Durable Nano-Flower Structured Foam Coupled with Electrically-Driven in Situ Aeration Enable High-Flux Oil/Water Emulsion Separation with Dynamic Antifouling Ability.

The conventional membranes used for separating oil/water emulsions are typically limited by the properties of the membrane materials and the impact of membrane fouling, making continuous long-term usage unachievable. In this study, a filtering electrode with synchronous self-cleaning functionality is devised, exhibiting notable antifouling ability and an extended operational lifespan, suitable for the continuous separation of oil/water emulsions. Compared with the original Ti foam, the in situ growth of NiTi-LDH (Layered double hydroxide) nano-flowers endows the modified Ti foam (NiTi-LDH/TF) with exceptional superhydrophilicity and underwater superoleophobicity. Driven by gravity, a rejection rate of over 99% is achieved for various emulsions containing oil content ranging from 1% to 50%, as well as oil/seawater emulsions. The flux recovery rate exceeds 90% after one hundred cycles and a 4-h filtration period. The enhanced separation performance is realized through the "gas bridge" effect during in situ aeration and electrochemical anodic oxidation. The internal aeration within the membrane pores contributes to the removal of oil foulants. This study underscores the potential of coupling foam metal filtration materials with electrochemical technology, providing a paradigm for the exploration of novel oil/water separation membranes.

An efficient solution based on the synergistic effects of nickel foam in NiFe-LDH nanosheets for oil/water separation.

Efficient oil-water separation has always been a research hotspot in the field of environmental studies. Employing a one-step hydrothermal approach, NiFe-layered double hydroxides (LDH) nanosheets were synthesized on nickel foam substrates. The resulting NiFe-LDH/NF membrane exhibited rejection rates exceeding 99% across six diverse oil-water mixtures, concurrently demonstrating a remarkable ultra-high flux of 1.4 × 106 L·m-2·h-1. This flux value significantly surpasses those documented in existing literature, maintaining stable performance over 1000 manual filtration cycles. These breakthroughs stem from the synergistic interplay among the three-dimensional channels of the nickel foam, the nanosheets, and the hydration layer. By leveraging the pore size of the foam to enhance the functionality of the hydration layer, the conventional trade-off between permeability and selectivity was transformed into a balanced force relationship between the hydration layer and the oil phase. The operational and failure mechanisms of the hydration layer were examined using the prepared NiFe-LDH/NF membrane, validating the correlation between oil phase viscosity and density with hydration layer rupture. Additionally, an extended Derjaguin-Landau-Verwey-Overbeek (XDLVO) theory was employed to investigate changes in interaction energy, further reinforcing the study's findings. This research contributes novel insights and assistance to the comprehension and application of hydration layers in other membrane studies dedicated to oil-water separation.

Endpoint Detection Based on Optical Method in Chemical Mechanical Polishing.

Endpoint detection is an important technology in chemical mechanical polishing (CMP), which is used to capture the material interface and compensate the variations of consumables and incoming wafer thickness. This paper aimed to apply optical detection in metal CMP. An in situ optical measurement system was developed for a 12-inch CMP tool. Kinematic analysis of the scanning trajectory of the laser device indicated the relative position relationship between the device and the wafer. Average optical data within the wafer described the material removal of metal CMP. Furthermore, optical data and location described the non-uniformity of the entire wafer surface. In this research, the polishing condition and the residual of the wafer edge are characterized by optical trace. Pauta Criterion is used to discriminate the inflexion point of the material interface. The results reveal that the interface capture is accurate and effective.

Fabrication of Flexible and Transparent Metal Mesh Electrodes Using Surface Energy-Directed Assembly Process for Touch Screen Panels and Heaters.

