develop a 3-bit attenuator for fine-tuning attenuations (<-10 dB) in the 24.25-27.5 GHz range. More substantial attenuation levels are investigated using fabricated samples of coplanar waveguide (CPW) sections equipped with Pi-shaped resistors aiming at attenuations of -15, -30, and -45 dB. The remarkable electrical features of such configurations, showing flat attenuation curves and limited return losses, and the investigation of a switched-line attenuator design based on them led to the final proposed concept of a low-voltage 24-state attenuator. Such a simulated device combines the Pi-shaped resistors for substantial attenuations with the 3-bit design for fine-tuning operations, showing a maximum attenuation level of nearly -50 dB while maintaining steadily flat attenuation levels and limited return losses (<-11 dB) along the frequency band of interest.

A Fingertip-Mimicking 12×16 200µm-Resolution e-skin Taxel Readout Chip with per-Taxel Spiking Readout and Embedded Receptive Field Processing.

This paper presents an electronic skin (e-skin) taxel array readout chip in 0.18µm CMOS technology, achieving the highest reported spatial resolution of 200µm, comparable to human fingertips. A key innovation is the integration on chip of a 12×16 polyvinylidene fluoride (PVDF)-based piezoelectric sensor array with per-taxel signal conditioning frontend and spiking readout combined with local embedded neuromorphic first-order processing through Complex Receptive Fields (CRFs). Experimental results show that Spiking Neural Network (SNN)-based classification of the chip's spatiotemporal spiking output for input tactile stimuli such as texture and flutter frequency achieves excellent accuracies up to 97.1% and 99.2%, respectively. SNN-based classification of the indentation period applied to the on-chip PVDF sensors achieved 95.5% classification accuracy, despite using only a small 256-neuron SNN classifier, a low equivalent spike encoding resolution of 3-5 bits, and a sub-Nyquist 2.2kevent/s population spiking rate, a state-of-the-art power consumption of 12.33nW per-taxel, and 75µW-5mW for the entire chip is obtained. Finally, a comparison of the texture classification accuracies between two on-chip spike encoder outputs shows that the proposed neuromorphic level-crossing sampling (NLCS) architecture with a decaying threshold outperforms the conventional bipolar level-crossing sampling (LCS) architecture with fixed threshold.

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario-Part 1.

This paper describes different variants of broadband and simple attenuator modules for beamforming applications, based on radio frequency micro electro-mechanical systems (RF-MEMS), framed within coplanar waveguide (CPW) structures. The modules proposed in the first part of this work differ in their actuation voltage, topology, and desired attenuation level. Fabricated samples of basic 1-bit attenuation modules, characterized by a moderate footprint of 690 × 1350 µm2 and aiming at attenuation levels of -2, -3, and -5 dB in the 24.25-27.5 GHz range, are presented in their variants featuring both low actuation voltages (5-9 V) as well as higher values (~45 V), the latter ones ensuring larger mechanical restoring force (and robustness against stiction). Beyond the fabrication non-idealities that affected the described samples, the substantial agreement between simulations and measurement outcomes proved that the proposed designs could provide precise attenuation levels up to 40 GHz, ranging up to nearly -3 dB and -5 dB for the series and shunt variants, respectively. Moreover, they could be effective building blocks for future wideband and reconfigurable RF-MEMS attenuators. In fact, in the second part of this work, combinations of the discussed cells and other configurations meant for larger attenuation levels are investigated.

Enhancing the Deposition Rate and Uniformity in 3D Gold Microelectrode Arrays via Ultrasonic-Enhanced Template-Assisted Electrodeposition.

In the pursuit of refining the fabrication of three-dimensional (3D) microelectrode arrays (MEAs), this study investigates the application of ultrasonic vibrations in template-assisted electrodeposition. This was driven by the need to overcome limitations in the deposition rate and the height uniformity of microstructures developed using conventional electrodeposition methods, particularly in the field of in vitro electrophysiological investigations. This study employs a template-assisted electrodeposition approach coupled with ultrasonic vibrations to enhance the deposition process. The method involves utilizing a polymeric hard mask to define the shape of electrodeposited microstructures (i.e., micro-pillars). The results show that the integration of ultrasonic vibrations significantly increases the deposition rate by up to 5 times and substantially improves the uniformity in 3D MEAs. The key conclusion drawn is that ultrasonic-enhanced template-assisted electrodeposition emerges as a powerful technique and enables the development of 3D MEAs at a higher rate and with a superior uniformity. This advancement holds promising implications for the precision of selective electrodeposition applications and signifies a significant stride in developing micro- and nanofabrication methodologies for biomedical applications.

Triangular Sierpinski Microwave Band-Stop Resonators for K-Band Filtering.

