Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas.

A calibration routine is presented for an array of retarding field energy analyzer (RFEA) sensors distributed across a planar electrode surface with a diameter of 450 mm that is exposed to a low temperature plasma. Such an array is used to measure the ion velocity distribution function at the electrode with radial and azimuthal resolutions as a basis for knowledge-based plasma process development. The presented calibration procedure is tested by exposing such an RFEA array to a large-area capacitively coupled argon plasma driven by two frequencies (13.56 and 27.12 MHz) at a gas pressure of 0.5 Pa. Up to 12 sensors are calibrated with respect to the 13th sensor, called the global reference sensor, by systematically varying the sensor positions across the array. The results show that the uncalibrated radial and azimuthal ion flux profiles are incorrect. The obtained profiles are different depending on the sensor arrangement and exhibit different radial and azimuthal behaviors. Based on the proposed calibration routine, the ion flux profiles can be corrected and a meaningful interpretation of the measured data is possible. The calibration factors are almost independent of the external process parameters, namely, input power, gas pressure, and gas mixture, investigated under large-area single-frequency capacitively coupled plasma conditions (27.12 MHz). Thus, mean calibration factors are determined based on 45 different process conditions and can be used independent of the plasma conditions. The temporal stability of the calibration factors is found to be limited, i.e., the calibration must be repeated periodically.

Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring.

Single frequency, geometrically symmetric Radio-Frequency (rf) driven atmospheric pressure plasmas exhibit temporally and spatially symmetric patterns of electron heating, and consequently, charged particle densities and fluxes. Using a combination of phase-resolved optical emission spectroscopy and kinetic plasma simulations, we demonstrate that tailored voltage waveforms consisting of multiple rf harmonics induce targeted disruption of these symmetries. This confines the electron heating to small regions of time and space and enables the electron energy distribution function to be tailored.

Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas.

Self-organized spatial structures in the light emission from the ion-ion capacitive rf plasma of a strongly electronegative gas (CF_{4}) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

Photoelectric Franck-Hertz experiment and its kinetic analysis by Monte Carlo simulation.

The electrical characteristics of a photoelectric Franck-Hertz cell are measured in argon gas over a wide range of pressure, covering conditions where elastic collisions play an important role, as well as conditions where ionization becomes significant. Photoelectron pulses are induced by the fourth harmonic UV light of a diode-pumped Nd:YAG laser. The electron kinetics, which is far more complex compared to the naive picture of the Franck-Hertz experiment, is analyzed via Monte Carlo simulation. The computations provide the electrical characteristics of the cell, the energy and velocity distribution functions, and the transport parameters of the electrons, as well as the rate coefficients of different elementary processes. A good agreement is obtained between the cell's measured and calculated electrical characteristics, the peculiarities of which are understood by the simulation studies.