Transparent conductive electrodes (TCEs) are indispensable components of various optoelectronic devices such as displays, touch screen panels, solar cells, and smart windows. To date, the fabrication processes for metal mesh-based TCEs are either costly or having limited resolution and throughput. Here, a two-step surface energy-directed assembly (SEDA) process to efficiently fabricate high resolution silver meshes is introduced. The two-step SEDA process turns from assembly on a functionalized substrate with hydrophilic mesh patterns into assembly on a functionalized substrate with stripe patterns. During the SEDA process, a three-phase contact line pins on the hydrophilic pattern regions while recedes on the hydrophobic non-pattern regions, ensuring that the assembly process can be achieved with excellent selectivity. The necessity of using the two-step SEDA process rather than a one-step SEDA process is demonstrated by both experimental results and theoretical analysis. Utilizing the two-step SEDA process, silver meshes with a line width down to 2 µm are assembled on both rigid and flexible substrates. The thickness of the silver meshes can be tuned by varying the withdraw speed and the assembly times. The assembled silver meshes exhibit excellent optoelectronic properties (sheet resistance of 1.79 Ω/□, optical transmittance of ≈92%, and a FoM value of 2465) as well as excellent mechanical stability. The applications of the assembled silver meshes in touch screen panels and thermal heaters are demonstrated, implying the potential of using the two-step SEDA process for the fabrication of TCEs for optoelectronic applications.

Prediction of Pad Wear Profile and Simulation of Its Influence on Wafer Polishing.

As feature sizes decrease, an investigation of pad unevenness caused by pad conditioning and its influence on chemical mechanical polishing is necessary. We set up a kinematic model to predict the pad wear profile caused by only diamond disk conditioning and verify it. This model shows the influences of different kinematic parameters. To keep the pad surface planar during polishing or only conditioning, we can change the sweep mode and range of the conditioner arm. The kinematic model is suitable for the prediction of the pad wear profile without considering the influence of mechanical parameters. Furthermore, based on the pad wear profile obtained from a real industrial process, we set up a static model to preliminarily investigate the influence of pad unevenness on the pad-wafer contact stress. The pad-wafer contact status in this static model can be approximated as an instantaneous state in a dynamic model. The model shows that the existence of a retaining ring helps to improve the wafer edge profile, and that pad unevenness can cause stress concentration and increase the difficulty in multi-zone pressure control of the polishing head.

Effects of the construction of fertile and cultivated soil layer on soil fertility and maize yield in Albic soil.

We examined the effects of fertile soil layer construction technology on soil fertility and maize yield with a 3-year field experiment in Albic soil in Fujin, Heilongjiang Province. There were five treatments, including conventional tillage (T15, without organic matter return) and fertile soil layer construction methods [deep tillage (0-35 cm) with straw return, T35+S; deep tillage with organic manure, T35+M; deep tillage with straw and organic manure return, T35+S+M; deep tillage with straw, organic manure return and chemical fertilizer, T35+S+M+F]. The results showed that: 1) compared with the T15 treatment, maize yield was significantly increased by 15.4%-50.9% under fertile layer construction treatments. 2) There was no significant difference of soil pH among all treatments in the first two years, but fertile soil layer construction treatments significantly increased soil pH of topsoil (0-15 cm soil layer) in the third year. The pH of subsoil (15-35 cm soil layer) significantly increased under T35+S+M+F, T35+S+M, and T35+M treatments, while no significant difference was observed for T35+S treatment, compared with T15 treatment. 3) The fertile soil layer construction treatments could improve the nutrient contents of the topsoil and subsoil layer, especially in the subsoil layer, with the contents of organic matter, total nitrogen, available phosphorus, alkali-hydrolyzed nitrogen and available potassium being increased by 3.2%-46.6%, 9.1%-51.8%, 17.5%-130.1%, 4.4%-62.8%, 22.2%-68.7% under the subsoil layer, respectively. The fertility richness indices were increased in the subsoil layer, and nutrient contents of the subsoil layer were close to those of topsoil layer, indicating that 0-35 cm fertile soil layer had been constructed. 4) Soil organic matter contents in the 0-35 cm layer were increased by 8.8%-23.2% and 13.2%-30.1% in the second and third years of fertile soil layer construction, respectively. Soil organic carbon storage was also gradually increased under fertile soil layer construction treatments. 5) The carbon conversion rate of organic matter was 9.3%-20.9% under T35+S treatment, and 10.6%-24.6% under T35+M, T35+S+M, and T35+S+M+F treatments. The carbon sequestration rate was 815.7-3066.4 kg·hm-2·a-1 in fertile soil layer construction treatments. The carbon sequestration rate of T35+S treatment increased with experimental periods, and soil carbon content under T35+M, T35+S+M and T35+S+M+F treatments reached saturation point in the experimental second year. Construction of fertile soil layers could improve the fertility of topsoil and subsoil and maize yield. In term of economic benefits, combination application of maize straw, organic material and chemical fertilizer within 0-35 cm soil, cooperating with conservation tillage, is recommended for the Albic soil fertility improvement.

