Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance.

To address the serious acoustic performance deterioration induced by air leakage in the low-frequency range and the asynchronous vibration in electroacoustic transduction structures near the resonant frequency, a novel sealing strategy is proposed that targets one of the most widely reported piezoelectric MEMS speaker designs. This design consists of multiple cantilever beams, in which the air gaps between cantilevers are automatically and selectively filled with liquid polydimethylsiloxane (PDMS) via the capillary effect, followed by curing. In the proof-of-concept demonstration, the sound pressure level (SPL) within the frequency range lower than 100 Hz markedly increased after sealing in an experiment using an IEC ear simulator. Specifically, the SPL is increased by 4.9 dB at 20 Hz for a 40 Vpp driving voltage. Moreover, the deteriorated SPL response near the resonant frequencies of the cantilever beams (18 kHz-19 kHz) caused by their asynchronous vibration induced by the fabrication process nonuniformity also significantly improved, which successfully increased the SPL to approximately 17.5 dB. Moreover, sealed devices feature nearly the same SPL response as the initial counterpart in the frequency band from 100 Hz to 16 kHz and a total harmonic distortion (THD) of 0.728% at 1 kHz for a 40 Vpp driving voltage. Compared with existing sealing methods, the current approach offers easy operation, low damage risk, excellent repeatability/reliability and excellent robustness advantages and provides a promising technical solution for MEMS acoustic devices.

AlN-based piezoelectric MEMS deformable mirror.

An AlN-based piezoelectric micro-electromechanical system (MEMS) continuous membrane deformable mirror (DM) prototype is presented for the first time. Its effective aperture diameter is 5 mm and it is equipped with 25 independently controlled actuators. Owing to the advantages associated with the AlN piezoelectric thin-film technology, attractive characteristics including CMOS compatible fabrication, bidirectional linear and negligible hysteresis actuation, and excellent linear superposition control capability have been successfully demonstrated. Moreover, good optical aberration correction performance is also validated via the surface contour fitting experiment to the Zernike polynomials up to the first 14 orders despite the non-optimized device structure design, representing great application perspective.

Single optical fiber based forward-viewing all-optical ultrasound self-transceiving probe.

All-optical ultrasound probes with fully integrated ultrasound generation and detection functions demonstrate some unique advantages over traditional electroacoustic counterparts. However, due to the lack of an effective solution, the most commonly used method is to assemble two separate functional optical fibers together for ultrasound generation and detection, respectively. In this Letter, an innovative strategy, to the best of our knowledge, is developed to integrate the photoacoustic effect based ultrasound generation and the Fabry-Pérot (FP) interference based ultrasound detection structures together at the end of a single double clad optical fiber (DCF), so as to make a compact forward-viewing ultrasound self-transceiving probe (1-mm diameter). From the experiment results, the as-fabricated probe can generate an ultrasound signal with an amplitude of 2.36 MPa at 2.25 mm in the transmitting mode, and its peak frequency and -6-dB bandwidth are measured to be 10.64 MHz and 22.93 MHz, respectively. When being operated under the receiving mode, the probe has a detection sensitivity of 208.4 mV/MPa for ultrasound signals with the peak frequency of 8.24 MHz, and the noise equivalent pressure (NEP) is 76.8 kPa. In addition, the forward-viewing format ultrasound self-transceiving experiment is also performed and the pulse-echo signal varying with the transmission distance is successfully captured for the first time.