Temperature-Decoupled Single-Crystal MgO Fiber-Optic Fabry-Perot Vibration Sensor Based on MEMS Technology for Harsh Environments.

A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry-Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties (melting point > 2800 °C) and optical properties (transmittance ≥ 90%), MgO is chosen as the ideal material to be placed in the high-temperature testing area. The combination of wet chemical etching and direct bonding is used to construct an all-MgO sensor head, which is favorable to reduce the temperature gradient inside the sensor structure and avoid sensor failure. A temperature decoupling method is proposed to eliminate the cross-sensitivity between temperature and vibration, improving the accuracy of vibration detection. The experimental results show that the sensor is stable at 20-1000 °C and 2-20 g, with a sensitivity of 0.0073 rad (20 °C). The maximum nonlinearity error of the vibration sensor measurement after temperature decoupling is 1.17%. The sensor with a high temperature resistance and outstanding dynamic performance has the potential for applications in testing aero-engines and gas turbine engines.

Extensible multi-wavelength interrogation method for arbitrary cavities in low-fineness multi-cavity Fabry-Pérot interferometric sensors.

To the best of our knowledge, a novel extensible multi-wavelength (EMW) method to interrogate arbitrary cavities in low-fineness fiber-optic multi-cavity Fabry-Pérot interferometric (LFMFPI) sensors is proposed and experimentally demonstrated. Based on the derived model of the LFMFPI sensor with any amount of cascaded cavities, theoretically, variation in each cavity of a LFMFPI sensor can be extracted simultaneously once the necessary parameters are acquired in advance. The feasibility of this method is successfully demonstrated in simulations and experiments utilizing LFMFPI sensors. In experiments with the LFMFPI sensor, optical path differences (OPD) of 78 nm and 2.95 µm introduced by temperature variation in two cavities, and the OPD induced by vibration with the amplitude from 5.891 nm to 38.116 nm were extracted, respectively. The EMW method is potential in multi-parameter sensing for pressure, vibration, and temperature.

High-Temperature Fiber-Optic Fabry-Perot Vibration Sensor Based on Single-Crystal Sapphire.

In this paper, a fiber-optic Fabry-Perot (F-P) vibration sensor that can work at 800 °C is proposed. The F-P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 °C. The nonlinearity was evaluated from 20 °C to 800 °C with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the x-axis and y-axis. The vibration sensor will have wide high-temperature engineering-application prospects.

Recent Progress of Nanodiamond Film in Controllable Fabrication and Field Emission Properties.

The interest in the field electron emission cathode nanomaterials is on the rise due to the wide applications, such as electron sources, miniature X-ray devices, display materials, etc. In particular, nanodiamond (ND) film is regarded as an ideal next-generation cathode emitter in the field emission devices, due to the low or negative electron affinity, small grain size, high mechanical hardness, low work function, and high reliability. Increasing efforts are conducted on the investigation of the emission structures, manufacturing cost, and field emission properties improvement of the ND films. This review aims to summarize the recent research, highlight the new findings, and provide a roadmap for future developments in the area of ND film electron field emitter. Specially, the optimizing methods of large-scale, high-quality, and cost-effective synthesis of ND films are discussed to achieve more stable surface structure and optimal physical properties. Additionally, the mainstream strategies applied to produce high field emission performance of ND films are analyzed in detail, including regulating the grain size/boundary, hybrid phase carbon content, and doping element/type of ND films; meanwhile, the problems existing in the related research and the outlook in this area are also discussed.

Probe type TFBG-excited SPR fiber sensor for simultaneous measurement of multiple ocean parameters assisted by CFBG.

