All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos.

Metasurfaces, optics made from subwavelength-scale nanostructures, have been limited to millimeter-sizes by the scaling challenge of producing vast numbers of precisely engineered elements over a large area. In this study, we demonstrate an all-glass 100 mm diameter metasurface lens (metalens) comprising 18.7 billion nanostructures that operates in the visible spectrum with a fast f-number (f/1.5, NA = 0.32) using deep-ultraviolet (DUV) projection lithography. Our work overcomes the exposure area constraints of lithography tools and demonstrates that large metasurfaces are commercially feasible. Additionally, we investigate the impact of various fabrication errors on the imaging quality of the metalens, several of which are specific to such large area metasurfaces. We demonstrate direct astronomical imaging of the Sun, the Moon, and emission nebulae at visible wavelengths and validate the robustness of such metasurfaces under extreme environmental thermal swings for space applications.

Genetic algorithm-powered non-sequential dwell time optimization for large optics fabrication.

Computer Controlled Optical Surfacing (CCOS) is widely applied for fabricating large aspheric optical surfaces. For large optics fabrication, various sizes of polishing tools are used sequentially. This raises the importance of efficient and globally optimized dwell time map of each tool. In this study, we propose a GEnetic Algorithm-powered Non-Sequential (GEANS) optimization technique to improve the feasibility of the conventional non-sequential optimization technique. GEANS consists of two interdependent parts: i) compose an influence matrix by imposing constraints on adjacent dwell points and ii) induce the desired dwell time map through the genetic algorithm. CCOS simulation results show that GEANS generates a preferable dwell time map that provides high figuring efficiency and structural similarity with the shape of target removal map, while improving computational efficiency more than 1000 times over the conventional non-sequential optimization method. The practicability of GEANS is demonstrated through error analyses. Random tool positioning error and tool influence function errors are imposed on dwell time maps. Compared to the conventional non-sequential optimization method, the power spectral density values of residual surface error from GEANS remain stable. GEANS also shows superior applicability when the maximum acceleration of a tool is applied.

Modeling and characterization of OASIS inflatable primary antenna by dual modality metrology.

OASIS (Orbiting Astronomical Satellite for Investigating Stellar Systems) is a space-based observatory with a 14 m diameter inflatable primary antenna that will perform high spectral resolution observations at terahertz frequencies. The large inflatable aperture, non-traditional surface configuration, and the double layered membrane structure afford unique challenges to the modeling and testing of the primary antenna. A 1-meter prototype of the primary antenna (A1) was built to validate our technical approach. A laser radar coordinate measuring system was adopted to measure the shape of A1. In addition, deflectometry was performed to monitor the stability of A1 during the radar measurement. Test cases pertaining to specific operational conditions expected for the 14 m OASIS primary were explored. The measured data were then compared to the Fichter model and Finite-element Analyzer for Inflatable Membranes (FAIM).

Non-planar illumination deflectometry for axicon metrology.

We introduce an on-axis deflectometry test configuration for axicon metrology. Axicons are challenging to measure due to their characteristically steep, convex geometry. However, if an axicon is coaxially aligned with a camera and a surrounding cylindrical illumination source, high-resolution surface measurements can be obtained via the principle of deflectometry. Emitted from the temporally modulated source, light deflects at the conical surface and into the entrance pupil of a camera, illuminating the full axicon aperture except the ø 0.5-mm rounded tip. Deflectometry measurements of a 100° and 140° axicon show holistic cone angle agreement within 0.035° against touch probe data and up to 7.93 root µm mean square difference from a best-fit cone. We discuss the non-planar illumination architecture, sensitivity, and experimental results of arbitrary apex angle axicons.

Computational vector fiducial for deflectometry system alignment.

One of deflectometry's cardinal strengths is its ability to measure highly dynamically sloped optics without needing physical null references. Accurate surface measurements using deflectometry, however, require precise calibration processes. In this Letter, we introduce an alignment technique using a computational fiducial to align a deflectometry system without additional hardware equipment (i.e., algorithmic innovation). Using the ray tracing program, we build relationships between the plane of the screen and detector and algorithmically generate a fiducial pattern for the deflectometry configuration. Since the fiducial pattern is based on ideal system geometry, misalignment of the unit under test with its target position causes a discrepancy between the actual image on the camera detector and the ideal fiducial image. We leverage G and C vector polynomials to quantify misalignment and estimate the alignment status through a reverse optimization method. Simulation and experimental results demonstrate that the proposed algorithm can align the 195mm×80mm of a rectangular aperture freeform optic within 10 µm of peak-to-valley accuracy. The computational fiducial-based alignment algorithm is simple to apply and can be an essential procedure for conventional methods of deflectometry system alignment.

RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors.

With the rapid evolution of synchrotron X-ray sources, the demand for high-precision X-ray mirrors has greatly increased. Single nanometer profile error is required to keep imaging capability at the diffraction limit. Ion Beam Figuring (IBF), as a highly deterministic surfacing technique, has been used for ultra-precision finishing of mirrors. One crucial step that guides the IBF process is dwell time calculation. A valid dwell time solution should be non-negative and duplicate the shape of the desired removal map. Another important aspect is to minimize the total dwell time. In this study, we propose a Robust Iterative Fourier Transform-based dwell time Algorithm (RIFTA) that automatically fulfills these requirements. First, the thresholded inverse filtering in Fourier transform-based deconvolution is stabilized and automated by optimizing the threshold value using the Nelder-Mead simplex algorithm. Second, a novel two-level iterative scheme is proposed to guarantee the minimized total dwell time with its non-negativity at each dwell point. Third, a bicubic resampling is employed to flexibly adapt the calculated dwell time map to any IBF process intervals. The performance of RIFTA is first studied with simulation, followed by a comparison with the other state-of-the-art dwell time algorithms. We then demonstrate with an experiment that, using the dwell time calculated by the RIFTA, the total dwell time is shortened by a factor of two and the RMS in a 5 × 50 mm clear aperture was reduced from 3.4 nm to 1.1 nm after one IBF run, which proves the effectiveness and the efficiency of the proposed algorithm.

Development of a position-velocity-time-modulated two-dimensional ion beam figuring system for synchrotron x-ray mirror fabrication.

With the rapid evolution of synchrotron x-ray sources, the demand for high-quality precision x-ray mirrors has greatly increased. Single nanometer shape accuracy is required to keep imaging capabilities at the diffraction limit. Ion beam figuring (IBF) has been used frequently for ultra-precision finishing of mirrors, but achieving the ultimate accuracy depends on three important points: careful alignment, accurate dwell time calculation and implementation, and accurate optical metrology. The Optical Metrology Group at National Synchrotron Light Source II has designed and built a position-velocity-time-modulated two-dimensional IBF system (PVT-IBF) with three novel characteristics: (1) a beam footprint on the mirror was used as a reference to align the coordinate systems between the metrology and the IBF hardware; (2) the robust iterative Fourier transform-based dwell time algorithm proposed by our group was applied to obtain an accurate dwell time map; and (3) the dwell time was then transformed to velocities and implemented with the PVT motion scheme. In this study, the technical aspects of the PVT-IBF systems are described in detail, followed by an experimental demonstration of the figuring results. In our first experiment, the 2D RMS in a $ 50\;{\rm mm} \times 5\;{\rm mm} $50mm×5mm clear aperture was reduced from 3.4 to 1.1 nm after one IBF run. In our second experiment, due to a 5 mm pinhole installed in front of the source, the 2D RMS in a $ 50\;{\rm mm} \times 5\;{\rm mm} $50mm×5mm clear aperture was reduced from 39.1 to 1.9 nm after three IBF runs, demonstrating that our PVT-IBF solution is an effective and deterministic figuring process.

Multi-field merit-function-based regression method for Wide Field Infrared Survey Telescope grism system alignment.

The grating prism (grism), slitless spectrometer aboard the Wide Field Infrared Survey Telescope enables a survey of emission-line galaxies. To facilitate its opto-mechanical alignment, a six-degree-of-freedom element was fabricated using alignment fiducials and integral flats and used to measure a wavefront by using an infrared interferometer placed at various field points over a 20×14 deg field of view in the grism coordinate frame. Modeling identified E2 to be the most sensitive element to the grism wavefront error and was used to efficiently align the system. The merit function regression method for a wide field of view was further used to verify the higher efficiency and accuracy of the proposed alignment technique compared with the conventional sensitivity table method.