Tantalum pentoxide: a new material platform for high-performance dielectric metasurface optics in the ultraviolet and visible region.

Dielectric metasurfaces, composed of planar arrays of subwavelength dielectric structures that collectively mimic the operation of conventional bulk optical elements, have revolutionized the field of optics by their potential in constructing high-efficiency and multi-functional optoelectronic systems on chip. The performance of a dielectric metasurface is largely determined by its constituent material, which is highly desired to have a high refractive index, low optical loss and wide bandgap, and at the same time, be fabrication friendly. Here, we present a new material platform based on tantalum pentoxide (Ta2O5) for implementing high-performance dielectric metasurface optics over the ultraviolet and visible spectral region. This wide-bandgap dielectric, exhibiting a high refractive index exceeding 2.1 and negligible extinction coefficient across a broad spectrum, can be easily deposited over large areas with good quality using straightforward physical vapor deposition, and patterned into high-aspect-ratio subwavelength nanostructures through commonly-available fluorine-gas-based reactive ion etching. We implement a series of high-efficiency ultraviolet and visible metasurfaces with representative light-field modulation functionalities including polarization-independent high-numerical-aperture lensing, spin-selective hologram projection, and vivid structural color generation, and the devices exhibit operational efficiencies up to 80%. Our work overcomes limitations faced by scalability of commonly-employed metasurface dielectrics and their operation into the visible and ultraviolet spectral range, and provides a novel route towards realization of high-performance, robust and foundry-manufacturable metasurface optics.

Broadband Tunable Infrared Light Emission from Metal-Oxide-Semiconductor Tunnel Junctions in Silicon Photonics.

Broadband near-infrared light emitting tunnel junctions are demonstrated with efficient coupling to a silicon photonic waveguide. The metal oxide semiconductor devices show long hybrid photonic-plasmonic mode propagation lengths of approximately 10 µm and thus can be integrated into an overcoupled resonant cavity with quality factor Q ≈ 49, allowing for tens of picowatt near-infrared light emission coupled directly into a waveguide. The electron inelastic tunneling transition rate and the cavity mode density are modeled, and the transverse magnetic (TM) hybrid mode excitation rate is derived. The results coincide well with polarization resolved experiments. Additionally, current-stressed devices are shown to emit unpolarized light due to radiative recombination inside the silicon electrode.

Disordered metasurface enabled single-shot full-Stokes polarization imaging leveraging weak dichroism.

Polarization, one of the fundamental properties of light, is critical for certain imaging applications because it captures information from the scene that cannot directly be recorded by traditional intensity cameras. Currently, mainstream approaches for polarization imaging rely on strong dichroism of birefringent crystals or artificially fabricated structures that exhibit a high diattenuation typically exceeding 99%, which corresponds to a polarization extinction ratio (PER) >~100. This not only limits the transmission efficiency of light, but also makes them either offer narrow operational bandwidth or be non-responsive to the circular polarization. Here, we demonstrate a single-shot full-Stokes polarization camera incorporating a disordered metasurface array with weak dichroism. The diattenuation of the metasurface array is ~65%, which corresponds to a PER of ~2. Within the framework of compressed sensing, the proposed disordered metasurface array serves as an efficient sensing matrix. By incorporating a mask-aware reconstruction algorithm, the signal can be accurately recovered with a high probability. In our experiments, the proposed approach exhibits high-accuracy full-Stokes polarimetry and high-resolution real-time polarization imaging. Our demonstration highlights the potential of combining meta-optics with reconstruction algorithms as a promising approach for advanced imaging applications.

Scalable two-tier protruding micro-/nano-optoelectrode arrays with hybrid optical-electrical modalities by hierarchical modular design.