Triangular resonators re-shaped with Sierpinski geometry were designed, manufactured, and tested for potential applications in the K-Band. Prototypes of band-stop filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration. Single and coupled structures were analyzed to give evidence for: (i) the tuning of the resonance frequency by increasing the internal complexity of the triangle and (ii) resonance enhancement when coupled structures are considered. The exploited devices were part of the more extended family of metamaterial-inspired structures, and they were studied for their heuristic approach to the prediction of the spectrum using experimental results supported by electromagnetic simulations. As a result, a Sierpinski resonator, not only fed into but also fully embedded into a CPW environment, had a frequency response that was not easily determined by classical theoretical approaches.

MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation.

Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration, and the tuning was obtained by switching between two paths of the devices loaded with different resonators. As a result, dual-band operation or fine-tuning could be obtained depending on the choice of the resonator, acting as a building block. The studied filters belong to the more general group of devices inspired by a metamaterial design.

Part II: Impedance-based DNA biosensor for detection of isolated strains of phytopathogen Ralstonia solanacearum.

In Part I, we demonstrated the complete development of a label-free, ultra-low sample volume requiring DNA-based biosensor to detect Ralstonia solanacearum, an aerobic non-spore-forming, Gram-negative, plant pathogenic bacterium, using non-faradaic electrochemical impedance spectroscopy (nf-EIS). We also presented the sensor's sensitivity, specificity, and electrochemical stability. In this article, we highlight the specificity study of the developed DNA-based impedimetric biosensor to detect various strains of R. solanacearum. We have collected seven isolates of R. solanacearum isolated from locally infected host plants (eggplant, potato, tomato, chilli, and ginger) from different parts of Goa, India. The pathogenicity of these isolates was tested on the eggplant, and the pathogen was confirmed by microbiological plating and polymerase chain reaction (PCR). We further report the insight into the DNA hybridization on the surface of Interdigitated Electrodes (IDEs) and the expansion of the Randles model for more accurate analysis. The interpretation of the sensor specificity is clearly demonstrated by the capacitance change observed at the electrode-electrolyte interface.

Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology.

U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail.

Part I: Non-faradaic electrochemical impedance-based DNA biosensor for detecting phytopathogen - Ralstonia solanacearum.

Herein, we report for the first time the development of a label-free, non-faradaic, and highly sensitive DNA-based impedimetric sensor using micro-sized gold interdigitated electrodes (IDE) to detect a soil-borne agricultural pathogen Ralstonia solanacearum. A universal 30 oligomer single-stranded DNA (ssDNA) probe lpxC4 having specificity towards R. solanacearum is successfully immobilized on the surface of IDE along with mercaptohexanol. The electrochemical stability of the developed sensor surface is determined using open circuit potential measurements. The DNA probe immobilization protocol is validated using the changes configured on the surface of IDE by contact angle and ATR-FTIR analysis. The DNA target hybridization is detected using non-faradaic electrochemical impedance spectroscopy measurement with an ultra-low sample volume of 10 µL. The non-faradaic approach is verified by studying redox behavior using cyclic voltammetry. We investigate the hybridization of the surface-immobilized label-free probe with the complementary DNA targets obtained from infected eggplant saplings and cross-reactive studies with mismatched DNA strands. Our impedimetric sensor can detect target concentrations as low as 0.1 ng/µL. This standardization and detection of DNA hybridization serves as part I of the work and paves the way for further study in the detection of pathogenic field samples.

Plant pathogenicity and associated/related detection systems. A review.

There is an increasing demand for the development of various tools for diagnosis and control of plant infections. The early diagnosis of plant disease serves as a vital element to improve crop productivity and meet demands of the ever-growing world population. The traditional methods of plant disease detection are time consuming, laborious and require 3-5 days to estimate the disease incidence. In this review, we focus on the advances in the detection techniques, mainly the miniaturized systems that has developed in the last decade. The analytical techniques for plant pathogen detection have been classified as direct and indirect detection methods. The direct methods involving laboratory techniques such as polymerase chain reaction, enzyme-linked immune-sorbent assays, and immunofluorescence and their recent advances have been discussed. Similarly, indirect methods which rely on sensing the plant stress indicators to detect plant diseases have been categorized and reviewed. In the last decade, various detection platforms with high sensitivity and selectivity have been developed and commercialized into handheld devices and products for on-field plant disease detection. This review focusses on the transition from the gold standard techniques to the advanced on-field biosensors to detect plant diseases with higher accuracy, cost-effective and making timely diagnosis possible. A growing trend for pathogen detection based on biosensors has been highlighted and further categorized into electrochemical, optical, and mass-based sensors. These innovative advancements in plant pathogen detection systems help to make the agricultural sector more safe, reliable, and sustainable for the ever-growing population.