An Investigation on the Total Thickness Variation Control and Optimization in the Wafer Backside Grinding Process.

The wafer backside grinding process has been a crucial technology to realize multi-layer stacking and chip performance improvement in the three dimension integrated circuits (3D IC) manufacturing. The total thickness variation (TTV) control is the bottleneck in the advanced process. However, the quantitative analysis theory model and adjustment strategy for TTV control are not currently available. This paper developed a comprehensive simulation model based on the optimized grinding tool configuration, and several typical TTV shapes were obtained. The relationship between the TTV feature components and the spindle posture was established. The linear superposition effect of TTV feature components and a new formation mechanism of TTV shape were revealed. It illustrated that the couple variation between the two TTV feature components could not be eliminated completely. To achieve the desired wafer thickness uniformity through a concise spindle posture adjustment operation, an effective strategy for TTV control was proposed. The experiments on TTV optimization were carried out, through which the developed model and TTV control strategy were verified to play a significant role in wafer thickness uniformity improvement. This work revealed a new insight into the fine control method to the TTV optimization, and provided a guidance for high-end grinding tool and advanced thinning process development.

Land use indirectly affects the cycling of multiple nutrients by altering the diazotrophic community in black soil.

BACKGROUND: Diazotrophic bacteria, as one of most important group of soil microorganisms, play critical roles in multiple ecosystem functions (i.e., multifunctionality). However, little information is available about the diazotrophic community in driving soil nutrient cycling and multifunctionality at different depths with distinct vegetation in the black soil region of northeastern China. To learn the interactions among land use, cycling of multiple nutrients and the diazotrophic community, we performed this study in grassland (GL), forested land and a cropland (CL) in soils at depths of 0-15 cm and 15-35 cm. RESULTS: The highest nifH gene abundances were found in the CL treatment, while the highest diazotrophic species richness and diversity were detected in the GL in both soil layers. The nifH gene abundance was directly/positively correlated with soil bulk density and negatively correlated with land use and soil depth. The index of multiple nutrient cycling was directly/negatively affected by soil depth and indirectly/positively affected by land use. Land use directly/negatively affected soil pH and thus indirectly affected the diazotrophic community composition and the nutrient cycling index. The diversity and community composition of the diazotrophs together accounted for 95% of the differences in the multiple nutrient cycling index. CONCLUSION: Soil diazotrophic communities undertake important roles in maintaining nutrient cycling and soil multifunctionality at depths of 0-15 cm and 15-35 cm layers with different land uses of the black soil region of China. © 2021 Society of Chemical Industry.

Long-term continuous cropping affects ecoenzymatic stoichiometry of microbial nutrient acquisition: a case study from a Chinese Mollisol.

BACKGROUND: Soil- and plant-produced extracellular enzymes drive nutrient cycling in soils and are assumed to regulate supply and demand for carbon (C) and nutrients within the soil. Thus, agriculture management decisions that alter the balance of plant and supplemental nutrients should directly alter extracellular enzyme activities (EEAs), and EEA stoichiometry in predictable ways. We used a 12-year experiment that varyied three major continuous grain crops (wheat, soybean, and maize), each crossed with mineral fertilizer (WCF, SCF and MCF, respectively) or not fertilized (WC, SC and MC, respectively, as controls). In response, we measured the phospholipid fatty acids (PLFAs), EEAs and their stoichiometry to examine the changes to soil microbial nutrient demand under the continuous cropping of crops, which differed with respect to the input of plant litter and fertilizer. RESULTS: Fertilizer generally decreased soil microbial biomass and enzyme activity compared to non-fertilized soil. According to enzyme stoichiometry, microbial nutrient demand was generally C- and phosphorus (P)-limited, but not nitrogen (N)-limited. However, the degree of microbial resource limitation differed among the three crops. The enzymatic C:N ratio was significantly lower by 13.3% and 26.8%, whereas the enzymatic N:P ratio was significantly higher by 9.9% and 42.4%, in MCF than in WCF and SCF, respectively. The abundances of arbuscular mycorrhizal fungi and aerobic PLFAs were significantly higher in MCF than in WCF and SCF. CONCLUSION: These findings are crucial for characterizing enzymatic activities and their stoichiometries that drive microbial metabolism with respect to understanding soil nutrient cycles and environmental conditions and optimizing practices of agricultural management. © 2021 Society of Chemical Industry.