In situ spatiotemporal characterization of correlated bioelectrical and biochemical processes in living multicellular systems remains a formidable challenge but can offer crucial opportunities in biology and medicine. A promising approach is to develop bio-interfaced multifunctional micro-/nano-sensor arrays with complementary biophotonic-bioelectronic modalities and biomimetic topology to achieve combined bioelectrical and biochemical detection and tight device-cell coupling. However, a system-level engineering strategy is still missing to create multifunctional micro-/nano-sensor arrays that meet the multifaceted design requirements for in situ spatiotemporal characterizations of living systems. Here, we demonstrate a hierarchical modular design and fabrication approach to develop scalable two-tier protruding micro-/nano-optoelectrode arrays that extend the design space of biomimetic micro-/nano-pillar topology, plasmonic nanoantenna-based biophotonic function in surface-enhanced Raman spectroscopy (SERS), and micro-/nano-electrode-based bioelectronics function in electrochemical impedance spectroscopy (EIS). Notably, two-tier protruding micro-/nano-optoelectrode arrays composed of nanolaminate nanoantenna arrays on top of micropillar electrode arrays can support plasmonic nanocavity modes with high SERS enhancement factors (≈106) and large surface-to-volume ratio with significantly reduced interfacial impedance in EIS measurements. We envision that scalable two-tier protruding micro-/nano-optoelectrode arrays can potentially serve as bio-interfaced multifunctional micro-/nano-sensor arrays for in situ correlated spatiotemporal bioelectrical-biochemical measurements of living multicellular systems such as neuronal network cultures, cancerous organoids, and microbial biofilms.

Synthesizing ultrafast optical pulses with arbitrary spatiotemporal control.

The ability to control the instantaneous state of light, from high-energy pulses down to the single-photon level, is an indispensable requirement in photonics. This has, for example, facilitated spatiotemporal probing and coherent control of ultrafast light-matter interactions, and enabled capabilities such as generation of exotic states of light with complexity, or at wavelengths, that are not easily accessible. Here, by leveraging the multifunctional control of light at the nanoscale offered by metasurfaces embedded in a Fourier transform setup, we present a versatile approach to synthesize ultrafast optical transients with arbitrary control over its complete spatiotemporal evolution. Our approach, supporting an ultrawide bandwidth with simultaneously high spectral and spatial resolution, enables ready synthesis of complex states of structured space-time wave packets. We expect our results to offer unique capabilities in coherent ultrafast light-matter interactions and facilitate applications in microscopy, communications, and nonlinear optics.

Trilobite-inspired neural nanophotonic light-field camera with extreme depth-of-field.

A unique bifocal compound eye visual system found in the now extinct trilobite, Dalmanitina socialis, may enable them to be sensitive to the light-field information and simultaneously perceive both close and distant objects in the environment. Here, inspired by the optical structure of their eyes, we demonstrate a nanophotonic light-field camera incorporating a spin-multiplexed bifocal metalens array capable of capturing high-resolution light-field images over a record depth-of-field ranging from centimeter to kilometer scale, simultaneously enabling macro and telephoto modes in a snapshot imaging. By leveraging a multi-scale convolutional neural network-based reconstruction algorithm, optical aberrations induced by the metalens are eliminated, thereby significantly relaxing the design and performance limitations on metasurface optics. The elegant integration of nanophotonic technology with computational photography achieved here is expected to aid development of future high-performance imaging systems.

Multifunctional metasurfaces enabled by simultaneous and independent control of phase and amplitude for orthogonal polarization states.

Monochromatic light can be characterized by its three fundamental properties: amplitude, phase, and polarization. In this work, we propose a versatile, transmission-mode all-dielectric metasurface platform that can independently manipulate the phase and amplitude for two orthogonal states of polarization in the visible frequency range. For proof-of-concept experimental demonstration, various single-layer metasurfaces composed of subwavelength-spaced titanium-dioxide nanopillars are designed, fabricated, and characterized to exhibit the ability of polarization-switchable multidimensional light-field manipulation, including polarization-switchable grayscale nanoprinting, nonuniform cylindrical lensing, and complex-amplitude holography. We envision the metasurface platform demonstrated here to open new possibilities toward creating compact multifunctional optical devices for applications in polarization optics, information encoding, optical data storage, and security.

Broadband generation of perfect Poincaré beams via dielectric spin-multiplexed metasurface.

