RESUMO
Stretchable strain sensors are essential for various applications such as wearable electronics, prosthetics, and soft robotics. Strain sensors with high strain range, minimal hysteresis, and fast response speed are highly desirable for accurate measurements of large and dynamic deformations of soft bodies. Current stretchable strain sensors mostly rely on deformable conducting materials, which often have difficulties in achieving these properties simultaneously. In this study, we introduce capacitive strain sensor concepts based on origami-inspired three-dimensional mesoscale electrodes formed by a mechanically guided assembly process. These sensors exhibit up to 200% stretchability with 1.2% degree of hysteresis, <22 ms response time, small sensing area (~5 mm2), and directional strain responses. To showcase potential applications, we demonstrate the use of distributed strain sensors for measuring multimodal deformations of a soft continuum arm.
RESUMO
Various zinc oxide films were deposited by ion-beam sputter deposition (IBSD) under different oxygen partial pressures (P(O2)) at room temperature. The as-deposited ZnO films fabricated at P(O2)>1.0×10(-4) Torr had poly-crystalline structures to absorb water on the surface at ambient condition. Simultaneously, the film surfaces were covered and smoothed by the surface layers formed with the water, hydroxyl (OH(-)) groups, and ZnO materials investigated by X-ray photoelectron spectroscopy (XPS). When the compositions of the surface layers were used in a multilayer fitting model of spectroscopic ellipsometry, the actual optical refractive index of the ZnO film deposited at P(O2)=1.2×10(-4) Torr was found to be about 1.9618 at λ=550 nm.
