Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater.

This paper proposes the selective and ultrasensitive detection of Cd(II) ions using a cysteamine-functionalized microcantilever-based sensor with cross-linked ᴅʟ-glyceraldehyde (DL-GC). The detection time for various laboratory-based techniques is generally 12-24 hours. The experiments were performed to create self-assembled monolayers (SAMs) of cysteamine cross-linked with ᴅʟ-glyceraldehyde on the microcantilever surface to selectively capture the targeted Cd(II). The proposed portable microfluidic platform is able to achieve the detection in 20-23 min with a limit of detection (LOD) of 0.56 ng (2.78 pM), which perfectly describes its excellent performance over other reported techniques. Many researchers used nanoparticle-based sensors for the detection of heavy metal ions, but daily increasing usage and commercialization of nanoparticles are rapidly expanding their deleterious effect on human health and the environment. The proposed technique uses a blend of thin-film and microcantilever (micro-electromechanical systems) technology, which mitigate the disadvantages of the nanoparticle approaches, for the selective detection of Cd(II) with a LOD below the WHO limit of 3 µg/L.

Fabrication, calibration, and preliminary testing of microcantilever-based piezoresistive sensor for BioMEMS applications.

In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantilever-based sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the targeted biomolecules. The surface alteration comprises self-assembled monolayer (SAM) formation on gold (Au)/chromium (Cr) thin films. So, the Au/Cr coating is essential for most of the BioMEMS applications. The fabricated sensor uses the piezoresistive technique to capture the targeted biomolecules with the SAM/Au/Cr layer on top of the silicon dioxide layer. The stiffness (k) of the cantilever-based biosensor is a crucial design parameter for the low-pressure range and also influence the sensitivity of the microelectromechanical system-based sensor. Based on the calibration data, the average stiffness of the fabricated microcantilever with and without Au/Cr thin film is 141.39 and 70.53 mN/m, respectively, which is well below the maximum preferred range of stiffness for BioMEMS applications. The fabricated sensor is ultra-sensitive and selective towards Hg2+ ions in the presence of other heavy metal ions (HMIs) and good enough to achieve a lower limit of detection 0.75 ng/ml (3.73 pM/ml).

An ultra-sensitive DeltaR/R measurement system for biochemical sensors using piezoresistive micro-cantilevers.

Piezoresistive micro-cantilevers are interesting bio-sensing tool whose base resistance value (R) changes by a few parts per million (DeltaR) in deflected conditions. Measuring such a small deviation is always being a challenge due to noise. An advanced and reliable DeltaR/R measurement scheme is presented in this paper which can sense resistance changes down to 6 parts per million. The measurement scheme includes the half-bridge connected micro-cantilevers with mismatch compensation, precision op-amp based filters and amplifiers, and a lock-in amplifier based detector. The input actuating sine wave is applied from a function generator and the output dc voltage is displayed on a digital multimeter. The calibration is performed and instrument sensitivity is calculated. An experimental set-up using a probe station is discussed that demonstrates a combined performance of the measurement system and SU8-polysilicon cantilevers. The deflection sensitivity of such polymeric cantilevers is calculated. The system will be highly useful to detect bio-markers such as myoglobin and troponin that are released in blood during or after heart attacks.

A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS.

SU-8 has been primarily used for structural elements and microfludics components in MEMS. Microsystems for biological applications require immobilization of biomolecules on the MEMS structures. In order to functionalize SU-8 for such purposes, the surface needs to be modified. In this paper, we report a novel dry method of surface modification of SU-8 which is compatible with standard microfabrication techniques. The surface obtained by spin coating SU-8 (2002) on silicon wafer was modified by grafting amine groups using pyrolytic dissociation of ammonia in a hotwire CVD setup. To demonstrate the presence of amine groups on modified SU-8 surface, the surface characteristic after modification was assessed using Fourier transform infrared spectroscopy. The change in SU-8 surface morphology before and after surface modification was investigated using atomic force microscopy. To show the utility of this process for application in Bio-MEMS, SU-8 microcantilevers were fabricated and subjected to the same surface modification protocol. Following this, the cantilevers were incubated first in a suspension of human immunoglobulin (HIgG) and then in FITC tagged goat anti-human IgG in order to demonstrate the utility of the surface modification performed. The efficacy of the process was assessed by observing the cantilevers under a fluorescence microscope.