The term Poincaré beam, which describes the space-variant polarization of a light beam carrying spin angular momentum (SAM) and orbital angular momentum (OAM), plays an important role in various optical applications. Since the radius of a Poincaré beam conventionally depends on the topological charge number, it is difficult to generate a stable and high-quality Poincaré beam by two optical vortices with different topological charge numbers, as the Poincaré beam formed in this way collapses upon propagation. Here, based on an all-dielectric metasurface platform, we experimentally demonstrate broadband generation of a generalized perfect Poincaré beam (PPB), whose radius is independent of the topological charge number. By utilizing a phase-only modulation approach, a single-layer spin-multiplexed metasurface is shown to achieve all the states of PPBs on the hybrid-order Poincaré Sphere for visible light. Furthermore, as a proof-of-concept demonstration, a metasurface encoding multidimensional SAM and OAM states in the parallel channels of elliptical and circular PPBs is implemented for optical information encryption. We envision that this work will provide a compact and efficient platform for generation of PPBs for visible light, and may promote their applications in optical communications, information encryption, optical data storage and quantum information sciences.

Plasmonic Electronic Raman Scattering as Internal Standard for Spatial and Temporal Calibration in Quantitative Surface-Enhanced Raman Spectroscopy.

Ultrasensitive surface-enhanced Raman spectroscopy (SERS) still faces difficulties in quantitative analysis because of its susceptibility to local optical field variations at plasmonic hotspots in metallo-dielectric nanostructures. Current SERS calibration approaches using Raman tags have inherent limitations due to spatial occupation competition with analyte molecules, spectral interference with analyte Raman peaks, and photodegradation. Herein, we report that plasmon-enhanced electronic Raman scattering (ERS) signals from metal can serve as an internal standard for spatial and temporal calibration of molecular Raman scattering (MRS) signals from analyte molecules at the same hotspots, enabling rigorous quantitative SERS analysis. We observe a linear dependence between ERS and MRS signal intensities upon spatial and temporal variations of excitation optical fields, manifesting the |E|4 enhancements for both ERS and MRS processes at the same hotspots in agreement with our theoretical prediction. Furthermore, we find that the ERS calibration's performance limit can result from orientation variations of analyte molecules at hotspots.

Chiroptical Response of Aluminum Nanocrescents at Ultraviolet Wavelengths.

Manipulation of plasmon modes at ultraviolet wavelengths using engineered nanophotonic devices allows for the development of high-sensitivity chiroptical spectroscopy systems. We present here an experimental framework based on aluminum-based crescent-shaped nanostructures that exhibit a strong chiroptical response at ultraviolet wavelengths. Through utilization of higher-order plasmon modes in wavelength-scale nanostructures, we address the inherent fabrication challenges in scaling the response to higher frequencies. Additionally, the distinct far-field spectral response types are analyzed within a coupled-oscillator model framework. We find two competing chiroptical response types that contribute toward potential ambiguity in the interpretation of the circular dichroism spectra. The first, optical activity, originates from the interaction between hybridized eigenmodes, whereas the second manifests as a response superficially similar to optical activity but originating instead from differential near-field absorption modes. The study of the chiroptical response from nanoplasmonic devices presented here is expected to aid the development of next-generation chiroptical spectroscopy systems.

Low-loss metasurface optics down to the deep ultraviolet region.

Shrinking conventional optical systems to chip-scale dimensions will benefit custom applications in imaging, displaying, sensing, spectroscopy, and metrology. Towards this goal, metasurfaces-planar arrays of subwavelength electromagnetic structures that collectively mimic the functionality of thicker conventional optical elements-have been exploited at frequencies ranging from the microwave range up to the visible range. Here, we demonstrate high-performance metasurface optical components that operate at ultraviolet wavelengths, including wavelengths down to the record-short deep ultraviolet range, and perform representative wavefront shaping functions, namely, high-numerical-aperture lensing, accelerating beam generation, and hologram projection. The constituent nanostructured elements of the metasurfaces are formed of hafnium oxide-a loss-less, high-refractive-index dielectric material deposited using low-temperature atomic layer deposition and patterned using high-aspect-ratio Damascene lithography. This study opens the way towards low-form factor, multifunctional ultraviolet nanophotonic platforms based on flat optical components, enabling diverse applications including lithography, imaging, spectroscopy, and quantum information processing.