Impacts of land-use changes on the variability of microbiomes in soil profiles.

BACKGROUND: The conversion of arable land to grassland and/or forested land is a common strategy of restoration because the development of plant communities can inhibit the erosion of soil, increase biodiversity and improve associated ecosystem services. The vertical profiles of microbial communities, however, have not been well characterized and their variability after land conversion is not well understood. We assessed the effects of the conversion of arable land (AL) to grassland (GL) and forested land (FL) on bacterial communities as old as 29 years in 0-200-cm profiles of a Chinese Mollisol. RESULTS: The soil in AL has been a stable ecosystem and changes in the assembly of soil microbiomes tended to be larger in the topsoil. The soil properties and microbial biodiversity of arable land were larger following revegetation and reforestation. The conversion caused a more complex coupling among microbes, and negative interactions and average connectivity were stronger in the 0-20-cm layers in GL and in the 20-60-cm layers in FL. The land use dramatically influenced the assembly of the microbial communities more in GL than AL and FL. The bacterial diversity was an important component of soil multinutrient cycling in the profiles and microbial functions were not as affected by changes in land use. CONCLUSION: The spatial variation of the microbiomes provided critical information on below-ground soil ecology and the ability of the soil to provide crucial ecosystem services. © 2021 Society of Chemical Industry.

Keystone Microbiomes Revealed by 14 Years of Field Restoration of the Degraded Agricultural Soil Under Distinct Vegetation Scenarios.

Agricultural intensification accelerates the degradation of cropland, and restoration has been managed by changing its vegetation. However, the keystone microbiome that drives the decomposition of plant-associated organic matter in the restoration is poorly understood. In this study, we established a 14-year field restoration experiment on a degraded cropland with four treatments: (1) bare land soil without biomass input (BL), (2) maize cropland (CL) without fertilization and biomass input, (3) natural grassland (GL), and (4) alfalfa cropland (AL) with biomass left in the fields. The activity of total soil microbiome was assessed by community-level physiological profiling (CLPP) with Biolog EcoPlates analysis, and keystone microbiome was identified as phylotypes showing statistically significant increase in the restored soils (GL and AL) relative to the degraded BL soil. The results showed that GL and AL treatments improved soil fertility as indicated by significant increase in soil organic carbon, total nitrogen, and available phosphorus when compared to BL treatment. The significant difference was not observed between CL and BL treatments except for pH and available phosphorus, indicating that the input and microbial decomposition of plant-associated organic matter were the key for restoration of soil fertility. Similar results were obtained for soil microbial activities of carbon utilization efficiency via CLPP analysis, and real-time quantitative polymerase chain reaction of 16S rRNA genes further revealed significantly higher abundance of total soil microbial community in GL and AL soils than in BL and CL. High-throughput sequencing of total 16S rRNA genes revealed the Bacteroidetes as the only keystone taxa at phylum level, and 106 and 120 genera were keystone phylotypes. Compared with BL and CL, the genera that increase significantly in GL and AL are called keystone genera of ecological restoration. The dominant keystone genera included Reyranella, Mesorhizobium, Devosia, Haliangium, Nocardioides, and Pseudonocardia. Significantly higher abundance of Bacillus genus in BL soil implied it might serve as an indicator of agricultural land degradation. Statistical analysis showed that soil organic carbon and pH were significantly correlated with the input of plant-associated organic matters and dynamic changes of keystone taxa. These results suggest that the vegetation of natural grass (GL) and alfalfa plant (AL) and subsequent decomposition of plant-associated materials could serve as effective strategies for restoration of the degraded cropland by stimulating the keystone microbiomes and improving their physiological metabolisms of carbon utilization efficiency.

Long-term application of fertilizer and manures affect P fractions in Mollisol.