The tilted fiber Bragg grating(TFBG), chirped fiber Bragg grating(CFBG), Vernier effect and metal surface plasmon resonance(SPR) effect are effectively combined to form a probe type fiber sensor for simultaneous measurement of seawater salinity, temperature and depth(STD). The SPR effect excited by the TFBG is achieved by covering a gold layer around the TFBG, which is used to measure the refractive index (RI) of seawater. The core mode of TFBG is used to detect the change of seawater temperature and the measurement of TFBG reflection spectrum is realized by inscribing a CFBG after the TFBG, which makes the sensor have a probe type design and more beneficial to practical applications. The fusion of quartz micro-spheres on the end face of the sensing fiber and the parallel connection of an Fabry Perot(F-P) interference cavity enables the use of Vernier effect to detect the depth of the ocean. Femtosecond laser line-by-line method is used to the inscribing of TFBG, which allows the grating parameters to be changed flexibly depending on the desired spectrum. The experimental results show that the temperature sensitivity is 10.82pm/°C, the salinity sensitivity is 0.122nm/g/Kg, the depth sensitivity is 116.85 pm/m and the depth can be tested to 1000 m or even deeper.

Fabrication of an all-silica microsphere-lens on optical fiber for free-space light coupling and sensing in extreme environments.

In this paper, an all-silica microsphere-lens was designed and fabricated on the fiber end face, which can effectively improve the coupling efficiency of free-space light. In the production process, a coreless silica fiber with specific length was spliced on the end face of the fiber and melted by a CO2 laser fusion splicer. Due to the effect of surface tension, the coreless silica fiber would form a microsphere-lens on the fiber end face and the diameter of the microsphere-lens could be adjusted by controlling the light-passing time of the CO2 laser fusion splicer. Through experiments, it can be found that the 3 dB bandwidth optical coupling distance of the microsphere-lens with a diameter of 270 µm is about 200 µm, and the focus depth is about 450 µm. In order to verify the feasibility of using the microsphere-lens in the fiber-optic Fabry-Perot sensors, a Fabry-Perot interferometer was constructed by using the microsphere-lens and the single-mode fiber end face. The experimental results showed that the interference spectrum of the Fabry-Perot interferometer has a good contrast ratio. Integrating the advantages of all-silica structure, simple manufacturing process, low cost, small size, and sturdy construction, the proposed microsphere-lens is expected to be a potential candidate for free-space light coupling and fiber-optic sensors in extreme environments.

A MEMS-Based High-Fineness Fiber-Optic Fabry-Perot Pressure Sensor for High-Temperature Application.

In this paper, a high-fineness fiber-optic Fabry-Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber-Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.

An Accelerometer Based on All Silica In-Line Fiber Fabry-Perot Etalon for High Temperature up to 800 °C.

High-temperature accelerometers have been widely used in aerospace, nuclear reactors, automobile technologies, etc. In this paper, a fiber-optic Fabry-Perot accelerometer (FOFPA) with a cantilever beam for high temperature is designed and experimentally demonstrated. The FOFPA is formed by bonding an all-silica in-line fiber Fabry-Perot etalon (ILFFPE) to one surface of the uniform cantilever beam with the lumped mass at the free end for acceleration measurement. The all silica in-line fiber FP etalon is made by welding two gold-coat single-mode fiber (GSMF) and a hollow silica glass tube (HST). The research results indicate that the sensitivity of the FOFPA is 0.02328rad/g, and the resonance frequency is 1146.6 Hz in the range of 1 g ~ 10 g. The high-temperature performance of the FOFPA was also evaluated. From 20 °C to 800 °C, the temperature drift is about 0.3178 nm/°C. The FOFPA has the potential of being applicable in higher temperatures compared to conventional accelerometers.

An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications.

An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material for the first time in the field of wireless passive sensing because of its ultra-high melting point (2800 °C) and excellent mechanical properties at elevated temperatures. The sensor mainly consists of inductance coils and an embedded sealed cavity. The cavity length decreases with the applied pressure, leading to a monotonic variation in the resonant frequency of the sensor, which can be retrieved wirelessly via a readout antenna. The capacitor cavity was fabricated using a MgO MEMS technique. This MEMS processing technique, including the wet chemical etching and direct bonding process, can improve the operating temperature of the sensor. The experimental results indicate that the proposed sensor can stably operate at an ambient environment of 22-900 °C and 0-700 kPa, and the pressure sensitivity of this sensor at room temperature is 14.52 kHz/kPa. In addition, the sensor with a simple fabrication process shows high potential for practical engineering applications in harsh environments.