Efficient Surface Plasmon Polariton Excitation and Control over Outcoupling Mechanisms in Metal-Insulator-Metal Tunneling Junctions.

Surface plasmon polaritons (SPPs) are viable candidates for integration into on-chip nano-circuitry that allow access to high data bandwidths and low energy consumption. Metal-insulator-metal tunneling junctions (MIM-TJs) have recently been shown to excite and detect SPPs electrically; however, experimentally measured efficiencies and outcoupling mechanisms are not fully understood. It is shown that the MIM-TJ cavity SPP mode (MIM-SPP) can outcouple via three pathways to i) photons via scattering of MIM-SPP at the MIM-TJ interfaces, ii) SPPs at the metal-dielectric interfaces (bound-SPPs) by mode coupling through the electrodes, and iii) photons and bound-SPP modes by mode coupling at the MIM-TJ edges. It is also shown that, for Al-AlO x -Cr-Au MIM-TJs on glass, the MIM-SPP mode outcouples efficiently to bound-SPPs through either electrode (pathway 2); this outcoupling pathway can be selectively turned on and off by changing the respective electrode thickness. Outcoupling at the MIM-TJ edges (pathway 3) is efficient and sensitive to the edge topography, whereas most light emission originates from roughness-induced scattering of the MIM-SPP mode (pathway 1). Using an arbitrary roughness profile, it is demonstrated that various roughness facets can raise MIM-SPP outcoupling efficiencies to 0.62%. These results pave the way for understanding the topographical parameters needed to develop CMOS-compatible plasmonic circuitry elements.

Photonic Spin-Multiplexing Metasurface for Switchable Spiral Phase Contrast Imaging.

As the two most representative operation modes in an optical imaging system, bright-field imaging and phase contrast imaging can extract different morphological information on an object. Developing a miniature and low-cost system capable of switching between these two imaging modes is thus very attractive for a number of applications, such as biomedical imaging. Here, we propose and demonstrate that a Fourier transform setup incorporating an all-dielectric metasurface can perform a two-dimensional spatial differentiation operation and thus achieve isotropic edge detection. In addition, the metasurface can provide two spin-dependent, uncorrelated phase profiles across the entire visible spectrum. Therefore, based on the spin-state of incident light, the system can be used for either diffraction-limited bright-field imaging or isotropic edge-enhanced phase contrast imaging. Combined with the advantages of planar architecture and ultrathin thickness of the metasurface, we envision this approach may open new vistas in the very interdisciplinary field of imaging and microscopy.

Photorealistic full-color nanopainting enabled by low-loss metasurface.

We realize a dielectric metasurface that enables full-color generation and ultrasmooth brightness variation. The reproduced artwork "Girl with a Pearl Earring" features photorealistic color representation and stereoscopic image impression, mimicking the texture of an oil-painting.

Broadband detection of multiple spin and orbital angular momenta via dielectric metasurface.

Light beams carrying spin angular momentum (SAM) and orbital angular momentum (OAM) have created novel opportunities in the areas of optical communications, imaging, micromanipulation and quantum optics. However, complex optical setups are required to simultaneously manipulate, measure and analyze these states, which significantly limits system integration. Here, we introduce a novel detection approach for measuring multiple SAM and OAM modes simultaneously through a planar nanophotonic demultiplexer based on an all-dielectric metasurface. Coaxial light beams carrying multiple SAM and OAM states of light upon transmission through the demultiplexer are spatially separated into a range of vortex beams with different topological charge, each propagating along a specific wavevector. The broadband response, material dispersion and momentum conservation further enable the demultiplexer to achieve wavelength demultiplexing. We envision the ultracompact multifunctional architecture to enable simultaneous manipulation and measurement of polarization and spin encoded photon states with applications in integrated quantum optics and optical communications.