Application of phosphorus (P), a major plant nutrient, as fertilizer is critical to maintain P level for crop production and yield in most cultivated soils. While, it may impact the dynamics, limited studies have examined the long-term effects of fertilization on P fractions in a soil profile in Mollisol. A long-term field experiment was conducted at the State Key Experimental Station of Agroecology of the Chinese Academy of Sciences in Hailun county, Heilongjiang Province, China. A sequential fractionation procedure was used to determine the effect of fertilizer (types) treatments including no fertilizer (CK), chemical fertilizer (NPK), chemical fertilizer plus straw (NPK + S) and pig manure (OM) on fractions of P and their distribution within 0-100 cm soil profiles. Unlike CK treatment, the long-term application of fertilizers increased the concentration and accumulation of total and available P in 0-20 and 0-40 cm soil depths than deeper soils, respectively. The phosphorus activity coefficient (PAC) ranged from 1.5 to 13.8% within 0-100 cm soil depth. The largest PAC value was observed under OM treatment at 0-40 cm soil depth and under NPK + S treatment at 40-100 cm soil depth. The Ca2-P and Ca8-P concentrations increased significantly by 0.5-7.5 times and 0.5-10.4 times, respectively in OM treatment with the largest value in 0-40 cm soil depth over CK treatment. The Al-P concentration under NPK + S and OM treatments increased throughout the soil profile. The OM treatment increased all Po concentrations in the 0-40 cm soil depth, while NPK and NPK + S treatments increased labile organic P, moderately labile organic P, and highly stable organic P in the 0-20 cm soil depth. Thus, the application of fertilizer and straw, or organic manure may enhance inorganic and organic P pool in a Mollisol in Northeast China. Thus, organic manure application in the subsoil as a potential P source and their impact should be considered in developing management practices and policies regarding nutrient management.

[Effects of the construction of fertile and cultivated upland soil layer on soil fertility and maize yield in black soil region in Northeast China.] / 肥沃耕层构建对东北黑土区旱地土壤肥力和玉米产量的影响.

Organic amendment return could enhance soil fertility, improve soil structure, and increase crop yield. However, how construction of soil layers can affect soil fertility and crop yield are not fully understood. We examined the effects of constructions of fertile and cultivated soil layer on soil fertility and maize yield in the upland black soil region in Northeast China, to provide theoretical guidance in increasing soil fertility and sustainable development of agriculture. Based on the combination of field plot experiments and demonstration regions, nine study sites with different ecological characteristics were selected from Heilongjiang, Jilin and Liaoning provinces from northeast China, covering dark brown, black, meadow, chernozem, albic, brown and cinnamon soils. There were three treatments in each study site, including maize straw return within 0-35 cm soil layer (CFⅠ), the combination of maize straw and organic manure return within 0-35 cm soil layer (CFⅡ) and conventional agricultural practice without organic amendmentas control (CK). The rate of straw return in CFⅠ and CFⅡ treatments were 10000 kg·hm-2, and full straw for demonstration regions. The rate of organic manure in CFⅡ treatment was 30000 kg·hm-2. Considerable difference in soil fertility were recorded among the nine study sites with the trend of tillage layer > sub-tillage layer, especially for dark brown soil and albic soil. Soil fertility of tillage layer and sub-tillage layer was relatively low both for brown soil and cinnamon soil. The heavy clay and plow pan were pivotal limiting factors of soil fertility for the black soil and the meadow soil. Compared with CK, the concentrations of soil organic matter (SOM), available nitrogen (AN), available phosphorous (AP), and available potassium (AK) in tillage layers was increased on average by 1.85 g·kg-1, 20.16 mg·kg-1, 1.56 mg·kg-1 and 17.2 mg·kg-1 in the CFⅠ and CFⅡ treatments in five study sites with more than two years of treatments. The contents of SOM, AN, AP and AK in sub-tillage layer increased by 2.09 g·kg-1, 12.06 mg·kg-1, 2.18 mg·kg-1 and 3.84 mg·kg-1, compared with tillage layer. CFⅠ treatment significantly enhanced the contents of SOM and AP in both tested soil layers, while CFⅡ treatment significantly enhanced all fertility indices in both tested soil layers. This indicated that the increase of organic amendment return is an effective way to improve soil fertility. Maize yield fluctuated under the combined effect of climatic conditions and soil types. The significant differences in maize yield under CK, CFⅠ and CFⅡ treatments were observed with a trend of CFⅡ > CFⅠ > CK. This result indicated that the construction of fertile and cultivated soil layer could significantly increase maize yield independent of soil types. The construction of fertile and cultivated soil layer based on maize straw return or maize straw and organic manure combined return within 0-35 cm soil layer, could simultaneously increase soil fertility in both tillage and sub-tillage layer, as well as maize yield. We suggested that the selection of approaches of the constructions of fertile and cultivated soil layer should consider soil types and the sources of organic amendments. It should also give priority to soil layers rich in organic manure source to construct fertile and cultivated soil layers.

