RESUMO
We found that liquid droplets encapsulated by Parylene deposited directly on a liquid surface deformed toward spherical shapes during Parylene deposition. This deformation suggested that the film stress was tensile. We calculated the film stress of such Parylene films by studying the surface mean curvature of the droplet shape and found the film stress measured about 0.7-0.9 MPa tensile. This film stress is of opposite type to that of as-deposited Parylene films deposited on solid substrates, which was compressive. This difference might indicate a profound change of the Parylene polymer due to the use of liquid surface as deposition substrate. The tensile film stress and its effect on the droplet shape also have implications in the fabrication and operation of Parylene microdevices that have encapsulated liquid structures such as microlens or micropumps.
Assuntos
Polímeros/química , Estresse Mecânico , Xilenos/química , Microscopia Eletrônica de Varredura , Parafina/química , Silicones/químicaRESUMO
We have developed a package for disposable glucose sensor chips using Parylene encapsulation of a glucose oxidase solution in the liquid phase and a cover structure made of an ultraviolet (UV) curable adhesive. Parylene was directly deposited onto a small volume (1 µL) of glucose oxidase solution through chemical vapor deposition. The cover and reaction chamber were constructed on Parylene film using a UV-curable adhesive and photolithography. The package was processed at room temperature to avoid denaturation of the glucose oxidase. The glucose oxidase solution was encapsulated and unsealed. Glucose sensing was demonstrated using standard amperometric detection at glucose concentrations between 0.1 and 100 mM, which covers the glucose concentration range of diabetic patients. Our proposed Parylene encapsulation and UV-adhesive cover form a liquid phase glucose-oxidase package that has the advantages of room temperature processing and direct liquid encapsulation of a small volume solution without use of conventional solidifying chemicals.