A review of recent advances in plant-pathogen detection systems.

Worldwide, a substantial economic loss in agricultural products is caused by plant pathogens. The increased losses in agriculture have drawn attention towards the development of miniaturized pathogen detection systems for phytopathology. This review paper's main selling point supports recent research (from 2015 to 2022) and technological advancements in the field of plant pathogen detection. The article discusses in depth important developments in the loop-mediated isothermal amplification (LAMP) assay, microfluidics, Molecular Imprinted Polymer (MIP) based biosensors, digital droplet PCR (ddPCR), disposable all-printed electronics, and nanoparticle-based sensors for instantaneous pathogen detection in agricultural applications. Utilizing nanoparticles to identify agricultural pathogens is a crucial topic that is explored. A brief on various commercially available detection systems worldwide have been listed. Finally, we discuss the perspective in the development of portable miniaturized systems and novel assay technologies based on advanced nanomaterials. Gold standard techniques: Although Polymerase Chain Reaction (PCR) and culture counting have been widely used for plant pathogen detection, they are not appropriate for measurements made in the field due to their higher installation costs, lack of portability, need for well-equipped laboratories, and requirement of skilled personnel. Therefore, these recent trends are overtaking the traditional methods in Agri-diagnostics because of their superior performances and suitability for the task.

Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications.

In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting smaller mechanical deformation and a higher stiffness with more release force than previously designed single diagonal beam suspensions. The two-anchor DDGs are designed in two different orientations, in-line and 90°-rotated. The membrane may include a window to minimize the coupling to the lower electrode. The devices are integrated in a coplanar-waveguide transmission structure and fabricated using an eight-mask surface-micro-machining process on high-resistivity silicon, with dielectric-free actuation electrodes, and including glass protective caps. The RF-MEMS switch behavior is assessed from measurements of the device S parameters in ON and OFF states. The fabricated devices feature a measured pull-in voltage of 76.5 V/60 V for the windowed/not-windowed two-anchor DDG membranes, and 54 V/49.5 V for the windowed/not-windowed three-anchor DDG membranes, with a good agreement with mechanical 3D simulations. The measured ON-state insertion loss is better than 0.7 dB/0.8 dB and the isolation in the OFF state is better than 40 dB/31 dB up to 20 GHz for the in-line/90°-rotated devices, also in good agreement with 2.5D electromagnetic simulations.

Micropatterning of Substrates for the Culture of Cell Networks by Stencil-Assisted Additive Nanofabrication.

The fabrication of in vitro neuronal cell networks where cells are chemically or electrically connected to form functional circuits with useful properties is of great interest. Standard cell culture substrates provide ensembles of cells that scarcely reproduce physiological structures since their spatial organization and connectivity cannot be controlled. Supersonic Cluster Beam Deposition (SCBD) has been used as an effective additive method for the large-scale fabrication of interfaces with extracellular matrix-mimicking surface nanotopography and reproducible morphological properties for cell culture. Due to the high collimation of SCBD, it is possible to exploit stencil masks for the fabrication of patterned films and reproduce features as small as tens of micrometers. Here, we present a protocol to fabricate micropatterned cell culture substrates based on the deposition of nanostructured cluster-assembled zirconia films by stencil-assisted SCBD. The effectiveness of this approach is demonstrated by the fabrication of micrometric patterns able to confine primary astrocytes. Calcium waves propagating in the astrocyte networks are shown.

RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications.

RF-MEMS, i.e., Micro-Electro-Mechanical Systems (MEMS) for Radio Frequency (RF) passive components, exhibit interesting characteristics for the upcoming 5G and Internet of Things (IoT) scenarios, in which reconfigurable broadband and frequency-agile devices, like high-order switching units, tunable filters, multi-state attenuators, and phase shifters will be necessary to enable mm-Wave services, small cells, and advanced beamforming. In particular, satellite communication systems providing high-speed Internet connectivity utilize the K and Ka bands, which offer larger bandwidth compared to lower frequencies. This paper focuses on two design concepts of multi-state phase shifter designed and manufactured in RF-MEMS technology. The networks feature 4 switchable stages (16 states) and are developed for the K and Ka bands. The proposed phase shifters are realized in a surface micromachining RF-MEMS technology and the experimentally measured parameters are compared with Finite Element Method (FEM) multi-physical electromechanical and RF simulations. The simulated phase shifts at both the operating bands fit well the measured value, despite the measured losses (S21) are larger than 5-7 dB if compared to simulations. However, such a non-ideality has a technological motivation that is explained in the paper and that will be fixed in the manufacturing of future devices.