Influence of Homopolymer Addition in Templated Assembly of Cylindrical Block Copolymers.

Templated assembly of cylindrical block copolymers provides a promising strategy for patterning holes at the nanoscale. However, remaining challenges include the ability to achieve defect-free patterns and to generate architectures useful for device patterning. The aim of this work is to gain insight into the influence of homopolymer addition on the assembly of a cylindrical block copolymer in confined space. To do so, a concerted examination that relies on experiments and simulations is carried out for different block copolymer/homopolymer blends. It is shown that by adding a majority block homopolymer with low molecular weight (compared to the blocks that make up the block copolymer), the pattern quality is significantly improved and a larger defect-free window is obtained in terms of template dimensions for two-hole features in elliptical confinements. The redistribution of the homopolymer chains effectively enables the assembly of two cylinders, despite the geometrical mismatch between the elliptical shape of the confinement and the natural hexagonal ordering of the unguided block copolymer. Monte Carlo simulations show that the homopolymer segregates to the spaces in the template that are entropically unfavorable for the block copolymer. This work serves to highlight the importance of optimizing block copolymer formulation.

Ionic Liquids as Additives to Polystyrene- Block-Poly(Methyl Methacrylate) Enabling Directed Self-Assembly of Patterns with Sub-10 nm Features.

Polystyrene- block-poly(methyl methacrylate) (PS- b-PMMA) is one of the prototypical block copolymers in directed self-assembly (DSA) research and development, with standardized protocols in place for processing on industrially relevant 300 mm wafers. Scaling of DSA patterns to pitches below 20 nm using PS- b-PMMA, however, is hindered by the relatively low Flory-Huggins interaction parameter, χ. Here, we investigate the approach of adding small amounts of ionic liquids (ILs) into PS- b-PMMA, which selectively segregates into the PMMA domain and effectively increases the χ parameter and thus the pattern resolution. The amount of IL additive is small enough to result in limited changes in PS- b-PMMA's surface and interfacial properties, thus maintaining industry-friendly processing by thermal annealing with a free surface. Three different ILs are studied comparatively regarding their compositional process window, capability of increasing χ, and thermal stability. By adding ∼3.1 vol % of the champion IL into a low-molecular-weight PS- b-PMMA ( Mn = 10.3k- b-9.5k), we demonstrated DSA on chemically patterned substrates of lamellar structures with feature sizes <8.5 nm. Compatibility of the PS- b-PMMMA/IL blends with the standardized processes that have been previously developed suggests that such blend materials could provide a drop-in solution for sub-10 nm lithography with the processing advantages of PS- b-PMMA.

Real-Time Atomic Force Microscopy Imaging of Block Copolymer Directed Self Assembly.

The kinetics of directed self-assembly of symmetric PS-b-PMMA diblock copolymer on chemically patterned templates were measured during in situ thermal annealing. Although these chemical guide patterns lead to well-aligned, defect-free lamellar patterns at thermodynamic equilibrium, in practice, challenges remain in understanding and optimizing the kinetic evolution for technological applications. High-speed, environmentally controlled atomic force microscopy imaging was used to track pattern evolution on the time scale of individual microdomain connections in real space and time, allowing the direct visualization of defect healing mechanisms. When we apply this highly general technique to films on chemically patterned substrates, we find that pattern alignment is mediated by a metastable nonbulk morphology unique to these samples, referred to as the "stitch" morphology. We observe diverse and anisotropic mechanisms for the conversion from this morphology to equilibrium lamellar stripes. Directed self-assembly on chemical templates is observed to follow exponential kinetics with an apparent energetic barrier of 360 ± 80 kJ/mol from 210-230 °C, a significant enhancement when compared with ordering rates on unpatterned substrates. Ultimately, from local imaging, we find that the presence of a chemical guiding field causes morphological ordering and lamellar alignment to occur irreversibly.

Characterizing Patterned Block Copolymer Thin Films with Soft X-rays.

The directed self-assembly (DSA) of block copolymers (BCPs) is a potential solution for patterning critical features for integrated circuits at future technology nodes. For this process to be implemented, there needs to be a better understanding of how the template guides the assembly and induces subsurface changes in the lamellar structure. Using a rotational transmission X-ray scattering measurement coupled with soft X-rays to improve contrast between polymer components, the impact of the ratio of the guiding stripe width (W) to the BCP pitch (L0) was investigated. For W/L0 < 1, continuous vertical lamella were observed, with some fluctuations in the interface profile near the template that smoothed out further up the structure. Near W/L0 ≈ 1.5, the arrangement of the lamella shifted, moving from polystyrene centered on the guiding stripe to poly(methyl methacrylate) centered on the guiding stripe.

Sub-5 nm Patterning by Directed Self-Assembly of Oligo(Dimethylsiloxane) Liquid Crystal Thin Films.

