Indium-zinc-oxide thin films produced by low-cost chemical solution deposition: Tuning the microstructure, optical and electrical properties with the processing conditions.

Indium-zinc-oxide (IZO) films were prepared by spin coating an ethanol-ethylene-glycol precursor solution with a Zn/(In + Zn) ratio of 0.36 on glass. The effects of temperature on the structure, microstructure, electrical, and optical properties of the IZO thin films were investigated by thermal analysis, Fourier-transform infrared spectroscopy, X-ray diffraction, electron and atomic-force microscopy, X-ray photoelectron spectroscopy and variable-angle spectroscopic ellipsometry. The prepared IZO thin films heated at 500, 600, and 700 °C in air were transparent, without long-range ordering, and with an RMS surface roughness of less than 1 nm. The lowest electrical resistivity at room temperature, 0.0069 Ωcm, was observed for the 115-nm-thick IZO thin film heated at 600 °C in air and subsequently post-annealed in Ar/H2. The thin film exhibited a microstructure characterized by grains typically 20 nm in size and had no organic residues. This film exhibits uniaxial optical anisotropy due to its ultra-thin lamellae with a high electron density. The ordinary refractive index was fitted as a Tauc-Lorentz-Urbach function, which is typical of an indirect absorption edge occurring in amorphous semiconductor materials. The principal absorption peak with an onset at about 2.8 eV and a Tauc gap energy of ∼2.6 eV is similar to those observed for In2O3. The described process of chemical solution deposition and subsequent curing is promising for the low-cost fabrication of IZO thin films for transparent electronics, and can be used to tune the structure and microstructure of IZO thin films, as well as their electrical and optical properties.

Lead-Free Sodium Potassium Niobate-Based Multilayer Structures for Ultrasound Transducer Applications.

Thick films with nominal composition (K0.5Na0.5)0.99Sr0.005NbO3 (KNNSr) on porous ceramics with identical nominal composition were investigated as potential candidates for environmentally benign ultrasonic transducers composed entirely of inorganic materials. In this paper, the processing of the multilayer structure, namely, the thick film by screen printing and the porous ceramic by sacrificial template method, is related to their phase composition, microstructure, electromechanical, and acoustic properties to understand the performance of the devices. The ceramic with a homogeneous distribution of 8 µm pores had a sufficiently high attenuation coefficient of 0.5 dB/mm/MHz and served as an effective backing. The KNNSr thick films sintered at 1100 °C exhibited a homogeneous microstructure and a relative density of 97%, contributing to a large dielectric permittivity and elastic constant and yielding a thickness coupling factor kt of ~30%. The electroacoustic response of the multilayer structure in water provides a centre frequency of 15 MHz and a very large fractional bandwidth (BW) of 127% at -6 dB. The multilayer structure is a candidate for imaging applications operating above 15 MHz, especially by realising focused-beam structure through lenses to further increase the sensitivity in the focal zone.

Screen Printed Copper and Tantalum Modified Potassium Sodium Niobate Thick Films on Platinized Alumina Substrates.

We show how sintering in different atmospheres affects the structural, microstructural, and functional properties of ~30 µm thick films of K0.5Na0.5NbO3 (KNN) modified with 0.38 mol% K5.4Cu1.3Ta10O29 and 1 mol% CuO. The films were screen printed on platinized alumina substrates and sintered at 1100 °C in oxygen or in air with or without the packing powder (PP). The films have a preferential crystallographic orientation of the monoclinic perovskite phase in the [100] and [-101] directions. Sintering in the presence of PP contributes to obtaining phase-pure films, which is not the case for the films sintered without any PP notwithstanding the sintering atmosphere. The latter group is characterized by a slightly finer grain size, from 0.1 µm to ~2 µm, and lower porosity, ~6% compared with ~13%. Using piezoresponse force microscopy (PFM) and electron backscatter diffraction (EBSD) analysis of oxygen-sintered films, we found that the perovskite grains are composed of multiple domains which are preferentially oriented. Thick films sintered in oxygen exhibit a piezoelectric d33 coefficient of 64 pm/V and an effective thickness coupling coefficient kt of 43%, as well as very low mechanical losses of less than 0.5%, making them promising candidates for lead-free piezoelectric energy harvesting applications.

Acoustic Properties of Porous Lead Zirconate Titanate Backing for Ultrasonic Transducers.

