Metrology for the next generation of semiconductor devices.

The semiconductor industry continues to produce ever smaller devices that are ever more complex in shape and contain ever more types of materials. The ultimate sizes and functionality of these new devices will be affected by fundamental and engineering limits such as heat dissipation, carrier mobility and fault tolerance thresholds. At present, it is unclear which are the best measurement methods needed to evaluate the nanometre-scale features of such devices and how the fundamental limits will affect the required metrology. Here, we review state-of-the-art dimensional metrology methods for integrated circuits, considering the advantages, limitations and potential improvements of the various approaches. We describe how integrated circuit device design and industry requirements will affect lithography options and consequently metrology requirements. We also discuss potentially powerful emerging technologies and highlight measurement problems that at present have no obvious solution.

Effect of the surface treatment of plain carbon fiber posts on the retention of the composite core: an in vitro evaluation.

This study aims to evaluate the role of surface treatments performed on plain carbon fiber posts, in relation to serrated carbon fiber posts, in the retention of the composite core. Fifty carbon fiber posts received surface treatments in order to verify their influence on the retention of the core material. An acrylic resin mold was developed in order to precisely fit the post, leaving a machined space to accommodate a self-curing composite resin. After the surface treatment, a primer was applied on the coronal portion of all posts, which were then dried. They were fitted to the mold and received a 3 mm composite core. All specimens were thermocycled and then stored in distilled water for a week. Tension test was performed at a speed of 0.5 mm/min until there was lack of adhesion or fracture of the core. The conclusions were: a) the values of retention related to aluminum oxide spray (group A), depth cutter diamond burs (group C) and posts with machined coronal portion (group D) were comparable to those of serrated posts (group E), although no statistically significant difference between these groups was found; b) the mean values of core retention in group B (medium grit diamond burs) were statistically lower than those of other groups.