Dual-wavelength demodulation technique for interrogating a shortest cavity in multi-cavity fiber-optic Fabry-Pérot sensors.

This paper demonstrates, for the first time, a novel demodulation technique that can be applied for interrogating a shortest cavity in multi-cavity Fabry-Pérot (F-P) sensors. In this demodulation technique, using an amplified spontaneous emission (ASE) light source and two optical fiber broadband filters, the interference only occurs in a shortest F-P cavity that is shorter than the half of the coherence length. Using a signal calibration algorithm, two low-coherence interference optical signals with similar coherence lengths were calibrated to obtain two quadrature signals. Then, the change in the cavity length of the shortest F-P cavity was interrogated by the two quadrature signals and the arctangent algorithm. The experimental results show that the demodulation technique successfully extracted 1 kHz and 500 Hz vibration signals with 39.28 µm and 64.84 µm initial cavity lengths, respectively, in a multi-cavity F-P interferometer. The demodulation speed is up to 500 kHz, and the demodulation technique makes it possible for multi-cavity F-P sensors to measure dynamic and static parameters simultaneously. The results show that the demodulation technique has wide application potential in the dynamic measurement of multi-cavity F-P sensors.

High-Consistency Optical Fiber Fabry-Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment.

This paper proposes a high-temperature optical fiber Fabry-Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separated sensing head and the gold-plated fiber are welded together by a carbon dioxide laser to form a fiber-optic Fabry-Perot high temperature pressure sensor, which uses a four-layer bonding technology to improve the sealing performance of the Fabry-Perot cavity. The test system of high temperature pressure sensor is set up, and the experimental data obtained are calculated and analyzed. The experimental results showed that the maximum linearity of the optical fiber pressure sensor was 1% in the temperature range of 20-400 °C. The pressure sensor exhibited a high linear sensitivity of about 1.38 nm/KPa at room temperature at a range of pressures from approximarely 0-to 1 MPa. The structure of the sensor is characterized by high consistency, which makes the structure more compact and the manufacturing process more controllable.

MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements.

A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.

Least square fitting demodulation technique for the interrogation of an optical fiber Fabry-Perot sensor with arbitrary reflectivity.

A novel Fabry-Perot (F-P) demodulation technique based on least square fitting for arbitrary reflectivity F-P sensors is proposed. The demodulation method was simulated and analyzed to verify feasibility of the algorithm. Two different finesse F-P interferometers constructed with a reflector bracket were used to make the stability experiments and the stepping experiments. The results show that the demodulation technique can interrogate the cavity length of F-P interferometers with different fineness in a wide range, and the demodulation error is less than 12 nm.

An In-Line Fiber Optic Fabry-Perot Sensor for High-Temperature Vibration Measurement.

An in-line fiber optic Fabry-Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 µm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C.

Fiber-optic Fabry-Perot pressure sensor based on sapphire direct bonding for high-temperature applications.

In this study, a fiber-optic Fabry-Perot (FP) high-temperature pressure sensor based on sapphire direct bonding is proposed and experimentally demonstrated. The sensor is fabricated by direct bonding of two-layer sapphire wafers, including a pressure diaphragm wafer and a cavity-etched wafer. The sensor is composed of a sensor head that contains a vacuum-sealed cavity arranged as an FP cavity and a multimode optical fiber. The external pressure can be measured by detecting the change in FP cavity length in the sensor. Experimental results demonstrate the sensing capabilities for pressures from 20 kPa to 700 kPa up to 800°C.

Correction: Yan, L., et al. A Micro Bubble Structure Based Fabry⁻Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics Sensors, 2017, 17, 555.

An correction is presented to correct Figure 5a in [Sensors, 2017, 17, 555].

Batch-producible MEMS fiber-optic Fabry-Perot pressure sensor for high-temperature application.