Assembly structures and electronic properties of truxene-porphyrin compounds studied by STM/STS.

The self-assembly of functional molecules into uniform nanostructures with innovational properties has attracted extensive research interest. In the present work, the assembly structures and electronic properties of a novel type of truxene derivative, e.g. truxene-porphyrin derivatives, were studied, for the first time, on a highly oriented pyrolytic graphite (HOPG) surface. Scanning tunneling microscopy (STM) images revealed that the truxene-porphyrin compounds could be parallelly arranged into long-ranged lamellar patterns. Density functional theory (DFT) calculations helped explain the assembly mechanisms further. Besides, order distribution of the smaller compound 1T1P in the 1,3,5-tris(10-carboxydecyloxy)-benzene (TCDB) host network was achieved, which is a reflection of the dimensional effect in the host-guest assembly. Furthermore, together with theoretical analyses, scanning tunneling spectroscopy (STS) measurements were conducted to investigate the electronic properties of truxene-porphyrin compounds. Results showed that the metalation of the porphyrin units could have a significant effect on the band gap and the position of the gap center. The study enhances our understanding of the assembly mechanism of truxene derivatives at the molecular level and paves the way towards fabricating truxene-based functional nanodevices.

Nanotribological Study of Supramolecular Template Networks Induced by Hydrogen Bonds and van der Waals Forces.

Nanotribology has been given increasing attention by researchers in pursuing the nature of friction. In the present work, an approach that combines the supramolecular assembly and nanotribology is introduced. Herein, the nanotribological study was carried out on seven supramolecular template networks [namely, hydrogen bond induced tricarboxylic acids and van der Waals force induced hexaphenylbenzene (HPB) derivatives]. The template networks, as well as the host-guest assemblies of template molecules induced by different forces, were constructed on the highly oriented pyrolytic graphite (HOPG) surface and explicitly characterized using scanning tunneling microscopy (STM). Meanwhile, the nanotribological properties of the template networks were measured using atomic force microscopy (AFM). Together with the theoretical calculation using the density functional theory (DFT) method, it was revealed that the friction coefficients were positively correlated with the interaction strength. The frictional energy dissipation mainly derives from both the intermolecular interaction energy and the interaction energy between molecules and the substrate. The efforts not only help us gain insight into the competitive mechanisms of hydrogen bond and van der Waals force in supramolecular assembly but also shed light on the origin of friction and the relationship between the assembly structures and the nanotribological properties at the molecular level.

Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions.

Topographic nanomanufacturing with a depth precision down to atomic dimension is of importance for advancement of nanoelectronics with new functionalities. Here we demonstrate a mask-less and chemical-free nanolithography process for regio-specific removal of atomic layers on a single crystalline silicon surface via shear-induced mechanochemical reactions. Since chemical reactions involve only the topmost atomic layer exposed at the interface, the removal of a single atomic layer is possible and the crystalline lattice beneath the processed area remains intact without subsurface structural damages. Molecular dynamics simulations depict the atom-by-atom removal process, where the first atomic layer is removed preferentially through the formation and dissociation of interfacial bridge bonds. Based on the parametric thresholds needed for single atomic layer removal, the critical energy barrier for water-assisted mechanochemical dissociation of Si-Si bonds was determined. The mechanochemical nanolithography method demonstrated here could be extended to nanofabrication of other crystalline materials.

Evolution of entrained water film thickness and dynamics of Marangoni flow in Marangoni drying.