Independent Amplitude Control of Arbitrary Orthogonal States of Polarization via Dielectric Metasurfaces.

Exquisite polarization control using optical metasurfaces has attracted considerable attention thanks to their ability to manipulate multichannel independent wavefronts with subwavelength resolution. Here we present a new class of metasurface polarization optics, which enables imposition of two arbitrary and independent amplitude profiles on any pair of orthogonal states of polarization. The implementation method involves a polarization-dependent interference mechanism achieved by constructing a metasurface composed of an array of nanoscale birefringent waveplates. Based on this principle, we experimentally demonstrate chiral grayscale metasurface and chiral shadow rendering of structured light. These results illustrate a general approach interlinking amplitude profiles and orthogonal states of polarization and expands the scope of metasurface polarization shaping optics.

Nano-opto-electro-mechanical switches operated at CMOS-level voltages.

Combining reprogrammable optical networks with complementary metal-oxide semiconductor (CMOS) electronics is expected to provide a platform for technological developments in on-chip integrated optoelectronics. We demonstrate how opto-electro-mechanical effects in micrometer-scale hybrid photonic-plasmonic structures enable light switching under CMOS voltages and low optical losses (0.1 decibel). Rapid (for example, tens of nanoseconds) switching is achieved by an electrostatic, nanometer-scale perturbation of a thin, and thus low-mass, gold membrane that forms an air-gap hybrid photonic-plasmonic waveguide. Confinement of the plasmonic portion of the light to the variable-height air gap yields a strong opto-electro-mechanical effect, while photonic confinement of the rest of the light minimizes optical losses. The demonstrated hybrid architecture provides a route to develop applications for CMOS-integrated, reprogrammable optical systems such as optical neural networks for deep learning.

Microscopic origin of the chiroptical response of optical media.

The potential for enhancing the optical activity of natural chiral media using engineered nanophotonic components has been central in the quest toward developing next-generation circular-dichroism spectroscopic techniques. Through confinement and manipulation of optical fields at the nanoscale, ultrathin optical elements have enabled a path toward achieving order-of-magnitude enhancements in the chiroptical response. Here, we develop a model framework to describe the underlying physics governing the origin of the chiroptical response in optical media. The model identifies optical activity to originate from electromagnetic coupling to the hybridized eigenstates of a coupled electron-oscillator system, whereas differential absorption of opposite handedness light, though resulting in a far-field chiroptical response, is shown to have incorrectly been identified as optical activity. We validate the model predictions using experimental measurements and show them to also be consistent with observations in the literature. The work provides a generalized framework for the design and study of chiroptical systems.

Revisiting the Photon-Drag Effect in Metal Films.

The photon-drag effect, the rectified current in a medium induced by conservation of momentum of absorbed or redirected light, is a unique probe of the detailed mechanisms underlying radiation pressure. We revisit this effect in gold, a canonical Drude metal. We discover that the signal for p-polarized illumination in ambient air is affected in both sign and magnitude by adsorbed molecules, opening previous measurements for reinterpretation. Further, we show that the intrinsic sign of the photon-drag effect is contrary to the prevailing intuitive model of direct momentum transfer to free electrons.

Ultrafast optical pulse shaping using dielectric metasurfaces.

Advances in ultrafast lasers, chirped pulse amplifiers, and frequency comb technology require fundamentally new pulse-modulation strategies capable of supporting unprecedentedly large bandwidth and high peak power while maintaining high spectral resolution. We demonstrate how dielectric metasurfaces can be leveraged to shape the temporal profile of a near-infrared femtosecond pulse. Finely tailored pulse-shaping operations, including splitting, compression, chirping, and higher-order distortion, are achieved using a Fourier-transform setup embedding metasurfaces able to manipulate, simultaneously and independently, the amplitude and phase of the constituent frequency components of the pulse. Exploiting metasurfaces to manipulate the temporal characteristics of light expands their impact and opens new vistas in the field of ultrafast science and technology.