A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies.

A novel ultra-high vacuum instrument for X-ray reflectometry and spectrometry-related techniques for nanoanalytics by means of synchrotron radiation has been constructed and commissioned. This versatile instrument was developed by the Physikalisch-Technische Bundesanstalt, Germany's national metrology institute, and includes a 9-axis manipulator that allows for an independent alignment of the samples with respect to all degrees of freedom. In addition, a rotational and translational movement of several photodiodes as well as a translational movement of an aperture system in and out of the beam is provided. Thus, the new instrument enables various analytical techniques based on energy dispersive X-ray detectors such as reference-free X-ray fluorescence analysis (XRF), total-reflection XRF, grazing-incidence XRF in addition to optional X-ray reflectometry measurements or polarization-dependent X-ray absorption fine structure analyses. With this instrument samples having a size of up to 100 mm × 100 mm can be analyzed with respect to their mass deposition, elemental or spatial composition, or the species in order to probe surface contamination, layer composition and thickness, the depth profile of matrix elements or implants, the species of nanolayers, nanoparticles or buried interfaces as well as the molecular orientation of bonds. Selected applications of this advanced ultra-high vacuum instrument demonstrate both its flexibility and capability.

Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature.

Layered samples Si(100)/C/Ni/BC(x)N(y) and Si(100)/C/Cu/BC(x)N(y) were produced by physical vapor deposition of a metal (Ni, Cu, resp.) and low-pressure chemical vapor deposition of the boron carbonitride on a Si(100) substrate. Between the Si and the Ni (Cu) and on the surface of the Ni (Cu) layer, thin carbon layers were deposited, as a diffusion barrier or as a protection against oxidation, respectively. Afterwards, the surface carbon layer was removed. As precursor, trimethylamine borane and, as an auxiliary gas, H(2) and NH(3) were used, respectively. The chemical compositions of the layers and of the interfaces in between were characterized by total-reflection X-ray fluorescence spectrometry combined with near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry. The application of H(2) yielded the BC(x)N(y) compound whereas the use of NH(3) led to a mixture of h-BN and graphitic carbon. At the BC(x)N(y)/metal interface, metal borides could be identified. At the relatively high synthesis temperature of 700 °C, broad regions of Cu or Ni and Si were observed between the metal layer and the substrate Si.

Evaluation of high-resolution X-ray absorption and emission spectroscopy for the chemical speciation of binary titanium compounds.

For the chemical speciation of binary compounds of tri- and tetravalent titanium, high-resolution X-ray absorption and emission spectra were recorded in different energy regimes in order to evaluate and to qualify both near-edge X-ray absorption fine structure (NEXAFS or XANES) spectroscopy and wavelength-dispersive X-ray emission spectroscopy (WDXES) as spectroscopic methods for this analytical task. A high resolving power in the excitation channel was ensured by use of monochromatic synchrotron radiation provided by BESSY II, where the soft X-ray emission spectra were recorded as well. In the hard X-ray range, emission measurements were performed at SPring-8. For a comparison of the information gained from the various methods, the titanium compounds were classified according to the bonded titanium's oxidation state. Thus, it was possible to distinguish between inner atomic effects due to different oxidation states and external effects related to the respective ligand and the surrounding structure. It becomes evident, that certain compounds, while hardly distinguishable in their Ti-K XANES spectra, still show significant differences in their emission characteristics. On the other hand, some compounds with little difference in their emission spectra are easily distinguished by their NEXAFS structures. Only the combined use of the complementary methods both in the soft and the hard X-ray range allows for a reliable speciation of tri- and tetravalent titanium compounds.