RESUMO
The decreasing size of semiconductor features and the increasing structural complexity of advanced devices have placed continuously greater demands on manufacturing metrology, arising both from the measurement challenges of smaller feature sizes and the growing requirement to characterize structures in more than just a single critical dimension. For scanning electron microscopy, this has resulted in increasing sophistication of imaging models. For critical dimension atomic force microscopes (CD-AFMs), this has resulted in the need for smaller and more complex tips. Carbon nanotube (CNT) tips have thus been the focus of much interest and effort by a number of researchers. However, there have been significant issues surrounding both the manufacture and use of CNT tips. Specifically, the growth or attachment of CNTs to AFM cantilevers has been a challenge to the fabrication of CNT tips, and the flexibility and resultant bending artifacts have presented challenges to using CNT tips. The Korea Research Institute for Standards and Science (KRISS) has invested considerable effort in the controlled fabrication of CNT tips and is collaborating with the National Institute of Standards and Technology on the application of CNT tips for CD-AFM. Progress by KRISS on the precise control of CNT orientation, length, and end modification, using manipulation and focused ion beam processes, has allowed us to implement ball-capped CNT tips and bent CNT tips for CD-AFM. Using two different generations of CD-AFM instruments, we have evaluated these tip types by imaging a line/space grating and a programmed line edge roughness specimen. We concluded that these CNTs are capable of scanning the profiles of these structures, including re-entrant sidewalls, but there remain important challenges to address. These challenges include tighter control of tip geometry and careful optimization of scan parameters and algorithms for using CNT tips.
RESUMO
Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.
RESUMO
Multi-wall carbon nanotube (MWNT) attached atomic force microscope (AFM) tips (MWNT tips) have good potential for use in AFM lithography. Good conducting MWNT tips are needed in such applications. However, characterizing the conductance of MWNT tips is nontrivial: making a good electrical contact between the MWNT and electrode is difficult. We observed that MWNT tips produced by hydrocarbon-deposition attachment usually do not make good electrical contacts to gold electrodes because of the thin and rough amorphous carbon layer on the MWNT that was unintentionally deposited during the attachment. We found that good contacts can be made if a more amorphous carbon layer is deposited to form a thick and smooth amorphous carbon layer on MWNTs. Good contact was made either by transformation of the amorphous carbon layer into a conducting or peel-off layer, exposing the bare MWNT surface. MWNT tips with an exposed MWNT surface showed the well-known high-current-flowing capacity and the stepped-cutting behavior of bare MWNTs. The peeling-off behavior of a thick amorphous carbon layer may be utilized in producing bare-surfaced MWNT tips that have good conductance and therefore are useful for applications.