Highly ordered nanopatterns are obtained at sub-5 nm periodicities by the graphoepitaxial directed self-assembly of monodisperse, oligo(dimethylsiloxane) liquid crystals. These hybrid organic/inorganic liquid crystals are of high interest for nanopatterning applications due to the combination of their ultrasmall feature sizes and their ability to be directed into highly ordered domains without additional annealing.

Three-Tone Chemical Patterns for Block Copolymer Directed Self-Assembly.

Chemical patterns for directed self-assembly (DSA) of lamellae-forming block copolymers (BCP) with density multiplication can be fabricated by patterning resist on a cross-linked polystyrene layer, etching to create guide stripes, and depositing end-grafted brushes in between the stripes as background. To date, two-tone chemical patterns have been targeted with the guide stripes preferentially wet by one block of the copolymer and the background chemistry weakly preferentially wet by the other block. In the course of fabricating chemical patterns in an all-track process using 300 mm wafers, it was discovered that the etching process followed by brush grafting could produce a three-tone pattern. We characterized the three regions of the chemical patterns with a combination of SEM, grazing-incidence small-angle X-ray scattering (GISAXS), and assessment of BCP-wetting behavior, and evaluated the DSA behavior on patterns over a range of guide stripe widths. In its best form, the three-tone pattern consists of guide stripes preferentially wet by one block of the copolymer, each flanked by two additional stripes that wet the other block of the copolymer, with a third chemistry as the background. Three-tone patterns guide three times as many BCP domains as two-tone patterns and thus have the potential to provide a larger driving force for the system to assemble into the desired architecture with fewer defects in shorter time and over a larger process window.

Evidence of speckle in extreme-UV lithography.

Based on reflective optics at 13.5 nm, extreme-UV lithography is the ultimate top-down technique to define structures below 22 nm but faces several challenges arising from the discrete nature of light and matter. Owing to the short wavelength, mask surface roughness plays a fundamental role in the increase of speckle pattern contrast, compromising the uniformity of the printed features. Herein, we have used a mask with engineered gradient surface roughness to illustrate the impact that speckle has on the resulting photoresist pattern. The speckle increases the photoresist roughness, but surprisingly, only when the mask surface roughness is well above existing manufacturing capabilities.

Photochemical generation of six- and five-membered cyclic vinyl cations.

The photochemical solvolyses of 4-tert-butylcyclohex-1-enyl(phenyl)iodonium tetrafluoroborate (1) and cyclopent-1-enyl(phenyl)iodonium tetrafluoroborate (2) in methanol yield vinylic ethers and vinylic cycloalkenyliodobenzenes and cycloalkenylbenzene, which are the trapping products of the geometrically destabilized C6-ring and C5-ring vinyl cation with the solvent and with the leaving group iodobenzene. Iodonium salt 2 also yields an allylic ether and allylic cyclopentenyliodobenzenes and cyclopentenylbenzene, which are the trapping products of the C5-ring allylic cation produced from the C5-ring vinyl cation by a hydride shift in a typical carbocationic rearrangement.

Mesoscopic organization of two-dimensional J-aggregates of thiacyanine in Langmuir-Schaefer films.

When dioctadecyl dimethylammonium bromide (DODAB) is compressed on a subphase containing 3,3'-disulfopropyl-5,5'-dichlorothiacyanine (THIAMS), adsorption of the dye to the DODAB monolayer results in the formation of J-aggregates which spontaneously organize into polygonal domains of micron size. The features of the domains depend on the surface pressure. The fluorescence of the individual domains is polarized. The shapes of the domains determined by fluorescence microscopy and atomic force microscopy (AFM) are identical. The domains differ however significantly from those observed after injection of a 3,3'-disulfopropyl-5,5'-dichloro-9-ethylthiacarbocyanine (THIATS) or THIAMS solution below a precompressed DODAB film, as well as from the domains observed upon compression of a DODAB monolayer on a subphase containing 10(-6) M THIATS.

Intramolecular directional förster resonance energy transfer at the single-molecule level in a dendritic system.

We report on the directional Förster resonance energy transfer (FRET) process taking place in single molecules of a first (T1P4) and a second (T2P8) generation of a perylenemonoimide (P)-terrylenediimide (T)-based dendrimer in which the chromophores are separated by rigid polyphenylene arms. At low excitation powers, single-molecule detection and spectroscopy of T1P4 and T2P8 dendrimers point to a highly efficient directional FRET from P donors to the central T acceptor, optical excitation at 488 nm resulting in exclusively acceptor emission in the beginning of the detected fluorescence intensity. Donor emission is seen only upon the bleaching of the acceptor. High-resolution time-resolved single-molecule fluorescence data measured with a microchannel plate photomultiplier reveal, for T2P8, a broad range of FRET rates as a result of a broad range of distances and orientations experienced by the donor-acceptor dendrimers when immobilized in a polymer matrix. Single-molecule data from T2P8 on 488 nm excitation are indicative for the presence, after terrylenediimide bleaching, of a P-P excited dimer characterized by a broad emission spectrum peaking around 600 nm and by fluctuating fluorescence decay times. At high excitation powers, single T1P4 and T2P8 molecules display simultaneous emission from both donor and acceptor chromophores. The effect, called "exciton blockade", occurs due to the presence of multiple excitations in a single molecule.