As an ultra-clean wafer drying technique, Marangoni drying has been widely applied in the integrated circuits manufacturing process. When the wafer is vertically withdrawn from a deionization water bath, Marangoni stress along the meniscus, which is induced by the organic vapour, strips off the water film entrained on the wafer surface, and the wafer drying is thereby realized. In this work, a numerical model is presented that is comprised of the film, meniscus, and bulk regions for Marangoni drying. The model combines the transfer of organic vapour from air to water and the withdrawal of the wafer from the bath. The evolution of the entrained water film thickness, the tangential velocity, and the stress at the air-water interface are quantitatively investigated. The results reveal that the thickness of the entrained water film is reduced by more than one order of magnitude compared with the wafer withdrawn process without the Marangoni effect. In addition, owing to the receding of the contact line, it is found that the capillary pressure gradient dramatically increases, which contributes to the sudden increase in the tangential velocity in the dynamic meniscus. Moreover, the tangential velocity decreases in the static meniscus adjacent to the dynamic meniscus, which results from the redistribution of the interfacial concentration of the organic species driven by the Marangoni flow.

Signal processing and analysis for copper layer thickness measurement within a large variation range in the CMP process.

In the copper (Cu) chemical mechanical planarization (CMP) process, accurate determination of a process reaching the end point is of great importance. Based on the eddy current technology, the in situ thickness measurement of the Cu layer is feasible. Previous research studies focus on the application of the eddy current method to the metal layer thickness measurement or endpoint detection. In this paper, an in situ measurement system, which is independently developed by using the eddy current method, is applied to the actual Cu CMP process. A series of experiments are done for further analyzing the dynamic response characteristic of the output signal within different thickness variation ranges. In this study, the voltage difference of the output signal is used to represent the thickness of the Cu layer, and we can extract the voltage difference variations from the output signal fast by using the proposed data processing algorithm. The results show that the voltage difference decreases as thickness decreases in the conventional measurement range and the sensitivity increases at the same time. However, it is also found that there exists a thickness threshold, and the correlation is negative, when the thickness is more than the threshold. Furthermore, it is possible that the in situ measurement system can be used within a larger Cu layer thickness variation range by creating two calibration tables.

On-Surface Synthesis of Self-Assembled Monolayers of Benzothiazole Derivatives Studied by STM and XPS.

On-surface synthesis has gradually become a prevalent approach to constructing two-dimensional functional monolayers on various substrates. In the present work, the synthesis of self-assembled monolayers (SAMs) of benzothiazole derivatives was conducted at the liquid/solid interface for the first time. Two kinds of nanostructures were achieved on the highly oriented pyrolytic graphite (HOPG) surface via the condensation reaction between aromatic aldehyde derivatives and 2-aminothiophenol (ATP). The formation of thiazole-based self-assemblies was revealed by scanning tunneling microscopy (STM) and further confirmed by X-ray photoelectron spectroscopy (XPS). The successful synthesis of the benzothiazole derivatives not only extends the scope of on-surface reactions but also can be applied in designing multifunctional SAMs at the interface.

Surface Orientation and Temperature Effects on the Interaction of Silicon with Water: Molecular Dynamics Simulations Using ReaxFF Reactive Force Field.

In this work, we use ReaxFF molecular dynamics simulations to investigate the interaction between water molecules and silicon surfaces with different orientations under ambient temperatures of 300 and 500 K. We studied the water adsorption and dissociation processes as well as the silicon oxidation process on the Si (100), (110), and (111) surfaces. The simulation results indicate that water can adsorb on the Si surfaces in the forms of molecular adsorption and dissociative adsorption, making the surfaces terminated by H2O, OH, and H species. The molecular adsorption of H2O dominates the (100) and (110) surfaces, whereas the dissociative adsorption dominates the (111) surface. Besides, the adsorbed hydroxyl oxygen can insert into the Si-Si bond of the substrate to make the surface oxidized, forming the Si-O-Si bonds. Our simulation results also indicate that the (100) surface is mostly terminated by H whereas (111) is mostly terminated by OH. The higher temperature causes more H2O to dissociate and also make all these surfaces more oxidized. Our results are consistent with most experiments. This study sheds lights on the wet oxidation process of Si and Si surface structure evolution in microelectromechanical systems as well as the Si chemical mechanical polishing process.