1.
J Vac Sci Technol B Nanotechnol Microelectron
; 38(5)2020.
Artigo
em Inglês
| MEDLINE
| ID: mdl-34131513
RESUMO
This paper reports high-throughput, light-based, through-focus scanning optical microscopy (TSOM) for detecting industrially relevant sub-50 nm tall nanoscale contaminants. Measurement parameter optimization to maximize the TSOM signal using optical simulations made it possible to detect the nanoscale contaminants. Atomic force and scanning electron microscopies were used as reference methods for comparison.