For transducer design, it is essential to know the acoustic properties of the materials in their operating conditions. At frequencies over 15 MHz, standard methods are not well adapted because layers are very thin and backings have very high attenuation. In this article, we report on an original method for measuring the acoustic properties in the 15-25 MHz frequency range, corresponding to typical skin-imaging applications, using a backing/piezoelectric multilayer structure. Onto a porous Pb(Zr0.53Ti0.47O3 (PZT) substrate, a piezoelectric PZT-based layer with a thickness of [Formula: see text] was deposited and directly used to excite an acoustic signal into water. Herein, the measured signal corresponds to the wave that is first reflected on a target in water, then propagates back to the multilayer structure, and is transmitted through the thick film and further to the rear face of the porous backing, where it is again reflected and returns to the piezoelectric thick film, thus avoiding overlap with the electrical excitation signal. Two types of PZT backings with similar porosity of ~20% and spherical pores with size of 1.5 and 10 [Formula: see text] were processed. The ultrasound group velocities were measured at ~3500 m/s for both samples. The acoustic attenuation of the backings with pore size of 1.5 and 10 [Formula: see text] were 12 and 33 dB/mm, respectively, measured at 19 MHz. This advanced measuring technique demonstrated potential for the simple measurements of acoustic properties of backing at high frequencies in operating conditions. Importantly, this method also enables rapid determination of the minimum required thickness of the backing to act as a semi-infinite medium, for high-frequency transducer applications.

Lead zirconate titanate-based thick films for high-frequency focused ultrasound transducers prepared by electrophoretic deposition.

An electrophoretic deposition (EPD) process with high deposition rate was used to fabricate a curved piezoelectric thick film devoted to high-frequency transducers for medical imaging. Niobium-doped lead zirconate titanate (PZTNb) powder was stabilized in ethanol to prepare a suspension with high zeta potential and low conductivity. A gold layer, pad-printed and fired on a curved porous PZT substrate, was used as the working electrode for the deposition of the PZTNb thick film. This substrate was chosen because it has the required properties (acoustic impedance and attenuation) to be used directly as a backing for the high-frequency transducer, leading to a simplified process for transducer assembly with this integrated structure. PZT-Nb thick films were also deposited by EPD on flat gold-coated alumina substrates as a reference. The thickness of the films was between 20 and 35 µm, and their electromechanical performance was comparable to standard PZT bulk ceramics with a thickness coupling factor of 48%. For the curved thick film, the thickness coupling factor was slightly lower. The corresponding integrated structure was used to fabricate a transducer with a center frequency of 40 MHz and an f-number of 2.8. It was integrated into a realtime ultrasound scanner and used to image human forearm skin; the resulting images showed, for the first time, the efficacy of the EPD process for these imaging applications.

Interactions between lead-zirconate titanate, polyacrylic acid, and polyvinyl butyral in ethanol and their influence on electrophoretic deposition behavior.

Electrophoretic deposition (EPD) is an attractive method for the fabrication of a few tens of micrometer-thick piezoelectric layers on complex-shape substrates that are used for manufacturing high-frequency transducers. Niobium-doped lead-zirconate titanate (PZT Nb) particles were stabilized in ethanol using poly(acrylic acid) (PAA). With Fourier-transform infrared spectroscopy (FT-IR), we found that the deprotonated carboxylic group from the PAA is coordinated with the metal in the perovskite PZT Nb structure, resulting in a stable ethanol-based suspension. The hydroxyl group from the polyvinyl butyral added into the suspension to prevent the formation of cracks in the as-deposited layer did not interact with the PAA-covered PZT Nb particles. PVB acts as a free polymer in ethanol-based suspensions. The electrophoretic deposition of micro- and nanometer-sized PZT Nb particles from ethanol-based suspensions onto electroded alumina substrates was attempted in order to obtain uniform, crack-free deposits. The interactions between the PZT Nb particles, the PAA, and the PVB in ethanol will be discussed and related to the properties of the suspensions, the deposition yield and the morphology of the as-deposited PZT Nb thick film.

High-performance PMN-PT thick films.

This article describes some of our work on 0.65Pb(Mg1/3Nb(2/3)O3-0.35PbTiO3 (0.65PMN-0.35PT) thick films printed on alumina substrates. These thick films, with the nominal composition 0.65Pb(Mg1/3Nb(2/3)O3-0.35PbTiO3, were produced by screen-printing and firing a paste prepared from an organic vehicle and pre-reacted fine particles of avery chemically homogeneous powder. To improve the adhesion of the 0.65PMN-0.35PT to the platinized alumina substrate,a Pb(Zr0.53Ti0.47)O3 layer was deposited between the electrode and the substrate. The samples were then sintered at 950 °C for 2 h with various amounts of packing powder on the alumina (Al2O3) substrates. The sintering procedure was optimized to obtain dense 0.65PMN-0.35PT films. The films were then characterized using scanning electron microscopy as well as measurements of the dielectric and piezoelectric constants.The electrostrictive behavior of the 0.65PMN-0.35PT thick films was investigated using an atomic force microscope(AFM). Finally, substrate-free, large-displacement bending type actuators were prepared and characterized, and the normalized displacement (i.e., the displacement per unit length) of the actuators was determined to be 55 µm/cm at 3.6 kV/cm.