A fiber-optic Fabry-Perot pressure sensor based on a micro-electro-mechanical system (MEMS) and CO2 laser fusion technology is developed and experimentally demonstrated for high-temperature application. The sensing heads are batch-fabricated by anodically bonding the micromachined Pyrex glass wafer and local gold-plated silicon wafer. The separated sensing head and the single-mode fiber are fused together to form the Fabry-Perot cavity using the CO2 laser. In order to improve the measurement accuracy in a high-temperature environment, a fiber Bragg grating is used as a temperature sensor for temperature decoupling. The experimental results show that the fiber-optic Fabry-Perot pressure sensor has a maximum nonlinearity of 0.4%. The maximal error of the pressure after temperature decoupling is less than 1.05% over a pressure range of 0-0.5 MPa and a temperature range of 20°C-350°C. The batch fabrication technology makes the sensors low cost and high uniformity.

Fiber-optic Fabry-Perot pressure sensor based on low-temperature co-fired ceramic technology for high-temperature applications.

In this study, a novel batch-producible fiber-optic Fabry-Perot (FP) pressure sensor based on a low-temperature co-fired ceramic technology is proposed and experimentally demonstrated for high-temperature applications. The sensor is fabricated by inserting a well-cut single-mode fiber (SMF) into a zirconia fiber ferrule, followed by insertion of the overall structure into an alumina sensor head. The FP cavity in the sensor is formed by placing the end face of the SMF in parallel to the diaphragm. The external pressure can be detected by demodulating the FP cavity length of the sensor. A theoretical analysis indicates that the pressure sensitivity can be designed flexibly by adjusting the parameters of the ceramic diaphragm, radius, and thickness. Experimental results demonstrate that the pressure sensor exhibits a high linear sensitivity of approximately 0.1 µm/kPa at room temperature in the pressure range up to 160 kPa. The repeatability error and nonlinear error of three repeatable experiments are approximately 2.60% and smaller than 0.101%, respectively. The temperature coefficient and coefficient of the pressure-sensitivity changes with temperature are 0.023 µm/°C and 0.205 nm/(kPa°C) in the temperature range of 20°C-300°C.

Microbubble-based fiber-optic Fabry-Perot pressure sensor for high-temperature application.

Using arc discharge technology, we fabricated a fiber-optic Fabry-Perot (FP) pressure sensor with a very low temperature coefficient based on a microbubble that can be applied in a high-temperature environment. The thin-walled microbubble can be fabricated by heating the gas-pressurized hollow silica tube (HST) using a commercial fusion splicer. Then, the well-cut single-mode fiber (SMF) was inserted into the microbubble, and they were fused together. Thus, the FP cavity can be formed between the end of the SMF and the inner surface of the microbubble. The diameter of the microbubble can be up to 360 µm with the thickness of the wall being approximately 0.5 µm. Experimental results show that such a sensor has a linear sensitivity of approximately -6.382 nm/MPa, -5.912 nm/MPa at 20°C, and 600°C within the pressure range of 1 MPa. Due to the thermal expansion coefficient of the SMF being slightly larger than that of silica, we can fuse the SMF and the HST with different lengths; thus, the sensor has a very low temperature coefficient of approximately 0.17 pm/°C.

Diaphragm-Free Fiber-Optic Fabry-Perot Interferometric Gas Pressure Sensor for High Temperature Application.

A diaphragm-free fiber-optic Fabry-Perot (FP) interferometric gas pressure sensor is designed and experimentally verified in this paper. The FP cavity was fabricated by inserting a well-cut fiber Bragg grating (FBG) and hollow silica tube (HST) from both sides into a silica casing. The FP cavity length between the ends of the SMF and HST changes with the gas density. Using temperature decoupling method to improve the accuracy of the pressure sensor in high temperature environments. An experimental system for measuring the pressure under different temperatures was established to verify the performance of the sensor. The pressure sensitivity of the FP gas pressure sensor is 4.28 nm/MPa with a high linear pressure response over the range of 0.1-0.7 MPa, and the temperature sensitivity is 14.8 pm/°C under the range of 20-800 °C. The sensor has less than 1.5% non-linearity at different temperatures by using temperature decoupling method. The simple fabrication and low-cost will help sensor to maintain the excellent features required by pressure measurement in high temperature applications.