Single-molecule surface enhanced resonance Raman spectroscopy of the enhanced green fluorescent protein.

In the present contribution, we demonstrated that surface-enhanced resonance Raman scattering spectra from single green fluorescent proteins (GFPs) were obtained. The most important findings are the direct detection of the conversion between a deprotonated and a protonated form of the chromophore at the single-molecule level via the corresponding vibrational fingerprints, and the fact that the enhanced green fluorescent protein (EGFP) also shows a high surface enhanced resonance Raman scattering (SERRS) signal. Our findings show the potential of the technique to study structural dynamics of protein molecules at a single-molecule level.

Photochemical generation of a primary vinyl cation from (E)-bromostyrene: mechanisms of formation and reaction.

The photochemistry of (E)-bromostyrene was investigated to determine the nature of the product-forming intermediates and to clarify the mechanism of formation of vinylic cations and vinylic radicals. Both a cation- and a radical-derived product are formed, and the ionic origin of the former product is demonstrated by significant scrambling of the label, starting from specifically deuterated (E)-bromostyrene. MO calculations show that the isolated incipient primary vinyl cation is not a metastable species, but that specific interaction with a counterion in combination with a polar environment makes it metastable. The effects of variation of the wavelength of irradiation, solvent polarity, temperature, and isotopic substitution all agree with a mechanism of direct heterolytic C-Br bond cleavage producing an ion pair followed by formation of a radical pair via electron transfer. The vinylic cation is proposed to stem directly from the indirectly populated lowest excited singlet state of bromostyrene with an energy of activation of 6.7 kcal/mol. Branching between proton loss and electron transfer in the resulting ion pair determines the ratio of cation- to radical-derived product. The E/Z-isomerization occurs in a separate process and does not involve C-Br bond cleavage.

Intramolecular Förster energy transfer in a dendritic system at the single molecule level.

The photophysics of a dendrimer containing four donor chromophores and one acceptor chromophore are studied at the single-molecule level. Upon excitation of the donors exclusive acceptor emission is observed due to efficient Förster energy transfer. For 70% of the molecules donor emission is observed after bleaching of the acceptor, leading to a reduction of the Förster energy transfer efficiency. Furthermore, we demonstrate that in this molecular system the donor chromophores do not bleach by a triplet-sensitized photooxidation.

Photosolvolysis of (E)-styryl(phenyl)iodonium tetrafluoroborate. Generation and reactivity of a primary vinyl Cation.

The photochemistry of (E)-styryl(phenyl)iodonium tetrafluoroborate in methanol and 2,2,2-trifluoroethanol as well as in dichloromethane and toluene has been investigated. In all solvents the vinylic C [bond] I bond is more photoreactive than the aromatic C [bond] I bond. Homolysis as well as heterolysis of both bonds occurs, but the latter type of cleavage predominates. In alcoholic solvents, the incipient phenyl cation produces a nucleophilic substitution product. The primary styryl cation gives nucleophilic substitution, elimination, and rearrangement products. The dependence of the photoreaction on the nucleophilicity of the solvent indicates that in the presence of good nucleophiles a 10-I-3 compound is the reactive iodonium species. In this case the reaction proceeds via an S(N)i mechanism. In the absence of good nucleophiles an 8-I-2 species gives photoreaction via an S(N)1 mechanism. This is corroborated by the solvent dependence of the UV spectra, and the product composition upon photoreaction with bromide in varying concentration. Photoreaction of the iodonium salt in a chlorinated alkane yields (E)- and (Z)-beta-fluorostyrene in a Schiemann-type reaction. Reaction in toluene yields Friedel-Crafts products. The results of the photochemical reactions are compared to those of the thermal ones, and the implications of the differences are discussed.

Excitation energy transfer in dendritic host-guest donor-acceptor systems.

We report on a study of a physically formed host-guest system, which was designed to be investigated by fluorescence energy transfer. All donor and acceptor molecules used were cyanine dyes. Investigation was performed at the ensemble level as well as at the single-molecule level. The ensemble measurements revealed a distribution of binding sites as well for the donor as for the acceptor. Accordingly, we found a distribution of the energy transfer efficiency. At the single-molecule level, these distributions are still present. We could discriminate entities that show very efficient energy transfer, some that do not show any energy transfer and systems whose energy transfer efficiency is only about 50%. The latter allowed the time-resolved detection of energy transfer of single entities through the acceptor decay. Finally, we discuss the observation that the energy transfer efficiency fluctuates as a function of time.