High-order harmonic generation from solid targets with 2 mJ pulses.

Harmonics up to the 18th order are generated from solid targets by focusing 2 mJ, 50 fs pulses at 800 nm to a spot size of 1.7 µm (FWHM). To our knowledge, this is the first demonstration of high-harmonic generation with a very short focal length paraboloid (f/1.4) and kilohertz laser system. The harmonics have a low divergence (<4°) compared to the driving beam and conversion efficiencies (>10(-7) per harmonic) comparable to gas harmonics. No contrast enhancement techniques are employed, and the system is capable of operating at 500 Hz.

Quasimonoenergetic electron beams with relativistic energies and ultrashort duration from laser-solid interactions at 0.5 kHz.

We investigate the production of electron beams from the interaction of relativistically-intense laser pulses with a solid-density SiO(2) target in a regime where the laser pulse energy is approximately mJ and the repetition rate approximately kHz. The electron beam spatial distribution and spectrum were investigated as a function of the plasma scale length, which was varied by deliberately introducing a moderate-intensity prepulse. At the optimum scale length of lambda/2, the electrons are emitted in a collimated beam having a quasimonoenergetic distribution that peaked at approximately 0.8 MeV. A highly reproducible structure in the spatial distribution exhibits an evacuation of electrons along the laser specular direction and suggests that the electron beam duration is comparable to that of the laser pulse. Particle-in-cell simulations which are in good agreement with the experimental results offer insights on the acceleration mechanism by the laser field.

High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets.

In this paper we report the development of nanosecond-pulsed fiber laser technology for the next generation EUV lithography sources. The demonstrated fiber laser system incorporates large core fibers and arbitrary optical waveform generation, which enables achieving optimum intensities and other critical beam characteristics on a laser-plasma target. Experiment demonstrates efficient EUV generation with conversion efficiency of up to 2.07% for in-band 13.5-nm radiation using mass-limited Sn-doped droplet targets. This result opens a new technological path towards fiber laser based high power EUV sources for high-throughput lithography steppers.

Generation of hard X-rays using an ultrafast fiber laser system.

We report the first hard X-ray source driven by a femtosecond fiber laser. The high energy fiber CPA system incorporated a 65mum LMA fiber amplifying stage which provided 300-fs recompressed pulses and diffraction limited beam quality with M(2) < 1.07. A deformable mirror was used to optimize the wavefront and the spot size was focused down to 2.3 mum with an f/1.2 paraboloidal mirror. 50muJ was deposited on the nickel target with 2x10(15)-W/cm(2) focal intensity and a distinctive Ni K(alpha)-line (7.48 keV) emission was measured with 5x10(-8) energy conversion efficiency.

Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation.

Efficient generation of extreme UV (EUV) light at lambda = 13.5 nm from a bulk Sn target has been demonstrated by using a fiber laser. The conversion efficiency from the 1064 nm IR to the EUV was measured to be around 0.9% into 2pi steradians within a 2% bandwidth. To the best of our knowledge, this is the first time an all-fiber system was used to generate EUV or soft x rays.